JP4296352B2 - コンポーネントを載置装置によって基体ホルダ上の所望位置へ載置する方法およびその方法を実施するために最適な装置 - Google Patents
コンポーネントを載置装置によって基体ホルダ上の所望位置へ載置する方法およびその方法を実施するために最適な装置 Download PDFInfo
- Publication number
- JP4296352B2 JP4296352B2 JP2004506331A JP2004506331A JP4296352B2 JP 4296352 B2 JP4296352 B2 JP 4296352B2 JP 2004506331 A JP2004506331 A JP 2004506331A JP 2004506331 A JP2004506331 A JP 2004506331A JP 4296352 B2 JP4296352 B2 JP 4296352B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- component
- mounting device
- camera
- desired position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
- H05K13/0812—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines the monitoring devices being integrated in the mounting machine, e.g. for monitoring components, leads, component placement
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
- H05K13/0815—Controlling of component placement on the substrate during or after manufacturing
Landscapes
- Engineering & Computer Science (AREA)
- Operations Research (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Supply And Installment Of Electrical Components (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Wire Bonding (AREA)
Description
2 コンポーネント
3 基体
6 ノズル
7 マーク
11 レンズシステム
12 カメラ
Claims (3)
- コンポーネントを基体上の望ましい位置へノズルを有する載置装置によって載置する方法であって、コンポーネントが、ノズルを有する載置装置によって基体上の所望位置上方の中間位置へ移動させられ、その後、コンポーネントの中間位置および基体上のコンポーネントの所望位置間の相違が、少なくとも1つのカメラおよび処理装置によって決定され、その後、コンポーネントが、ノズルを有する載置装置によって中間位置および基体に関する所望位置間の相違に基づいて移動させられかつ基体上の所望位置に位置決めされる方法を実施するために適した装置であって、基体キャリヤと、基体キャリヤに向かって移動しうる、ノズルを有する載置装置と、少なくとも1つのカメラと、処理装置と、カメラおよびノズルを有する載置装置間に配置された光学システムとを備えている装置において、ノズルを有する載置装置の少なくとも一部および作動中に基体キャリヤに支持された基体の少なくとも一部が、同時に、カメラに光学システムによって、撮像可能であり、ノズルを有する載置装置が、少なくとも1つのマークと、上記少なくとも1つのマークおよび基体キャリヤ間に配置されたミラーとを備えている装置。
- 上記ミラーおよび作動中に基体キャリヤによって支持された基体間の距離が、上記ミラーおよびカメラ内に基体を撮像したマーク間の距離に実質的に等しいことを特徴とする請求項1に記載の装置。
- 載置装置が、載置装置に関して移動しうるバキュームチューブを備えている請求項1または2に記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02077002 | 2002-05-22 | ||
PCT/IB2003/002139 WO2003098990A1 (en) | 2002-05-22 | 2003-05-20 | Method of placing a component by means of a placement device at a desired position on a substrate holder, and device suitable for performing such a method |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005526405A JP2005526405A (ja) | 2005-09-02 |
JP4296352B2 true JP4296352B2 (ja) | 2009-07-15 |
Family
ID=29433172
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004506331A Expired - Lifetime JP4296352B2 (ja) | 2002-05-22 | 2003-05-20 | コンポーネントを載置装置によって基体ホルダ上の所望位置へ載置する方法およびその方法を実施するために最適な装置 |
Country Status (10)
Country | Link |
---|---|
US (1) | US8094187B2 (ja) |
EP (1) | EP1510116B1 (ja) |
JP (1) | JP4296352B2 (ja) |
KR (1) | KR101002992B1 (ja) |
CN (1) | CN1656867A (ja) |
AT (1) | ATE481862T1 (ja) |
AU (1) | AU2003228039A1 (ja) |
DE (1) | DE60334209D1 (ja) |
TW (1) | TW200404485A (ja) |
WO (1) | WO2003098990A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011104225B4 (de) * | 2011-06-15 | 2017-08-24 | Mühlbauer Gmbh & Co. Kg | Vorrichtung und Verfahren zum Positionieren eines elektronischen Bauteils und / oder eines Trägers relativ zu einer Ausstoßeinrichtung |
US10925199B2 (en) * | 2014-12-10 | 2021-02-16 | Fuji Corporation | Component mounter |
US10743447B2 (en) | 2015-02-26 | 2020-08-11 | Fuji Corporation | Component mounting machine |
DE102015016763B3 (de) * | 2015-12-23 | 2017-03-30 | Mühlbauer Gmbh & Co. Kg | Vorrichtung und Verfahren zum Positionieren und Übertragen auf einem Substrat bereitgestellter elektronischer Bauteile |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4846619A (en) * | 1985-04-08 | 1989-07-11 | Odetics, Inc. | Robotic materials handling system |
JPH0691354B2 (ja) | 1985-09-06 | 1994-11-14 | 松下電器産業株式会社 | 部品装着機における部品位置認識装置 |
JPS6470395A (en) | 1987-09-07 | 1989-03-15 | Ishikawajima Harima Heavy Ind | Displacement calculation method of floating roof in floating roof tank |
JPH01276800A (ja) | 1988-04-28 | 1989-11-07 | Matsushita Electric Ind Co Ltd | 電子部品マウント装置 |
US5172468A (en) * | 1990-08-22 | 1992-12-22 | Sony Corporation | Mounting apparatus for electronic parts |
US5878484A (en) * | 1992-10-08 | 1999-03-09 | Tdk Corporation | Chip-type circuit element mounting apparatus |
JPH06257281A (ja) | 1993-03-06 | 1994-09-13 | Daiwa House Ind Co Ltd | コンクリート打設階上床スリーブ工法 |
US6320644B1 (en) * | 1994-04-18 | 2001-11-20 | Craig R. Simpson | Reticle alignment system for use in lithography |
US5590456A (en) * | 1994-12-07 | 1997-01-07 | Lucent Technologies Inc. | Apparatus for precise alignment and placement of optoelectric components |
US5903662A (en) | 1995-06-30 | 1999-05-11 | Dci Systems, Inc. | Automated system for placement of components |
JP2994991B2 (ja) * | 1995-09-19 | 1999-12-27 | ウシオ電機株式会社 | マスクとワークの位置合わせ方法および装置 |
JPH1070395A (ja) | 1996-08-27 | 1998-03-10 | Matsushita Electric Ind Co Ltd | 部品装着装置 |
JPH10224099A (ja) * | 1997-02-04 | 1998-08-21 | Fuji Mach Mfg Co Ltd | 回路部品装着方法および回路部品装着システム |
JPH11285925A (ja) | 1998-04-06 | 1999-10-19 | Yamagata Casio Co Ltd | 部品搭載装置 |
US6160906A (en) * | 1998-06-01 | 2000-12-12 | Motorola, Inc. | Method and apparatus for visually inspecting an object |
US6203082B1 (en) * | 1999-07-12 | 2001-03-20 | Rd Automation | Mounting apparatus for electronic parts |
JP2001308001A (ja) * | 1999-10-05 | 2001-11-02 | Nikon Corp | 潜像形成方法及び潜像検出方法及び露光方法及びデバイス及び露光装置及びレジスト及び基板 |
US6538425B1 (en) * | 1999-11-29 | 2003-03-25 | Fuji Machine Mfg. Co., Ltd. | Method of measuring accuracy of electric-component mounting system |
US20010055069A1 (en) * | 2000-03-10 | 2001-12-27 | Hudson Edison T. | One camera system for component to substrate registration |
JP4607313B2 (ja) * | 2000-12-08 | 2011-01-05 | 富士機械製造株式会社 | 電子部品装着システム |
-
2003
- 2003-05-19 TW TW092113467A patent/TW200404485A/zh unknown
- 2003-05-20 DE DE60334209T patent/DE60334209D1/de not_active Expired - Lifetime
- 2003-05-20 AT AT03725508T patent/ATE481862T1/de not_active IP Right Cessation
- 2003-05-20 KR KR1020047018631A patent/KR101002992B1/ko active IP Right Grant
- 2003-05-20 US US10/515,125 patent/US8094187B2/en active Active
- 2003-05-20 CN CNA038116278A patent/CN1656867A/zh active Pending
- 2003-05-20 EP EP03725508A patent/EP1510116B1/en not_active Expired - Lifetime
- 2003-05-20 WO PCT/IB2003/002139 patent/WO2003098990A1/en active Application Filing
- 2003-05-20 JP JP2004506331A patent/JP4296352B2/ja not_active Expired - Lifetime
- 2003-05-20 AU AU2003228039A patent/AU2003228039A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP2005526405A (ja) | 2005-09-02 |
KR101002992B1 (ko) | 2010-12-22 |
KR20050000426A (ko) | 2005-01-03 |
US20050225631A1 (en) | 2005-10-13 |
TW200404485A (en) | 2004-03-16 |
WO2003098990A1 (en) | 2003-11-27 |
EP1510116A1 (en) | 2005-03-02 |
AU2003228039A1 (en) | 2003-12-02 |
US8094187B2 (en) | 2012-01-10 |
EP1510116B1 (en) | 2010-09-15 |
DE60334209D1 (de) | 2010-10-28 |
CN1656867A (zh) | 2005-08-17 |
ATE481862T1 (de) | 2010-10-15 |
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