JP4187584B2 - Plasma display panel manufacturing method and sandblasting apparatus - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for manufacturing a plasma display panel (hereinafter referred to as PDP) and a sandblasting apparatus.
[0002]
[Prior art]
In general, a PDP has a structure in which a pair of electrodes regularly arranged on two opposing glass substrates are provided, and a gas mainly composed of Ne, Xe, or the like is enclosed therebetween. Then, a voltage is applied between these electrodes, and discharge is generated in minute cells around the electrodes, thereby causing each cell to emit light for display. In order to display information, cells arranged regularly are selectively discharged. There are two types of PDPs: a DC type (DC type) with electrodes exposed in the discharge space and an AC type (AC type) covered with an insulating layer, both of which vary depending on the display function and driving method. Further, it is classified into a refresh driving method and a memory driving method.
[0003]
One substrate of the PDP has a partition wall and constitutes a back plate. As a method for forming a partition wall in such a back plate, it is common to perform baking after overprinting and patterning a glass paste by screen printing. However, since this method cannot provide good line width accuracy for the complicated process, recently, a glass paste is applied on a glass substrate in a predetermined thickness and dried, and then the sandblasting resistance is further improved. After forming a mask having a pattern into a pattern, sandblasting is performed through the mask to grind the glass paste (partition forming material layer) to pattern a partition having a desired shape, followed by baking. It has been. In the sand blasting process, inorganic particles such as glass beads having a particle size of about ₂ to 50 μm, SiC, SiO ₂ , Al ₂ O ₃ , ZrO ₂ are used as the abrasive.
[0004]
In order to protect both side edges of the glass substrate so as not to affect the glass substrate, dielectric layer and electrode below the partition wall forming material layer, it is also proposed to provide a shielding plate on the glass substrate in the sandblasting process. (See Patent Document 1).
[0005]
[Patent Document 1]
Japanese Patent Laid-Open No. 2001-222946
[Problems to be solved by the invention]
However, since the shielding plate as described above is disposed only on both side edges of the glass substrate, it cannot properly protect the partition wall of the desired portion inside the glass substrate, and damage caused by the abrasive that runs parallel to the glass substrate. The resist is peeled off, the partition wall is chipped, and the grinding height of the partition wall is reduced.
[0007]
The present invention has been made in consideration of the above points, and an object thereof is to provide a method for manufacturing a plasma display panel and a sandblasting apparatus capable of reliably protecting a desired portion of a substrate in a sandblasting process. .
[0008]
[Means for Solving the Problems]
The present invention includes a step of providing a partition-forming material layer on a substrate, a step of providing a sandblast-resistant mask on the partition-forming material layer, and moving the sandblast nozzle in a direction crossing the substrate transport direction while transporting the substrate. And a step of performing a sandblasting treatment on the sandblasting-resistant mask, and when performing the sandblasting treatment, between the substrate and the nozzle (distance 0.1 to the substrate is 0.1 mm) near a desired portion of the substrate (1 mm to several tens of mm). A protective member extending in the substrate transport direction is provided at a distance of several millimeters), and a desired portion of the substrate is protected from an abrasive that runs parallel to the glass substrate.
[0009]
The present invention is the method of manufacturing a plasma display panel, wherein the protective member has a circular, oval or elliptical cross-sectional shape.
[0010]
The present invention relates to a sandblasting apparatus for performing a sandblasting process on a base material in which a partition wall forming material and a sandblasting mask are sequentially arranged, a transporting apparatus for transporting a substrate in the transporting direction, and a transporting direction of the substrate with respect to the substrate And a sandblast nozzle that performs a sandblasting process on the substrate and a distance between the substrate and the nozzle above or near (1 mm to several mm) a desired portion of the substrate that is transported by the transport device 0.1 to several mm), and a protection member extending in the substrate transport direction.
[0011]
The present invention is the sandblasting apparatus characterized in that the cross-sectional shape of the protective member is round, oval or elliptical.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings. 1 to 7 show an embodiment of the present invention.
[0013]
First, an AC type PDP (plasma display panel) will be described with reference to FIG. In FIG. 7, two glass substrates 1 and 2 constituting the PDP are arranged in parallel and facing each other, and both are formed by partition walls 3 provided in parallel to each other on the glass substrate 2 serving as a back plate. It is held at regular intervals. On the back side of the glass substrate 1 serving as the front plate, a composite electrode composed of the sustain electrode 4 that is a transparent electrode and the bus electrode 5 that is a metal electrode is formed in parallel with each other, and a dielectric layer 6 is formed covering the composite electrode. Is formed. A protective layer 7 (MgO layer) is formed on the dielectric layer 6. Further, address electrodes 8 positioned between the partition walls 3 are formed in parallel to each other on the front side of the glass substrate 2 serving as a back plate so as to be orthogonal to the composite electrode. A dielectric layer 9 is formed so as to cover the address electrodes 8, and a phosphor 10 is provided so as to cover the wall surface of the partition wall 3 and the cell bottom surface. The AC type PDP is a surface discharge type, and has a structure in which an AC voltage is applied between the composite electrodes on the front plate to discharge. And the fluorescent substance 10 is light-emitted by the ultraviolet-ray which arises by this discharge, and an observer visually recognizes the light which permeate | transmits a front plate.
[0014]
Next, a method for manufacturing a plasma display panel and a sandblasting apparatus will be described with reference to FIGS.
[0015]
As a manufacturing method of the plasma display panel, a normal method of patterning the PDP partition walls by sandblasting is employed.
[0016]
First, as shown in FIG. 6, a partition wall forming material layer 11 is formed by applying and drying a partition wall forming paste on a glass substrate 2 on which an electrode 8 and a dielectric layer 9 are formed. Next, after a photosensitive resin composition layer having sandblast resistance is provided on the partition wall forming material layer 11, actinic rays are selectively irradiated through a photomask, and subsequently developed to develop a sandblast mask 12. Form. Thereafter, a sandblasting process is performed on the substrate 2 provided with the partition wall forming material layer 11 and the sandblasting mask 12. In the sand blasting treatment, inorganic particles such as glass beads having a particle size of about ₂ to 50 μm, SiC, SiO ₂ , Al ₂ O ₃ , ZrO ₂ are used as an abrasive.
[0017]
In this way, a back plate is produced from the glass substrate 2, and a PDP is manufactured by combining the back plate and the front plate comprising the glass substrate 1.
[0018]
Next, the sandblasting apparatus will be described with reference to FIGS. In FIG. 1, a substrate 2 as a workpiece is conveyed at a predetermined speed in a direction orthogonal to the paper surface of FIG.
[0019]
A sand blast nozzle (jet nozzle) 23 is provided on the substrate 2, and the sand blast nozzle 23 moves in a direction intersecting with the transport direction L ₁ of the substrate 2, for example, an orthogonal L ₂ direction. Yes.
[0020]
Further, above the substrate 2, the protection member 13 is disposed extending in the conveying direction L ₁ direction of the substrate 2. The protective member 13 is fixed to the frame F without moving like the substrate 2.
[0021]
The protective member 13 protects the abrasive material ejected from the sandblast nozzle 23 from running against the desired portion of the substrate 2 by running parallel to the substrate, and a desired position above the substrate 2, for example, both side edges of the substrate 2. It is provided in the vicinity. It is desirable that the protective member 13 does not allow the abrasive to pass between the substrate 2 and the protective member 13, and it is desirable that the protective member 13 is in close contact with the protective member 13, but if actually in contact, the substrate 2 is damaged. . For this reason, the protection member 13 can maintain an interval that does not come into contact with the substrate 2 in consideration of the rotation center of the transport roller 22 and the warpage of the substrate 2.
[0022]
Examples of the cross-sectional shape of the protective member 13 include a square, a rectangle, a V shape, a circle, an ellipse, and an ellipse. However, the protective member 13 preferably has no adverse effect due to the reflection of the abrasive that hits the protective member 13. A circle or an ellipse is particularly good (FIGS. 3A, 3B and 3C). By defining the cross-sectional shape of the protection member 13 in this way, the grinding material that advances straight from the sandblast nozzle 23 to the substrate and the grinding material that runs parallel to the substrate from the substrate 2 directly below the protection member 13 and from the protection member to the pattern portion side. Can be reliably protected.
[0023]
In addition, the arrangement position of the protection member 13 is not limited to the vicinity of both side edges of the substrate 2 in the case of multi-face mounting, and may be provided at a desired position inside the substrate 2, and the number thereof is not limited (FIG. 4A). -(D)). Further, a flat plate-shaped protective member 13a may be placed on a pair of protective members 13 having a circular cross section (FIG. 4C). When the protective member 13 is installed on both side edges of the substrate 2, if the protective member 13 has an excessively small cross-sectional area, it is impossible to prevent damage caused by the abrasive material sprayed from the sandblast nozzle 23 running in parallel with the substrate 2. Requires 0.01 square cm or more. In addition, if the cross-sectional area of the protective member 13 is too large, an appropriate amount of abrasive does not reach the pattern portion and is difficult to be ground. Therefore, the cross-sectional area is preferably 4 cm 2 or less.
[0024]
The protective member 13 is preferably separated from the pattern part by 0.1 mm or more. When the protective member 13 is closer to the pattern portion, a portion that cannot be ground is generated in the pattern portion. Further, if the protective member 13 is separated from the pattern part by 200 mm or more, damage caused by the abrasive material sprayed from the sandblast nozzle 23 running in parallel with the substrate 2 cannot be prevented. In the case of multiple imposition, it is necessary to put the protective member 13 between impositions of adjacent pattern portions.
[0025]
1 through 4, the substrate 2 and the pre-partition wall forming material layer 11 and the sandblast mask 12 is formed is conveyed in the arrow L ₁ direction by the transport rollers 22 (FIG. 2). During this period, sandblasting nozzle 23 is moved in the arrow L ₂ direction, the grinding material is ejected to the substrate 2 from the sandblasting nozzle 23.
[0026]
In this case, the partition wall forming material layer 11 that is not covered by the mask 12 is ground by the abrasive material ejected from the sandblast nozzle 23, and the partition wall forming material layer 11 covered by the mask 12 remains in this way. 3 is formed. At the same time, a protective partition 3 a that protects the partition 3 is formed on the periphery of the partition 3 by the partition forming material layer 11.
[0027]
The partition wall 3 and the protective partition wall 3a are portions formed by being protected from the abrasive by the mask 12. Furthermore, the desired portion of the base material 2 covered with the protective member 13 can also be protected by the protective member 13, and the electrode terminal portion and the glass surface can be reliably protected from the abrasive in this desired portion.
[0028]
Here, the operation of the present invention will be described with reference to FIGS. As shown in FIG. 5A, when the protection member 13 is provided, a desired portion on the substrate 2 can be reliably protected, and the partition 3 and the protection partition 3a are maintained in a desired shape.
[0029]
On the other hand, as shown in FIG.5 (b), when not providing the protection member 13, the protection partition 3a and a part of partition 3 are ground.
[0030]
【The invention's effect】
As described above, according to the present invention, the desired portion of the substrate can be reliably protected by the protective member in the sandblasting process. For this reason, an electrode terminal part and a glass surface can be reliably protected from an abrasive material in the desired part of a board | substrate.
[Brief description of the drawings]
FIG. 1 is a side view showing a sandblasting apparatus according to the present invention.
FIG. 2 is a plan view showing a sandblasting apparatus according to the present invention.
FIG. 3 is a diagram showing a cross-sectional shape of a protection member.
FIG. 4 is a view showing an example of arrangement of protective members.
FIG. 5 is a diagram showing an operation when a protection member is provided.
FIG. 6 is a diagram schematically showing a method for manufacturing a plasma display panel.
FIG. 7 is a diagram schematically showing a plasma display panel.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1, 2 Glass substrate 3 Partition 3a Protective partition 4 Sustain electrode 5 Bus electrode 6 Dielectric layer 7 Protective layer 8 Address electrode 9 Dielectric layer 10 Phosphor 11 Partition material forming layer 12 Masks 13 and 13a Protection member 22 Conveying roller 23 Injecting nozzle

Claims (2)

Providing a partition wall forming material layer on the substrate;
Providing a sandblasting-resistant mask on the partition wall forming material layer;
A step of moving the sandblast nozzle in a direction crossing the substrate transport direction while transporting the substrate, and performing a sandblast treatment on the sandblast-resistant mask,
When performing the sandblasting process, a protective member extending in the substrate transport direction is provided above the desired part of the substrate to protect the desired part of the substrate from the sandblasting process ,
A method for manufacturing a plasma display panel, wherein the cross-sectional shape of the protective member is circular, oval or elliptical . In a sandblasting apparatus for performing a sandblasting process on a substrate on which a rib forming material and a sandblasting resistant mask are sequentially arranged,
A transport device for transporting the substrate in the transport direction;
A sandblast nozzle that moves in a direction intersecting the substrate transport direction with respect to the substrate and performs a sandblasting process on the substrate;
A protective member provided in the vicinity of a desired portion of the substrate conveyed by the conveying device and between the sandblast nozzle and the substrate, and extending in the substrate conveying direction ;
A sandblasting apparatus characterized in that the cross-sectional shape of the protective member is round, oval or elliptical .

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