JP4249944B2 - アトミックレゾリューション・ストレージ用の滑らかな表面の結晶性相変化層を製造する方法 - Google Patents

アトミックレゾリューション・ストレージ用の滑らかな表面の結晶性相変化層を製造する方法 Download PDF

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Publication number
JP4249944B2
JP4249944B2 JP2002163096A JP2002163096A JP4249944B2 JP 4249944 B2 JP4249944 B2 JP 4249944B2 JP 2002163096 A JP2002163096 A JP 2002163096A JP 2002163096 A JP2002163096 A JP 2002163096A JP 4249944 B2 JP4249944 B2 JP 4249944B2
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JP
Japan
Prior art keywords
phase change
cap layer
change layer
forming
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002163096A
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English (en)
Japanese (ja)
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JP2003022581A (ja
JP2003022581A5 (https=
Inventor
ホーエン・リー
ロバート・ビックネル−タシウス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of JP2003022581A publication Critical patent/JP2003022581A/ja
Publication of JP2003022581A5 publication Critical patent/JP2003022581A5/ja
Application granted granted Critical
Publication of JP4249944B2 publication Critical patent/JP4249944B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/2403—Layers; Shape, structure or physical properties thereof
    • G11B7/24056—Light transmission layers lying on the light entrance side and being thinner than the substrate, e.g. specially adapted for Blu-ray® discs
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/266—Sputtering or spin-coating layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/21—Circular sheet or circular blank
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Semiconductor Memories (AREA)
  • Physical Vapour Deposition (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Magnetic Record Carriers (AREA)
JP2002163096A 2001-06-05 2002-06-04 アトミックレゾリューション・ストレージ用の滑らかな表面の結晶性相変化層を製造する方法 Expired - Fee Related JP4249944B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/873,189 US6576318B2 (en) 2001-06-05 2001-06-05 Method to fabricate smooth-surfaced crystalline phase-change layer for atomic resolution storage device
US09/873189 2001-06-05

Publications (3)

Publication Number Publication Date
JP2003022581A JP2003022581A (ja) 2003-01-24
JP2003022581A5 JP2003022581A5 (https=) 2005-04-07
JP4249944B2 true JP4249944B2 (ja) 2009-04-08

Family

ID=25361141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002163096A Expired - Fee Related JP4249944B2 (ja) 2001-06-05 2002-06-04 アトミックレゾリューション・ストレージ用の滑らかな表面の結晶性相変化層を製造する方法

Country Status (5)

Country Link
US (1) US6576318B2 (https=)
EP (1) EP1265235B1 (https=)
JP (1) JP4249944B2 (https=)
CN (1) CN1389901A (https=)
DE (1) DE60206559T2 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7268794B2 (en) * 2000-10-30 2007-09-11 Yamaha Corporation Method of printing label on optical disk, optical disk unit, and optical disk
US6621096B2 (en) * 2001-05-21 2003-09-16 Hewlett-Packard Develpoment Company, L.P. Device isolation process flow for ARS system
US7005665B2 (en) 2004-03-18 2006-02-28 International Business Machines Corporation Phase change memory cell on silicon-on insulator substrate
KR100612906B1 (ko) * 2004-08-02 2006-08-14 삼성전자주식회사 상변화 기억 소자의 형성 방법
TW200633193A (en) * 2004-12-02 2006-09-16 Koninkl Philips Electronics Nv Non-volatile memory
KR20090013419A (ko) * 2007-08-01 2009-02-05 삼성전자주식회사 상변화 기억 소자 및 그 형성 방법
CN101794581B (zh) * 2010-03-01 2013-03-27 清华大学 一种硬盘设备

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5557596A (en) 1995-03-20 1996-09-17 Gibson; Gary Ultra-high density storage device
CN100543852C (zh) * 2000-05-11 2009-09-23 日本胜利株式会社 信息记录载体

Also Published As

Publication number Publication date
EP1265235A2 (en) 2002-12-11
US6576318B2 (en) 2003-06-10
EP1265235A3 (en) 2003-09-17
JP2003022581A (ja) 2003-01-24
US20020182363A1 (en) 2002-12-05
EP1265235B1 (en) 2005-10-12
DE60206559D1 (de) 2006-02-23
DE60206559T2 (de) 2006-07-20
CN1389901A (zh) 2003-01-08

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