JP4292623B2 - 酸化スズ膜の成膜方法 - Google Patents

酸化スズ膜の成膜方法 Download PDF

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Publication number
JP4292623B2
JP4292623B2 JP12052399A JP12052399A JP4292623B2 JP 4292623 B2 JP4292623 B2 JP 4292623B2 JP 12052399 A JP12052399 A JP 12052399A JP 12052399 A JP12052399 A JP 12052399A JP 4292623 B2 JP4292623 B2 JP 4292623B2
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Japan
Prior art keywords
tin oxide
tin
hydrogen bromide
injector
oxide film
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Expired - Fee Related
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JP12052399A
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Japanese (ja)
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JP2000313960A (ja
JP2000313960A5 (https=
Inventor
誠二 東
幸雄 吉川
直樹 種田
徹 池田
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AGC Inc
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Asahi Glass Co Ltd
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Priority to JP12052399A priority Critical patent/JP4292623B2/ja
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Publication of JP2000313960A5 publication Critical patent/JP2000313960A5/ja
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JP12052399A 1999-04-27 1999-04-27 酸化スズ膜の成膜方法 Expired - Fee Related JP4292623B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12052399A JP4292623B2 (ja) 1999-04-27 1999-04-27 酸化スズ膜の成膜方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12052399A JP4292623B2 (ja) 1999-04-27 1999-04-27 酸化スズ膜の成膜方法

Publications (3)

Publication Number Publication Date
JP2000313960A JP2000313960A (ja) 2000-11-14
JP2000313960A5 JP2000313960A5 (https=) 2005-05-19
JP4292623B2 true JP4292623B2 (ja) 2009-07-08

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JP12052399A Expired - Fee Related JP4292623B2 (ja) 1999-04-27 1999-04-27 酸化スズ膜の成膜方法

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JP (1) JP4292623B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2856057B1 (fr) * 2003-06-13 2007-03-30 Saint Gobain Traitement par projection de panneaux poses sur un support barriere
US8557328B2 (en) * 2009-10-02 2013-10-15 Ppg Industries Ohio, Inc. Non-orthogonal coater geometry for improved coatings on a substrate
KR101541155B1 (ko) 2012-12-13 2015-08-06 엘아이지인베니아 주식회사 원자층 증착장치

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JP2000313960A (ja) 2000-11-14

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