JP4227578B2 - 加熱方法および画像表示装置の製造方法 - Google Patents

加熱方法および画像表示装置の製造方法 Download PDF

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Publication number
JP4227578B2
JP4227578B2 JP2004269682A JP2004269682A JP4227578B2 JP 4227578 B2 JP4227578 B2 JP 4227578B2 JP 2004269682 A JP2004269682 A JP 2004269682A JP 2004269682 A JP2004269682 A JP 2004269682A JP 4227578 B2 JP4227578 B2 JP 4227578B2
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substrate
heat
image display
heating
heat reflecting
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Japanese (ja)
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JP2005129501A (ja
JP2005129501A5 (enExample
Inventor
明弘 木村
重人 鎌田
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Canon Inc
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Canon Inc
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JP2004269682A 2003-09-30 2004-09-16 加熱方法および画像表示装置の製造方法 Expired - Fee Related JP4227578B2 (ja)

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JP2004269682A JP4227578B2 (ja) 2003-09-30 2004-09-16 加熱方法および画像表示装置の製造方法

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JP2003340149 2003-09-30
JP2004269682A JP4227578B2 (ja) 2003-09-30 2004-09-16 加熱方法および画像表示装置の製造方法

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JP2005129501A JP2005129501A (ja) 2005-05-19
JP2005129501A5 JP2005129501A5 (enExample) 2007-03-29
JP4227578B2 true JP4227578B2 (ja) 2009-02-18

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JP2004269682A Expired - Fee Related JP4227578B2 (ja) 2003-09-30 2004-09-16 加熱方法および画像表示装置の製造方法

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101740070B1 (ko) 2009-06-01 2017-05-25 도요탄소 가부시키가이샤 탄탈 부재의 침탄 처리 방법 및 탄탈 부재

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5003663B2 (ja) * 2008-12-04 2012-08-15 株式会社島津製作所 真空加熱装置
WO2012013707A1 (en) * 2010-07-27 2012-02-02 Oerlikon Solar Ag, Trübbach Heating arrangement and method for heating substrates
JP6739417B2 (ja) * 2017-10-31 2020-08-12 Ｄｏｗａサーモテック株式会社 熱処理設備
CN113122804A (zh) * 2019-12-30 2021-07-16 上海升翕光电科技有限公司 蒸发源的加热装置和蒸镀设备

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101740070B1 (ko) 2009-06-01 2017-05-25 도요탄소 가부시키가이샤 탄탈 부재의 침탄 처리 방법 및 탄탈 부재

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