JP4285370B2 - 半導体試験装置 - Google Patents

半導体試験装置 Download PDF

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Publication number
JP4285370B2
JP4285370B2 JP2004246175A JP2004246175A JP4285370B2 JP 4285370 B2 JP4285370 B2 JP 4285370B2 JP 2004246175 A JP2004246175 A JP 2004246175A JP 2004246175 A JP2004246175 A JP 2004246175A JP 4285370 B2 JP4285370 B2 JP 4285370B2
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Japan
Prior art keywords
semiconductor
semiconductor relay
relay
pin
dut
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JP2004246175A
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Japanese (ja)
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JP2006064488A (ja
JP2006064488A5 (https=
Inventor
亘 五十嵐
利彦 茂呂
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Yokogawa Electric Corp
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Yokogawa Electric Corp
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Priority to JP2004246175A priority Critical patent/JP4285370B2/ja
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JP2004246175A 2004-08-26 2004-08-26 半導体試験装置 Expired - Fee Related JP4285370B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004246175A JP4285370B2 (ja) 2004-08-26 2004-08-26 半導体試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004246175A JP4285370B2 (ja) 2004-08-26 2004-08-26 半導体試験装置

Publications (3)

Publication Number Publication Date
JP2006064488A JP2006064488A (ja) 2006-03-09
JP2006064488A5 JP2006064488A5 (https=) 2006-12-21
JP4285370B2 true JP4285370B2 (ja) 2009-06-24

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JP2004246175A Expired - Fee Related JP4285370B2 (ja) 2004-08-26 2004-08-26 半導体試験装置

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JP (1) JP4285370B2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007322372A (ja) * 2006-06-05 2007-12-13 Yokogawa Electric Corp Ｉｃテスタ
JP2008102060A (ja) * 2006-10-20 2008-05-01 Yokogawa Electric Corp 半導体試験装置のタイミング校正回路及びタイミング校正方法
JPWO2008062579A1 (ja) * 2006-11-22 2010-03-04 パナソニック株式会社 半導体検査装置
CN100575972C (zh) * 2006-12-30 2009-12-30 中国科学院上海硅酸盐研究所 电脉冲诱导的电阻可逆变化的测试系统及其应用

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JP2006064488A (ja) 2006-03-09

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