JP4181168B2 - 有機電界発光素子及びその製造方法 - Google Patents
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- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/131—Interconnections, e.g. wiring lines or terminals
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/26—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/82—Cathodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8051—Anodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8052—Cathodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/123—Connection of the pixel electrodes to the thin film transistors [TFT]
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8051—Anodes
- H10K59/80516—Anodes combined with auxiliary electrodes, e.g. ITO layer combined with metal lines
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
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- H10K59/805—Electrodes
- H10K59/8052—Cathodes
- H10K59/80522—Cathodes combined with auxiliary electrodes
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Description
305 バッファ層
310 半導体層
310a ソース/ドレイン領域
310b チャネル領域
320 ゲート絶縁膜
330 ゲート電極
340 層間絶縁膜
341 コンタクトホール
345 ソース電極/ドレイン電極
345 ソース/ドレイン電極
347 第1導電性パターン
350 平坦化膜
350 積層後絶縁膜
355 ビアホール
370 第1電極
371 第1導電性パターン
371 第2導電性パターン
373 補助電極ライン
375 画素定義膜
380 有機膜層
390 第2電極
Claims (20)
- 基板と、
前記基板の画素領域上に形成されている、半導体層、ゲート電極及びソース/ドレイン電極を含む薄膜トランジスタと、
前記基板の配線領域上に前記ゲート電極と同一層に形成されている第1導電性パターンと、
前記第1導電性パターンの一部を露出させるように形成されている層間絶縁膜と、
前記基板の配線領域を除外した前記薄膜トランジスタの上に形成されているパッシベーション膜及び平坦化膜と、
前記パッシベーション膜及び平坦化膜内のビアホールを介して形成されている第1電極及び前記第1導電性パターンと接続されて形成されている第2導電性パターンと、
前記基板の配線領域を除外した画素領域上に形成されていて前記第1電極を露出させる開口部を有する画素定義膜と、
露出した前記第1電極の上に形成されていて少なくとも有機発光層を含む有機膜層と、
前記有機膜層の上に形成されている第2電極と、
を含むことを特徴とする有機電界発光素子。 - 前記第1導電性パターンは、モリブデン(Mo)、タングステン(W)、タングステンモリブデン(MoW)、タングステンシリサイド(WSi2)、モリブデンシリサイド(MoSi2) 、アルミニウム(Al)で構成された群から選択される1種で形成されることを特徴とする請求項1に記載の有機電界発光素子。
- 前記第1導電性パターンはスパッタリング法または真空蒸着法で形成されることを特徴とする請求項2に記載の有機電界発光素子。
- 前記第2導電性パターンは、前記第1電極の構成物質と同じ物質であることを特徴とする請求項1に記載の有機電界発光素子。
- 前記第1電極の構成物質は、ITOまたはIZOで構成された透明電極材料であることを特徴とする請求項4に記載の有機電界発光素子。
- 前記第1導電性パターン及び第2導電性パターンは、第2電極補助電極ラインを形成することを特徴とする請求項1に記載の有機電界発光素子。
- 前記第1電極は、アノード電極またはカソード電極であることを特徴とする請求項1に記載の有機電界発光素子。
- 前記第1導電性パターンは、共通電源供給ライン(Vdd)またはデータライン(Vdata)電極物質と同じ物質であることを特徴とする請求項1に記載の有機電界発光素子。
- 基板を用意し、
前記基板の画素領域上に半導体層、ゲート電極及びソース/ドレイン電極を含む薄膜トランジスタを形成し、
前記ゲート電極形成時に前記基板の配線領域の同一層に第1導電性パターンを形成し、
前記第1導電性パターンの一部を露出させる層間絶縁膜を形成し、
前記基板の配線領域を除外した前記薄膜トランジスタの上にパッシベーション膜及び平坦化膜をエッチングして形成し、
前記パッシベーション膜及び平坦化膜内のビアホールを介して第1電極を形成し、
前記第1電極形成時に前記第1導電性パターンと接続される第2導電性パターンを形成し、
前記基板の配線領域を除外した画素領域上に前記第1電極を露出させる開口部を有する画素定義膜を形成し、
露出した前記第1電極上部に少なくとも有機発光層を含む有機膜層を形成し、
前記有機膜層の上に第2電極を形成することを含むことを特徴とする有機電界発光素子の製造方法。 - 前記第1導電性パターンは、ゲート電極物質と同じ物質で形成することを特徴とする請求項9に記載の有機電界発光素子の製造方法。
- 前記ゲート電極は、モリブデン(Mo)、タングステン(W)、タングステンモリブデン(MoW)、タングステンシリサイド(WSi2)、モリブデンシリサイド(MoSi2) 、アルミニウム(Al)で構成された群から選択される1種で形成することを特徴とする請求項10に記載の有機電界発光素子の製造方法。
- 前記ゲート電極は、スパッタリング法、イオンプレーティングまたは真空蒸着法で形成することを特徴とする請求項11に記載の有機電界発光素子の製造方法。
- 前記平坦化膜は、有機系で形成することを特徴とする請求項9に記載の有機電界発光素子の製造方法。
- 前記平坦化膜は、アクリル樹脂、ベンゾシクロブテン、ポリイミド、ポリアミド及びフェノール樹脂で構成された群から選択される1種で形成することを特徴とする請求項13に記載の有機電界発光素子の製造方法。
- 前記平坦化膜は、フォトリソグラフィー技術およびエッチング技術を用いて形成することを特徴とする請求項14に記載の有機電界発光素子の製造方法。
- 前記第2導電性パターンは、第1電極物質と同じ物質であることを特徴とする請求項9に記載の有機電界発光素子の製造方法。
- 前記第1電極物質は、ITOまたはIZOで構成された透明電極材料であることを特徴とする請求項16に記載の有機電界発光素子の製造方法。
- 前記第1導電性パターン及び第2導電性パターンは、第2電極補助電極ラインを形成することを特徴とする請求項9に記載の有機電界発光素子の製造方法。
- 前記第1電極は、アノード電極またはカソード電極であることを特徴とする請求項9に記載の有機電界発光素子の製造方法。
- 前記第1導電性パターン形成時に共通電源供給ライン(Vdd)及びデータライン(Vdata)を形成することを特徴とする請求項9に記載の有機電界発光素子の製造方法。
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KR100544436B1 (ko) * | 2002-11-26 | 2006-01-23 | 엘지.필립스 엘시디 주식회사 | 유기전계 발광소자와 그 제조방법 |
JP4711595B2 (ja) * | 2002-12-10 | 2011-06-29 | 株式会社半導体エネルギー研究所 | Elディスプレイ及び電子機器 |
JP2004207084A (ja) * | 2002-12-25 | 2004-07-22 | Semiconductor Energy Lab Co Ltd | 発光装置およびその作製方法 |
JP4373086B2 (ja) * | 2002-12-27 | 2009-11-25 | 株式会社半導体エネルギー研究所 | 発光装置 |
JP4526776B2 (ja) * | 2003-04-02 | 2010-08-18 | 株式会社半導体エネルギー研究所 | 発光装置及び電子機器 |
EP1486551B1 (en) * | 2003-06-13 | 2016-03-16 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting element and light emitting device |
US7221095B2 (en) * | 2003-06-16 | 2007-05-22 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and method for fabricating light emitting device |
US8350466B2 (en) * | 2004-09-17 | 2013-01-08 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
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KR20060067049A (ko) | 2006-06-19 |
CN1812119A (zh) | 2006-08-02 |
KR100712111B1 (ko) | 2007-04-27 |
US7728510B2 (en) | 2010-06-01 |
CN100433359C (zh) | 2008-11-12 |
JP2006171745A (ja) | 2006-06-29 |
US20060125390A1 (en) | 2006-06-15 |
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