JP2005129501A5 - - Google Patents
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- Publication number
- JP2005129501A5 JP2005129501A5 JP2004269682A JP2004269682A JP2005129501A5 JP 2005129501 A5 JP2005129501 A5 JP 2005129501A5 JP 2004269682 A JP2004269682 A JP 2004269682A JP 2004269682 A JP2004269682 A JP 2004269682A JP 2005129501 A5 JP2005129501 A5 JP 2005129501A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004269682A JP4227578B2 (ja) | 2003-09-30 | 2004-09-16 | 加熱方法および画像表示装置の製造方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003340149 | 2003-09-30 | ||
| JP2004269682A JP4227578B2 (ja) | 2003-09-30 | 2004-09-16 | 加熱方法および画像表示装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005129501A JP2005129501A (ja) | 2005-05-19 |
| JP2005129501A5 true JP2005129501A5 (enExample) | 2007-03-29 |
| JP4227578B2 JP4227578B2 (ja) | 2009-02-18 |
Family
ID=34655614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004269682A Expired - Fee Related JP4227578B2 (ja) | 2003-09-30 | 2004-09-16 | 加熱方法および画像表示装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4227578B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5003663B2 (ja) * | 2008-12-04 | 2012-08-15 | 株式会社島津製作所 | 真空加熱装置 |
| CN102449185B (zh) | 2009-06-01 | 2013-09-18 | 东洋炭素株式会社 | 钽构件的渗碳处理方法和钽构件 |
| WO2012013707A1 (en) * | 2010-07-27 | 2012-02-02 | Oerlikon Solar Ag, Trübbach | Heating arrangement and method for heating substrates |
| JP6739417B2 (ja) * | 2017-10-31 | 2020-08-12 | Ｄｏｗａサーモテック株式会社 | 熱処理設備 |
| CN113122804A (zh) * | 2019-12-30 | 2021-07-16 | 上海升翕光电科技有限公司 | 蒸发源的加热装置和蒸镀设备 |
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2004
- 2004-09-16 JP JP2004269682A patent/JP4227578B2/ja not_active Expired - Fee Related