JPH11195566A5 - - Google Patents

Info

Publication number
JPH11195566A5
JPH11195566A5 JP1998000255A JP25598A JPH11195566A5 JP H11195566 A5 JPH11195566 A5 JP H11195566A5 JP 1998000255 A JP1998000255 A JP 1998000255A JP 25598 A JP25598 A JP 25598A JP H11195566 A5 JPH11195566 A5 JP H11195566A5
Authority
JP
Japan
Prior art keywords
semiconductor manufacturing
manufacturing equipment
control system
management device
events
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998000255A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11195566A (ja
JP4276711B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP00025598A priority Critical patent/JP4276711B2/ja
Priority claimed from JP00025598A external-priority patent/JP4276711B2/ja
Publication of JPH11195566A publication Critical patent/JPH11195566A/ja
Publication of JPH11195566A5 publication Critical patent/JPH11195566A5/ja
Application granted granted Critical
Publication of JP4276711B2 publication Critical patent/JP4276711B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP00025598A 1998-01-05 1998-01-05 半導体製造装置制御システム Expired - Lifetime JP4276711B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP00025598A JP4276711B2 (ja) 1998-01-05 1998-01-05 半導体製造装置制御システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP00025598A JP4276711B2 (ja) 1998-01-05 1998-01-05 半導体製造装置制御システム

Publications (3)

Publication Number Publication Date
JPH11195566A JPH11195566A (ja) 1999-07-21
JPH11195566A5 true JPH11195566A5 (https=) 2006-02-16
JP4276711B2 JP4276711B2 (ja) 2009-06-10

Family

ID=11468823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP00025598A Expired - Lifetime JP4276711B2 (ja) 1998-01-05 1998-01-05 半導体製造装置制御システム

Country Status (1)

Country Link
JP (1) JP4276711B2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6625513B1 (en) * 2000-08-15 2003-09-23 Applied Materials, Inc. Run-to-run control over semiconductor processing tool based upon mirror image target
KR100939329B1 (ko) * 2002-01-10 2010-01-28 어드밴스드 마이크로 디바이시즈, 인코포레이티드 에이전트 기반 제어 아키텍쳐
JP4686268B2 (ja) * 2005-06-21 2011-05-25 株式会社東芝 工程制御システム、工程制御方法及び電子装置の製造方法
JP7304692B2 (ja) * 2018-12-13 2023-07-07 東京エレクトロン株式会社 基板処理方法および基板処理装置
JP7334223B2 (ja) 2021-09-24 2023-08-28 株式会社Kokusai Electric 半導体デバイスの製造方法、基板処理システム及びプログラム
CN119790487A (zh) 2022-12-26 2025-04-08 株式会社国际电气 基板处理系统、基板处理装置、半导体器件的制造方法以及程序

Similar Documents

Publication Publication Date Title
HK1049549A1 (zh) 燃料處理系統操作的控制系統及方法
CA2408950A1 (en) Method and system for optimizing performance of consumer appliances
WO2003079882A3 (en) Method and system for determining a risk of ulcer onset
GB0112900D0 (en) Method,system and program for conditionally controlling electronic devices
AU6499400A (en) Feedback cancellation apparatus and methods utilizing adaptive reference filter mechanisms
WO2004003968A3 (en) Method and system for arc suppression in a plasma processing system
JPH11195566A5 (https=)
WO2005046109A3 (en) Convergence device with dynamic program throttling based on power indicator
CA2306198A1 (en) Power distribution system for an appliance
WO2000031870A8 (en) Methods and systems for frequency generation for wireless devices
JP2005535987A5 (https=)
EP1069728A3 (en) Method for grouping communication apparatuses
EP1327535A3 (en) Tire pressure sensing system
EP0915563A3 (en) Automatic gain control
AU2019384229B2 (en) Direct current electric appliance control method and direct current electric appliance
CN116951705A (zh) 一种加湿器控制方法、装置、设备及存储介质
AU2001282426A1 (en) Estimating position and orientation in electromagnetic systems
WO2006113832A3 (en) System and method for predicting mold growth in an environment
AU4759400A (en) Connection handle
TW201025872A (en) An automatic adaptive method and structure for improving dynamic range of sigma-delta modulators
WO1999057875A3 (en) Method of updating terminal software in a telephone system
JPH11259223A5 (https=)
WO2006097676A3 (en) Monitoring computer-controlled processes
WO2002017067A3 (en) System and method for proactive caching employing graphical usage description
JP2001119249A5 (https=)