JP4232731B2 - ボンディングワイヤ - Google Patents
ボンディングワイヤ Download PDFInfo
- Publication number
- JP4232731B2 JP4232731B2 JP2004318106A JP2004318106A JP4232731B2 JP 4232731 B2 JP4232731 B2 JP 4232731B2 JP 2004318106 A JP2004318106 A JP 2004318106A JP 2004318106 A JP2004318106 A JP 2004318106A JP 4232731 B2 JP4232731 B2 JP 4232731B2
- Authority
- JP
- Japan
- Prior art keywords
- wire
- ppm
- bonding
- bonding wire
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/4501—Shape
- H01L2224/45012—Cross-sectional shape
- H01L2224/45015—Cross-sectional shape being circular
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0102—Calcium [Ca]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0103—Zinc [Zn]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0105—Tin [Sn]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01057—Lanthanum [La]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01058—Cerium [Ce]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01063—Europium [Eu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/011—Groups of the periodic table
- H01L2924/01105—Rare earth metals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/20—Parameters
- H01L2924/207—Diameter ranges
- H01L2924/20751—Diameter ranges larger or equal to 10 microns less than 20 microns
Description
Snの添加には、ボンディングの際のボールを柔らかくするという効果がある。
Znを添加することは、理由は不明であるが、Sn、Caとともに添加するとワイヤの樹脂流れ耐性が上がる効果がある。
Caを添加することには、ワイヤのヤング率を向上させるという効果がある。
希土類元素を添加することにより、ワイヤのヤング率が上昇し、特に、樹脂封止時のワイヤの変形量が小さくなり、良好なボンディングが可能となる。
本発明が主として適用されるボンディングワイヤの線径は、0.012〜0.020mmの範囲である。ワイヤの線径が0.012mmを下回るとワイヤの剛性が足りず、樹脂封止時の変形量が大きくなるからであり、ワイヤの線径が0.020mmを上回るとファインピッチ(0.030mm〜0.040mm)に対応できないからである。しかしながら、本発明の適用されるボンディングワイヤの線径はこれに限られない。
本発明が主として適用されるボンディングワイヤにおいて、破断伸び率は、線径が上記範囲の場合に、1〜3%の範囲に調整される。ワイヤの破断伸び率が1%を下回るとワイヤが脆くなるからであり、また、ワイヤの破断伸び率を3%を上回らせるための熱処理をするとヤング率が低下するからである。なお、該ワイヤの破断伸び率は、伸線されたワイヤに適切な焼鈍を施すことにより制御できる。
本発明において、ボンディングワイヤの線径および破断伸び率が上記範囲にある場合の、該ボンディングワイヤのヤング率は70000〜100000N/mm2の範囲となる。ワイヤのヤング率が70000N/mm2を下回ると樹脂封止時のワイヤの変形量が大きくなる。一方、該ヤング率が100000N/mm2を上回ると破断伸びが小さくなりワイヤが脆くなる。
2 ボンディング中心線
L0 第1ボンド点と第2ボンド点との間の距離
L1 ワイヤ変形量
A 第1ボンド点
B 第2ボンド点
Claims (4)
- Auを主成分とする半導体素子用のボンディングワイヤにおいて、ワイヤ全質量あたり、Snを1〜100質量ppm、Znを1〜100質量ppm、Caを1〜50質量ppm含有し、残部がAuおよび不可避的不純物からなることを特徴とする半導体素子用のボンディングワイヤ。
- Auを主成分とする半導体素子用のボンディングワイヤにおいて、ワイヤ全質量あたり、Snを1〜100質量ppm、Znを1〜100質量ppm、Caを1〜50質量ppm、および、希土類元素の1種以上を合計で1〜100質量ppm含有し、残部がAuおよび不可避的不純物からなることを特徴とする半導体素子用のボンディングワイヤ。
- 線径が0.012〜0.020mmである請求項1または2に記載の半導体素子用のボンディングワイヤ。
- 破断伸び率が1〜3%であるときのヤング率が70000〜100000N/mm2であることを特徴とする請求項3に記載の半導体素子用のボンディングワイヤ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004318106A JP4232731B2 (ja) | 2004-11-01 | 2004-11-01 | ボンディングワイヤ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004318106A JP4232731B2 (ja) | 2004-11-01 | 2004-11-01 | ボンディングワイヤ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006128560A JP2006128560A (ja) | 2006-05-18 |
JP4232731B2 true JP4232731B2 (ja) | 2009-03-04 |
Family
ID=36722895
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004318106A Expired - Fee Related JP4232731B2 (ja) | 2004-11-01 | 2004-11-01 | ボンディングワイヤ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4232731B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017187510A (ja) * | 2017-07-19 | 2017-10-12 | セイコーエプソン株式会社 | センサーデバイス、力検出装置、およびロボット |
-
2004
- 2004-11-01 JP JP2004318106A patent/JP4232731B2/ja not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017187510A (ja) * | 2017-07-19 | 2017-10-12 | セイコーエプソン株式会社 | センサーデバイス、力検出装置、およびロボット |
Also Published As
Publication number | Publication date |
---|---|
JP2006128560A (ja) | 2006-05-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5116101B2 (ja) | 半導体実装用ボンディングワイヤ及びその製造方法 | |
JP4866490B2 (ja) | 半導体用銅合金ボンディングワイヤ | |
EP2239766A1 (en) | Bonding wire for semiconductor device | |
JP5840328B1 (ja) | 半導体装置用ボンディングワイヤ及びその製造方法 | |
JP4117331B2 (ja) | 半導体素子用Auボンディングワイヤ | |
WO2020059856A9 (ja) | 半導体装置用Cu合金ボンディングワイヤ | |
CN106486447B (zh) | 铜合金接合线 | |
JP4232731B2 (ja) | ボンディングワイヤ | |
JP6762386B2 (ja) | ボンディング用途のための厚い銅ワイヤを製造するための方法 | |
JP2922388B2 (ja) | ボンディング用金合金細線 | |
CN108701622B (zh) | 接合线 | |
JP5840327B1 (ja) | 半導体装置用ボンディングワイヤ及びその製造方法 | |
JP6714150B2 (ja) | ボンディングワイヤ及び半導体装置 | |
TWI391503B (zh) | Wire with gold alloy wire | |
JP2830520B2 (ja) | 半導体装置用ボンディングワイヤの製造方法 | |
JP3907534B2 (ja) | ボンディング用金合金線 | |
JP2005294681A (ja) | 半導体素子用ボンディングワイヤおよびその製造方法 | |
JP4655426B2 (ja) | 半導体素子接続用Auボンディングワイヤおよびその製造方法 | |
JP3426397B2 (ja) | 半導体素子用金合金細線 | |
JP2661249B2 (ja) | 半導体素子ボンディング用金合金線 | |
JPH02119148A (ja) | 半導体素子用ボンディングワイヤ | |
JP2007284787A (ja) | 半導体素子接続用金線 | |
WO2016104121A1 (ja) | 銅ボンディングワイヤ | |
JP3747023B2 (ja) | 半導体用金ボンディングワイヤ | |
JP2006073693A (ja) | ボンディングワイヤ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20061121 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20081111 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20081118 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20081201 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111219 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121219 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131219 Year of fee payment: 5 |
|
LAPS | Cancellation because of no payment of annual fees |