JP4197819B2 - ターボ分子ポンプ - Google Patents

ターボ分子ポンプ Download PDF

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Publication number
JP4197819B2
JP4197819B2 JP2000040325A JP2000040325A JP4197819B2 JP 4197819 B2 JP4197819 B2 JP 4197819B2 JP 2000040325 A JP2000040325 A JP 2000040325A JP 2000040325 A JP2000040325 A JP 2000040325A JP 4197819 B2 JP4197819 B2 JP 4197819B2
Authority
JP
Japan
Prior art keywords
stator
rotor
casing
inner casing
surrounding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000040325A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001082379A5 (enExample
JP2001082379A (ja
Inventor
松太郎 宮本
宏明 小神野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/473,137 external-priority patent/US6926493B1/en
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2000040325A priority Critical patent/JP4197819B2/ja
Publication of JP2001082379A publication Critical patent/JP2001082379A/ja
Publication of JP2001082379A5 publication Critical patent/JP2001082379A5/ja
Application granted granted Critical
Publication of JP4197819B2 publication Critical patent/JP4197819B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2000040325A 1999-02-19 2000-02-17 ターボ分子ポンプ Expired - Fee Related JP4197819B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000040325A JP4197819B2 (ja) 1999-02-19 2000-02-17 ターボ分子ポンプ

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP11-41039 1999-02-19
JP4103999 1999-02-19
JP15621599 1999-06-03
JP11-156215 1999-06-03
JP20099099 1999-07-14
JP11-200990 1999-07-14
JP09/473137 1999-07-14
US09/473,137 US6926493B1 (en) 1997-06-27 1999-12-28 Turbo-molecular pump
JP2000040325A JP4197819B2 (ja) 1999-02-19 2000-02-17 ターボ分子ポンプ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008035618A Division JP2008157257A (ja) 1999-02-19 2008-02-18 ターボ分子ポンプ

Publications (3)

Publication Number Publication Date
JP2001082379A JP2001082379A (ja) 2001-03-27
JP2001082379A5 JP2001082379A5 (enExample) 2005-01-06
JP4197819B2 true JP4197819B2 (ja) 2008-12-17

Family

ID=27522132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000040325A Expired - Fee Related JP4197819B2 (ja) 1999-02-19 2000-02-17 ターボ分子ポンプ

Country Status (1)

Country Link
JP (1) JP4197819B2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015040898A1 (ja) 2013-09-17 2015-03-26 エドワーズ株式会社 真空ポンプの固定部品
US20220228594A1 (en) * 2019-05-31 2022-07-21 Edwards Japan Limited Vacuum pump and linked-type thread groove spacer
US20220235776A1 (en) * 2019-05-15 2022-07-28 Edwards Japan Limited Vacuum pump and stator component of thread groove pump portion of the vacuum pump

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4660967B2 (ja) * 2001-05-22 2011-03-30 株式会社島津製作所 ターボ分子ポンプ
JP2003065282A (ja) * 2001-08-22 2003-03-05 Shimadzu Corp ターボ分子ポンプ
JP4703279B2 (ja) * 2004-06-25 2011-06-15 株式会社大阪真空機器製作所 複合分子ポンプの断熱構造
JP2007278164A (ja) * 2006-04-06 2007-10-25 Shimadzu Corp 締結構造および回転式真空ポンプ
DE102007051988A1 (de) * 2007-10-31 2009-05-07 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
US8591204B2 (en) 2008-03-31 2013-11-26 Shimadzu Corporation Turbo-molecular pump
US8690525B2 (en) * 2008-07-14 2014-04-08 Edwards Japan Limited Vacuum pump
WO2010016141A1 (ja) * 2008-08-08 2010-02-11 株式会社島津製作所 回転真空ポンプ
DE102008058151A1 (de) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
JP5434684B2 (ja) * 2010-03-04 2014-03-05 株式会社島津製作所 ターボ分子ポンプ
JP6957320B2 (ja) * 2017-11-17 2021-11-02 エドワーズ株式会社 真空ポンプ、および真空ポンプに備わる高温ステータ、ガス排気口
JP7680226B2 (ja) * 2021-03-04 2025-05-20 エドワーズ株式会社 真空ポンプ

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015040898A1 (ja) 2013-09-17 2015-03-26 エドワーズ株式会社 真空ポンプの固定部品
KR20160055119A (ko) 2013-09-17 2016-05-17 에드워즈 가부시키가이샤 진공 펌프의 고정 부품
US20220235776A1 (en) * 2019-05-15 2022-07-28 Edwards Japan Limited Vacuum pump and stator component of thread groove pump portion of the vacuum pump
US12158152B2 (en) * 2019-05-15 2024-12-03 Edwards Japan Limited Vacuum pump and stator component of thread groove pump portion of the vacuum pump
US20220228594A1 (en) * 2019-05-31 2022-07-21 Edwards Japan Limited Vacuum pump and linked-type thread groove spacer
US11898565B2 (en) * 2019-05-31 2024-02-13 Edwards Japan Limited Vacuum pump and linked-type thread groove spacer

Also Published As

Publication number Publication date
JP2001082379A (ja) 2001-03-27

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