JP4212428B2 - 薄膜磁気ヘッド - Google Patents
薄膜磁気ヘッド Download PDFInfo
- Publication number
- JP4212428B2 JP4212428B2 JP2003292840A JP2003292840A JP4212428B2 JP 4212428 B2 JP4212428 B2 JP 4212428B2 JP 2003292840 A JP2003292840 A JP 2003292840A JP 2003292840 A JP2003292840 A JP 2003292840A JP 4212428 B2 JP4212428 B2 JP 4212428B2
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- JP
- Japan
- Prior art keywords
- mass
- layer
- composition ratio
- alloy
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000010409 thin film Substances 0.000 title claims description 29
- 239000000203 mixture Substances 0.000 claims description 160
- 229910045601 alloy Inorganic materials 0.000 claims description 138
- 239000000956 alloy Substances 0.000 claims description 138
- 238000010586 diagram Methods 0.000 claims description 36
- 238000007747 plating Methods 0.000 claims description 16
- 230000001939 inductive effect Effects 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 167
- 238000010438 heat treatment Methods 0.000 description 52
- 238000005530 etching Methods 0.000 description 39
- 239000012792 core layer Substances 0.000 description 35
- 239000007864 aqueous solution Substances 0.000 description 31
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 26
- 238000009792 diffusion process Methods 0.000 description 22
- 229910003321 CoFe Inorganic materials 0.000 description 18
- 238000002474 experimental method Methods 0.000 description 12
- 239000010408 film Substances 0.000 description 12
- 239000011810 insulating material Substances 0.000 description 12
- 239000000126 substance Substances 0.000 description 11
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 10
- 238000005260 corrosion Methods 0.000 description 8
- 230000007797 corrosion Effects 0.000 description 8
- 230000001976 improved effect Effects 0.000 description 8
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- 230000004907 flux Effects 0.000 description 5
- 239000000696 magnetic material Substances 0.000 description 5
- 230000005389 magnetism Effects 0.000 description 5
- 230000000704 physical effect Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 229910019233 CoFeNi Inorganic materials 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000003475 lamination Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- -1 polyoxyethylene nonyl phenyl ether Polymers 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910017121 AlSiO Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910000691 Re alloy Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/1875—"Composite" pole pieces, i.e. poles composed in some parts of magnetic particles and in some other parts of magnetic metal layers
- G11B5/1877—"Composite" pole pieces, i.e. poles composed in some parts of magnetic particles and in some other parts of magnetic metal layers including at least one magnetic thin film
- G11B5/1878—"Composite" pole pieces, i.e. poles composed in some parts of magnetic particles and in some other parts of magnetic metal layers including at least one magnetic thin film disposed immediately adjacent to the transducing gap, e.g. "Metal-In-Gap" structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1274—Structure or manufacture of heads, e.g. inductive with "composite" cores, i.e. cores composed in some parts of magnetic particles and in some other parts of magnetic metal layers
- G11B5/1276—Structure or manufacture of heads, e.g. inductive with "composite" cores, i.e. cores composed in some parts of magnetic particles and in some other parts of magnetic metal layers including at least one magnetic thin film
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
- H01F10/14—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys containing iron or nickel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/26—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers
- H01F10/30—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers characterised by the composition of the intermediate layers, e.g. seed, buffer, template, diffusion preventing, cap layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
Description
前記ギャップ層は、NiPRe合金でメッキ形成されたものであり、
NiPRe合金の組成比は、図4及び図5に示す三元図で、
a点(Ni:P:Re)=(84質量%:16質量%:0質量%)と、
b点(Ni:P:Re)=(72質量%:0質量%:28質量%)とを結んだ直線の境界線A(境界線A上を含む)と、
c点(Ni:P:Re)=(20質量%:0質量%:80質量%)と、
d点(Ni:P:Re)=(82質量%:18質量%:0質量%)とを結んだ直線の境界線F(境界線F上を含む)と、
Reの組成比が2質量%である直線の境界線B(境界線B上を含む)と、
Reの組成比が46質量%である直線の境界線C(境界線C上を含む)と、
Pの組成比が、4質量%である直線の境界線D(境界線D上を含む)と、
で囲まれた範囲内であることを特徴とするものである。
本発明では、前記ギャップ層22は、NiPRe合金でメッキ形成されたものである。
a点(Ni:P:Re)=(84質量%:16質量%:0質量%)と、
b点(Ni:P:Re)=(72質量%:0質量%:28質量%)とを結んだ直線の境界線A(境界線A上を含む)と、
Reの組成比が2質量%である直線の境界線B(境界線B上を含む)と、
Reの組成比が46質量%である直線の境界線C(境界線C上を含む)と、
Pの組成比が、4質量%である直線の境界線D(境界線D上を含む)と、
Pの組成比が、18質量%である直線の境界線E(境界線D上を含む)と、
で囲まれた範囲内で、ある。
c点(Ni:P:Re)=(20質量%:0質量%:80質量%)と、
d点(Ni:P:Re)=(82質量%:18質量%:0質量%)とを結んだ直線を、境界線F(境界線F上を含む)としたとき、
NiPRe合金の組成比は、境界線A、B、C、D及びFで囲まれた範囲内であることが好ましい。
21、69 下部磁極層
22、70 ギャップ層
24 磁極層
26、72 上部コア層
29、33、77 コイル層
35、71 上部磁極層
Claims (4)
- 記録媒体との対向面側に設けられた磁極部、前記磁極部に記録磁界を導く磁気回路構成部、記録磁界を誘導するためのコイル層を有し、前記磁極部が、下から下部磁極層、ギャップ層及び上部磁極層の順に積層された薄膜磁気ヘッドにおいて、
前記ギャップ層は、NiPRe合金でメッキ形成されたものであり、
NiPRe合金の組成比は、図4及び図5に示す三元図で、
a点(Ni:P:Re)=(84質量%:16質量%:0質量%)と、
b点(Ni:P:Re)=(72質量%:0質量%:28質量%)とを結んだ直線の境界線A(境界線A上を含む)と、
c点(Ni:P:Re)=(20質量%:0質量%:80質量%)と、
d点(Ni:P:Re)=(82質量%:18質量%:0質量%)とを結んだ直線の境界線F(境界線F上を含む)と、
Reの組成比が2質量%である直線の境界線B(境界線B上を含む)と、
Reの組成比が46質量%である直線の境界線C(境界線C上を含む)と、
Pの組成比が、4質量%である直線の境界線D(境界線D上を含む)と、
で囲まれた範囲内であることを特徴とする薄膜磁気ヘッド。 - 元素Pの組成比は8質量%以上である請求項1記載の薄膜磁気ヘッド。
- 元素Reの組成比は、10質量%以上である請求項1又は2に記載の薄膜磁気ヘッド。
- 元素Reの組成比は、30質量%以下である請求項1ないし3のいずれかに記載の薄膜磁気ヘッド。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003292840A JP4212428B2 (ja) | 2003-08-13 | 2003-08-13 | 薄膜磁気ヘッド |
GB0415736A GB2405026B (en) | 2003-08-13 | 2004-07-14 | Thin film magnetic head including NiPre alloy gap layer |
US10/916,029 US7359148B2 (en) | 2003-08-13 | 2004-08-11 | Thin film magnetic head including NiPRe alloy gap layer |
CN200410057463.8A CN1284142C (zh) | 2003-08-13 | 2004-08-12 | 间隙层为NiPRe合金的薄膜磁头 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003292840A JP4212428B2 (ja) | 2003-08-13 | 2003-08-13 | 薄膜磁気ヘッド |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005063561A JP2005063561A (ja) | 2005-03-10 |
JP4212428B2 true JP4212428B2 (ja) | 2009-01-21 |
Family
ID=32906132
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003292840A Expired - Fee Related JP4212428B2 (ja) | 2003-08-13 | 2003-08-13 | 薄膜磁気ヘッド |
Country Status (4)
Country | Link |
---|---|
US (1) | US7359148B2 (ja) |
JP (1) | JP4212428B2 (ja) |
CN (1) | CN1284142C (ja) |
GB (1) | GB2405026B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007334934A (ja) * | 2006-06-12 | 2007-12-27 | Shinka Jitsugyo Kk | 積層体の研磨量検出素子、ウエファー、および積層体の研磨方法 |
US8808524B2 (en) * | 2009-01-27 | 2014-08-19 | Seagate Technology Llc | Direct electrodeposition of magnetic recording head features |
US9984707B2 (en) * | 2015-11-11 | 2018-05-29 | Seagate Technology Llc | Write pole wrap-around shield with gap lamination |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2189257B (en) * | 1986-03-28 | 1989-04-26 | Mitsubishi Metal Corp | High-frequency magnetic core material made of iron-based alloy |
KR920005044B1 (en) * | 1987-07-23 | 1992-06-25 | Hitachi Ltd | Magnetic head |
US5316844A (en) * | 1990-04-16 | 1994-05-31 | Hoya Electronics Corporation | Magnetic recording medium comprising an aluminum alloy substrate, now magnetic underlayers, magnetic layer, protective layer, particulate containing protective layer and lubricant layer |
JPH05335314A (ja) | 1992-06-02 | 1993-12-17 | Seiko Epson Corp | 電極の製造方法 |
JPH0636233A (ja) * | 1992-07-17 | 1994-02-10 | Tdk Corp | 薄膜磁気ヘッド |
JPH11213332A (ja) | 1998-01-22 | 1999-08-06 | Hitachi Ltd | 薄膜磁気ヘッド及び磁気ディスク装置 |
US6778357B2 (en) * | 2000-11-10 | 2004-08-17 | Seagate Technology Llc | Electrodeposited high-magnetic-moment material at writer gap pole |
JP3929697B2 (ja) * | 2000-12-07 | 2007-06-13 | アルプス電気株式会社 | 磁気記録素子およびその製造方法 |
JP3640898B2 (ja) | 2001-04-02 | 2005-04-20 | アルプス電気株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
JP2002353222A (ja) | 2001-05-29 | 2002-12-06 | Sharp Corp | 金属配線、それを備えた薄膜トランジスタおよび表示装置 |
US6786803B2 (en) * | 2002-11-19 | 2004-09-07 | International Business Machines Corporation | Onboard multiphase electronic lapping guide design for MR heads |
JP3842724B2 (ja) * | 2002-11-29 | 2006-11-08 | アルプス電気株式会社 | 磁気ヘッドの製造方法 |
JP2005063562A (ja) * | 2003-08-13 | 2005-03-10 | Alps Electric Co Ltd | 薄膜磁気ヘッドと、前記薄膜磁気ヘッドを用いた磁気装置、並びに前記薄膜磁気ヘッドの製造方法 |
-
2003
- 2003-08-13 JP JP2003292840A patent/JP4212428B2/ja not_active Expired - Fee Related
-
2004
- 2004-07-14 GB GB0415736A patent/GB2405026B/en not_active Expired - Fee Related
- 2004-08-11 US US10/916,029 patent/US7359148B2/en not_active Expired - Fee Related
- 2004-08-12 CN CN200410057463.8A patent/CN1284142C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN1581298A (zh) | 2005-02-16 |
US7359148B2 (en) | 2008-04-15 |
CN1284142C (zh) | 2006-11-08 |
US20050034789A1 (en) | 2005-02-17 |
GB2405026A (en) | 2005-02-16 |
JP2005063561A (ja) | 2005-03-10 |
GB2405026B (en) | 2006-08-16 |
GB0415736D0 (en) | 2004-08-18 |
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