JP4276711B2 - 半導体製造装置制御システム - Google Patents

半導体製造装置制御システム Download PDF

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Publication number
JP4276711B2
JP4276711B2 JP00025598A JP25598A JP4276711B2 JP 4276711 B2 JP4276711 B2 JP 4276711B2 JP 00025598 A JP00025598 A JP 00025598A JP 25598 A JP25598 A JP 25598A JP 4276711 B2 JP4276711 B2 JP 4276711B2
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Japan
Prior art keywords
event
semiconductor manufacturing
manufacturing apparatus
recipe
group management
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Expired - Lifetime
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JP00025598A
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English (en)
Japanese (ja)
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JPH11195566A5 (https=
JPH11195566A (ja
Inventor
裕幸 岩倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Kokusai Denki Electric Inc
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Publication date
Application filed by Hitachi Kokusai Electric Inc, Kokusai Denki Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP00025598A priority Critical patent/JP4276711B2/ja
Publication of JPH11195566A publication Critical patent/JPH11195566A/ja
Publication of JPH11195566A5 publication Critical patent/JPH11195566A5/ja
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Publication of JP4276711B2 publication Critical patent/JP4276711B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • General Factory Administration (AREA)
  • Testing And Monitoring For Control Systems (AREA)
JP00025598A 1998-01-05 1998-01-05 半導体製造装置制御システム Expired - Lifetime JP4276711B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP00025598A JP4276711B2 (ja) 1998-01-05 1998-01-05 半導体製造装置制御システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP00025598A JP4276711B2 (ja) 1998-01-05 1998-01-05 半導体製造装置制御システム

Publications (3)

Publication Number Publication Date
JPH11195566A JPH11195566A (ja) 1999-07-21
JPH11195566A5 JPH11195566A5 (https=) 2006-02-16
JP4276711B2 true JP4276711B2 (ja) 2009-06-10

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JP00025598A Expired - Lifetime JP4276711B2 (ja) 1998-01-05 1998-01-05 半導体製造装置制御システム

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JP (1) JP4276711B2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6625513B1 (en) * 2000-08-15 2003-09-23 Applied Materials, Inc. Run-to-run control over semiconductor processing tool based upon mirror image target
KR100939329B1 (ko) * 2002-01-10 2010-01-28 어드밴스드 마이크로 디바이시즈, 인코포레이티드 에이전트 기반 제어 아키텍쳐
JP4686268B2 (ja) * 2005-06-21 2011-05-25 株式会社東芝 工程制御システム、工程制御方法及び電子装置の製造方法
JP7304692B2 (ja) * 2018-12-13 2023-07-07 東京エレクトロン株式会社 基板処理方法および基板処理装置
JP7334223B2 (ja) 2021-09-24 2023-08-28 株式会社Kokusai Electric 半導体デバイスの製造方法、基板処理システム及びプログラム
CN119790487A (zh) 2022-12-26 2025-04-08 株式会社国际电气 基板处理系统、基板处理装置、半导体器件的制造方法以及程序

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JPH11195566A (ja) 1999-07-21

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