JP2001254900A5 - - Google Patents

Download PDF

Info

Publication number
JP2001254900A5
JP2001254900A5 JP2000065986A JP2000065986A JP2001254900A5 JP 2001254900 A5 JP2001254900 A5 JP 2001254900A5 JP 2000065986 A JP2000065986 A JP 2000065986A JP 2000065986 A JP2000065986 A JP 2000065986A JP 2001254900 A5 JP2001254900 A5 JP 2001254900A5
Authority
JP
Japan
Prior art keywords
fluid control
view
line
sectional
process gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000065986A
Other languages
English (en)
Japanese (ja)
Other versions
JP4238453B2 (ja
JP2001254900A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2000065986A external-priority patent/JP4238453B2/ja
Priority to JP2000065986A priority Critical patent/JP4238453B2/ja
Priority to TW90105391A priority patent/TW500891B/zh
Priority to DE2001606312 priority patent/DE60106312T2/de
Priority to EP20010105800 priority patent/EP1132669B1/en
Priority to KR1020010011961A priority patent/KR100714755B1/ko
Priority to US09/801,896 priority patent/US6382238B2/en
Publication of JP2001254900A publication Critical patent/JP2001254900A/ja
Publication of JP2001254900A5 publication Critical patent/JP2001254900A5/ja
Publication of JP4238453B2 publication Critical patent/JP4238453B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

JP2000065986A 2000-03-10 2000-03-10 流体制御装置 Expired - Fee Related JP4238453B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2000065986A JP4238453B2 (ja) 2000-03-10 2000-03-10 流体制御装置
KR1020010011961A KR100714755B1 (ko) 2000-03-10 2001-03-08 유체 제어장치
DE2001606312 DE60106312T2 (de) 2000-03-10 2001-03-08 Fluidregelvorrichtung
EP20010105800 EP1132669B1 (en) 2000-03-10 2001-03-08 Fluid control apparatus
TW90105391A TW500891B (en) 2000-03-10 2001-03-08 A fluid control device
US09/801,896 US6382238B2 (en) 2000-03-10 2001-03-09 Fluid control apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000065986A JP4238453B2 (ja) 2000-03-10 2000-03-10 流体制御装置

Publications (3)

Publication Number Publication Date
JP2001254900A JP2001254900A (ja) 2001-09-21
JP2001254900A5 true JP2001254900A5 (enExample) 2005-05-26
JP4238453B2 JP4238453B2 (ja) 2009-03-18

Family

ID=18585424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000065986A Expired - Fee Related JP4238453B2 (ja) 2000-03-10 2000-03-10 流体制御装置

Country Status (1)

Country Link
JP (1) JP4238453B2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004183771A (ja) * 2002-12-03 2004-07-02 Fujikin Inc 流体制御装置
JP3767897B2 (ja) * 2004-03-01 2006-04-19 シーケーディ株式会社 ガス供給集積ユニット
CN100408900C (zh) * 2004-05-20 2008-08-06 喜开理株式会社 气体供给集成单元和气体单元的增设方法
JP2006083959A (ja) 2004-09-16 2006-03-30 Fujikin Inc センサ付き継手部材
JP5085867B2 (ja) 2006-01-24 2012-11-28 株式会社フジキン 圧力センサ装置および圧力センサ内蔵流体制御機器
JP5798766B2 (ja) 2011-03-11 2015-10-21 東京エレクトロン株式会社 ボルトの緩み防止装置ならびにその取付方法および取付治具
JP5797010B2 (ja) * 2011-05-20 2015-10-21 株式会社フジキン 流体制御装置
JP5868219B2 (ja) * 2012-02-29 2016-02-24 株式会社フジキン 流体制御装置
JP6175300B2 (ja) * 2013-07-17 2017-08-02 株式会社フジキン 流体制御装置用継手部材および流体制御装置
KR102148090B1 (ko) * 2016-01-28 2020-08-25 가부시키가이샤 후지킨 유체 제어 장치 및 가스 라인부의 착탈 방법
JP2018084255A (ja) * 2016-11-21 2018-05-31 東京エレクトロン株式会社 流体制御装置
US12331401B2 (en) 2020-03-23 2025-06-17 Horiba Stec, Co., Ltd. Vaporization system

Similar Documents

Publication Publication Date Title
JP2001254900A5 (enExample)
CN100439779C (zh) 流体控制装置
CN104704283B (zh) 流体控制装置
KR101007527B1 (ko) 유체 전달 시스템
JP5868219B2 (ja) 流体制御装置
TWI387696B (zh) 流體控制裝置及其組立方法
JP4780555B2 (ja) 流体制御装置
KR20020090145A (ko) 유체 제어 장치
CN104737086B (zh) 集成型气体供给装置
JP3780096B2 (ja) プロセスガス供給ユニット
US20130037145A1 (en) Fluid control device
KR20080094669A (ko) 압력 센서 장치 및 압력 센서 내장 유체 제어기기
JP4288629B2 (ja) 集積形流体制御装置
JP4238453B2 (ja) 流体制御装置
CA2346625C (en) Column packing and method for manufacturing the same
US20030116207A1 (en) Apparatus for conveying fluids and base plate
EP1504782A1 (fr) Générateur autonome d'oxygène
JP2000035148A (ja) 集積形流体制御装置
TW200916677A (en) Fluid control device
JP4077998B2 (ja) プロセスガス供給ユニット
CN201346447Y (zh) 集管部件及过滤装置
CN101198815A (zh) 流体控制装置
JP3595083B2 (ja) ガス供給ユニット
JP3858155B2 (ja) 流体制御装置
JP2025004952A (ja) 流路合流ブロック、ガス合流装置、ガス供給装置および半導体製造装置