JP4238453B2 - 流体制御装置 - Google Patents

流体制御装置 Download PDF

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Publication number
JP4238453B2
JP4238453B2 JP2000065986A JP2000065986A JP4238453B2 JP 4238453 B2 JP4238453 B2 JP 4238453B2 JP 2000065986 A JP2000065986 A JP 2000065986A JP 2000065986 A JP2000065986 A JP 2000065986A JP 4238453 B2 JP4238453 B2 JP 4238453B2
Authority
JP
Japan
Prior art keywords
line
passage
fluid control
process gas
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000065986A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001254900A5 (enExample
JP2001254900A (ja
Inventor
賢 石井
庸之 岡部
祐司 川野
道雄 山路
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Tokyo Electron Ltd
Fujikin Inc
Original Assignee
Toshiba Corp
Tokyo Electron Ltd
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2000065986A priority Critical patent/JP4238453B2/ja
Application filed by Toshiba Corp, Tokyo Electron Ltd, Fujikin Inc filed Critical Toshiba Corp
Priority to TW90105391A priority patent/TW500891B/zh
Priority to KR1020010011961A priority patent/KR100714755B1/ko
Priority to DE2001606312 priority patent/DE60106312T2/de
Priority to EP20010105800 priority patent/EP1132669B1/en
Priority to US09/801,896 priority patent/US6382238B2/en
Publication of JP2001254900A publication Critical patent/JP2001254900A/ja
Publication of JP2001254900A5 publication Critical patent/JP2001254900A5/ja
Application granted granted Critical
Publication of JP4238453B2 publication Critical patent/JP4238453B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Branch Pipes, Bends, And The Like (AREA)
  • Valve Housings (AREA)
  • Pipeline Systems (AREA)
JP2000065986A 2000-03-10 2000-03-10 流体制御装置 Expired - Fee Related JP4238453B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2000065986A JP4238453B2 (ja) 2000-03-10 2000-03-10 流体制御装置
KR1020010011961A KR100714755B1 (ko) 2000-03-10 2001-03-08 유체 제어장치
DE2001606312 DE60106312T2 (de) 2000-03-10 2001-03-08 Fluidregelvorrichtung
EP20010105800 EP1132669B1 (en) 2000-03-10 2001-03-08 Fluid control apparatus
TW90105391A TW500891B (en) 2000-03-10 2001-03-08 A fluid control device
US09/801,896 US6382238B2 (en) 2000-03-10 2001-03-09 Fluid control apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000065986A JP4238453B2 (ja) 2000-03-10 2000-03-10 流体制御装置

Publications (3)

Publication Number Publication Date
JP2001254900A JP2001254900A (ja) 2001-09-21
JP2001254900A5 JP2001254900A5 (enExample) 2005-05-26
JP4238453B2 true JP4238453B2 (ja) 2009-03-18

Family

ID=18585424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000065986A Expired - Fee Related JP4238453B2 (ja) 2000-03-10 2000-03-10 流体制御装置

Country Status (1)

Country Link
JP (1) JP4238453B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120104112A (ko) 2011-03-11 2012-09-20 가부시키가이샤 후지킨 볼트 풀림 방지 장치, 그 부착 방법과 부착 지그, 유체 제어 장치 및 기판 처리 장치

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004183771A (ja) * 2002-12-03 2004-07-02 Fujikin Inc 流体制御装置
JP3767897B2 (ja) * 2004-03-01 2006-04-19 シーケーディ株式会社 ガス供給集積ユニット
CN100408900C (zh) * 2004-05-20 2008-08-06 喜开理株式会社 气体供给集成单元和气体单元的增设方法
JP2006083959A (ja) 2004-09-16 2006-03-30 Fujikin Inc センサ付き継手部材
JP5085867B2 (ja) 2006-01-24 2012-11-28 株式会社フジキン 圧力センサ装置および圧力センサ内蔵流体制御機器
JP5797010B2 (ja) * 2011-05-20 2015-10-21 株式会社フジキン 流体制御装置
JP5868219B2 (ja) * 2012-02-29 2016-02-24 株式会社フジキン 流体制御装置
JP6175300B2 (ja) * 2013-07-17 2017-08-02 株式会社フジキン 流体制御装置用継手部材および流体制御装置
KR102148090B1 (ko) * 2016-01-28 2020-08-25 가부시키가이샤 후지킨 유체 제어 장치 및 가스 라인부의 착탈 방법
JP2018084255A (ja) * 2016-11-21 2018-05-31 東京エレクトロン株式会社 流体制御装置
US12331401B2 (en) 2020-03-23 2025-06-17 Horiba Stec, Co., Ltd. Vaporization system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120104112A (ko) 2011-03-11 2012-09-20 가부시키가이샤 후지킨 볼트 풀림 방지 장치, 그 부착 방법과 부착 지그, 유체 제어 장치 및 기판 처리 장치
US9103366B2 (en) 2011-03-11 2015-08-11 Tokyo Electron Limited Bolt-locking apparatus, mounting method thereof and mounting jig
US9494180B2 (en) 2011-03-11 2016-11-15 Tokyo Electron Limited Bolt-locking apparatus, mounting method thereof and mounting jig
US9835195B2 (en) 2011-03-11 2017-12-05 Tokyo Electron Limited Bolt-locking apparatus, mounting method thereof and mounting jig

Also Published As

Publication number Publication date
JP2001254900A (ja) 2001-09-21

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