JP4212753B2 - 縦型熱処理装置 - Google Patents

縦型熱処理装置 Download PDF

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Publication number
JP4212753B2
JP4212753B2 JP2000047353A JP2000047353A JP4212753B2 JP 4212753 B2 JP4212753 B2 JP 4212753B2 JP 2000047353 A JP2000047353 A JP 2000047353A JP 2000047353 A JP2000047353 A JP 2000047353A JP 4212753 B2 JP4212753 B2 JP 4212753B2
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Japan
Prior art keywords
heat treatment
vertical heat
closing member
manifold
treatment apparatus
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Expired - Fee Related
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JP2000047353A
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English (en)
Japanese (ja)
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JP2001237238A5 (en:Method
JP2001237238A (ja
Inventor
知久 島津
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Priority to JP2000047353A priority Critical patent/JP4212753B2/ja
Publication of JP2001237238A publication Critical patent/JP2001237238A/ja
Publication of JP2001237238A5 publication Critical patent/JP2001237238A5/ja
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Publication of JP4212753B2 publication Critical patent/JP4212753B2/ja
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JP2000047353A 2000-02-24 2000-02-24 縦型熱処理装置 Expired - Fee Related JP4212753B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000047353A JP4212753B2 (ja) 2000-02-24 2000-02-24 縦型熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000047353A JP4212753B2 (ja) 2000-02-24 2000-02-24 縦型熱処理装置

Publications (3)

Publication Number Publication Date
JP2001237238A JP2001237238A (ja) 2001-08-31
JP2001237238A5 JP2001237238A5 (en:Method) 2006-10-12
JP4212753B2 true JP4212753B2 (ja) 2009-01-21

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ID=18569612

Family Applications (1)

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JP2000047353A Expired - Fee Related JP4212753B2 (ja) 2000-02-24 2000-02-24 縦型熱処理装置

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JP (1) JP4212753B2 (en:Method)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7351057B2 (en) * 2005-04-27 2008-04-01 Asm International N.V. Door plate for furnace
US7762809B2 (en) 2006-10-13 2010-07-27 Tokyo Electron Limited Heat treatment apparatus
JP5560556B2 (ja) * 2008-11-17 2014-07-30 東京エレクトロン株式会社 処理装置

Also Published As

Publication number Publication date
JP2001237238A (ja) 2001-08-31

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