JP4286441B2 - 搬送装置 - Google Patents

搬送装置 Download PDF

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Publication number
JP4286441B2
JP4286441B2 JP2000280763A JP2000280763A JP4286441B2 JP 4286441 B2 JP4286441 B2 JP 4286441B2 JP 2000280763 A JP2000280763 A JP 2000280763A JP 2000280763 A JP2000280763 A JP 2000280763A JP 4286441 B2 JP4286441 B2 JP 4286441B2
Authority
JP
Japan
Prior art keywords
shaft
outer shaft
circumscribed
speed reducer
inner shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2000280763A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002096285A (ja
JP2002096285A5 (enExample
Inventor
弘樹 森
徹也 渡邉
長平 奥野
高弘 前川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nabtesco Corp
Original Assignee
Nabtesco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nabtesco Corp filed Critical Nabtesco Corp
Priority to JP2000280763A priority Critical patent/JP4286441B2/ja
Priority to KR1020010040963A priority patent/KR100730661B1/ko
Priority to CNB011203064A priority patent/CN1282838C/zh
Priority to DE60134285T priority patent/DE60134285D1/de
Priority to US09/901,859 priority patent/US6729201B2/en
Priority to TW090116860A priority patent/TW521028B/zh
Priority to EP01116859A priority patent/EP1172182B1/en
Priority to CN200610151598XA priority patent/CN1939676B/zh
Priority to EP05009521A priority patent/EP1561549B1/en
Priority to DE60116194T priority patent/DE60116194T2/de
Publication of JP2002096285A publication Critical patent/JP2002096285A/ja
Publication of JP2002096285A5 publication Critical patent/JP2002096285A5/ja
Application granted granted Critical
Publication of JP4286441B2 publication Critical patent/JP4286441B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Manipulator (AREA)
  • Friction Gearing (AREA)
JP2000280763A 2000-07-10 2000-09-14 搬送装置 Expired - Lifetime JP4286441B2 (ja)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP2000280763A JP4286441B2 (ja) 2000-09-14 2000-09-14 搬送装置
KR1020010040963A KR100730661B1 (ko) 2000-07-10 2001-07-09 트랙션 구동 감속기, 트랙션 구동 감속기를 이용하는 운반장치, 및 운반 장치의 이축 출력 엔코더 기구
DE60116194T DE60116194T2 (de) 2000-07-10 2001-07-10 Reibungs-Antriebsgeschwindigkeitsreduzierung und Förderer mit Reibungs-Antriebsgeschwindigkeitsreduzierung
US09/901,859 US6729201B2 (en) 2000-07-10 2001-07-10 Traction drive speed reducer, conveyance apparatus using traction drive speed reducer, and arrangement of two-axis output encoder in conveyance apparatus
TW090116860A TW521028B (en) 2000-07-10 2001-07-10 Traction drive speed reducer, conveyance apparatus using traction drive speed reducer, and arrangement of two-axis output encoder in conveyance apparatus
EP01116859A EP1172182B1 (en) 2000-07-10 2001-07-10 Traction drive speed reducer and conveyance apparatus using traction drive speed reducer
CNB011203064A CN1282838C (zh) 2000-07-10 2001-07-10 曳引驱动减速器和输送装置
EP05009521A EP1561549B1 (en) 2000-07-10 2001-07-10 Conveyance apparatus
DE60134285T DE60134285D1 (de) 2000-07-10 2001-07-10 Förderer
CN200610151598XA CN1939676B (zh) 2000-07-10 2001-07-10 输送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000280763A JP4286441B2 (ja) 2000-09-14 2000-09-14 搬送装置

Publications (3)

Publication Number Publication Date
JP2002096285A JP2002096285A (ja) 2002-04-02
JP2002096285A5 JP2002096285A5 (enExample) 2007-05-10
JP4286441B2 true JP4286441B2 (ja) 2009-07-01

Family

ID=18765536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000280763A Expired - Lifetime JP4286441B2 (ja) 2000-07-10 2000-09-14 搬送装置

Country Status (1)

Country Link
JP (1) JP4286441B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100464161C (zh) * 2006-01-12 2009-02-25 中国科学院长春光学精密机械与物理研究所 一种绝对式双轴系光电轴角编码器
JP5996857B2 (ja) * 2011-09-30 2016-09-21 東京エレクトロン株式会社 駆動装置及び基板処理システム
CN108698233B (zh) 2016-02-25 2022-02-18 株式会社达谊恒 驱动装置
WO2017145833A1 (ja) * 2016-02-25 2017-08-31 株式会社ダイヘン 駆動装置
CN108700177B (zh) * 2016-02-25 2022-03-11 株式会社达谊恒 驱动装置
CN117124339A (zh) * 2023-09-05 2023-11-28 上海广川科技有限公司 一种基于磁流体的紧凑型同心两轴真空机器人传动结构

Also Published As

Publication number Publication date
JP2002096285A (ja) 2002-04-02

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