JP4171148B2 - プローブ装置 - Google Patents

プローブ装置 Download PDF

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Publication number
JP4171148B2
JP4171148B2 JP32277799A JP32277799A JP4171148B2 JP 4171148 B2 JP4171148 B2 JP 4171148B2 JP 32277799 A JP32277799 A JP 32277799A JP 32277799 A JP32277799 A JP 32277799A JP 4171148 B2 JP4171148 B2 JP 4171148B2
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JP
Japan
Prior art keywords
probe
base
sheet
arm
screw member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP32277799A
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English (en)
Japanese (ja)
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JP2001141747A (ja
JP2001141747A5 (https=
Inventor
智昭 久我
裕樹 斉藤
秋憲 岩渕
俊雄 福士
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
Original Assignee
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP32277799A priority Critical patent/JP4171148B2/ja
Priority to TW089103647A priority patent/TW533309B/zh
Priority to KR1020000011010A priority patent/KR100340466B1/ko
Publication of JP2001141747A publication Critical patent/JP2001141747A/ja
Publication of JP2001141747A5 publication Critical patent/JP2001141747A5/ja
Application granted granted Critical
Publication of JP4171148B2 publication Critical patent/JP4171148B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP32277799A 1999-06-22 1999-11-12 プローブ装置 Expired - Lifetime JP4171148B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP32277799A JP4171148B2 (ja) 1999-11-12 1999-11-12 プローブ装置
TW089103647A TW533309B (en) 1999-06-22 2000-03-02 Probe device
KR1020000011010A KR100340466B1 (ko) 1999-06-22 2000-03-06 프로브 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32277799A JP4171148B2 (ja) 1999-11-12 1999-11-12 プローブ装置

Publications (3)

Publication Number Publication Date
JP2001141747A JP2001141747A (ja) 2001-05-25
JP2001141747A5 JP2001141747A5 (https=) 2005-08-11
JP4171148B2 true JP4171148B2 (ja) 2008-10-22

Family

ID=18147537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32277799A Expired - Lifetime JP4171148B2 (ja) 1999-06-22 1999-11-12 プローブ装置

Country Status (1)

Country Link
JP (1) JP4171148B2 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003098189A (ja) * 2001-09-26 2003-04-03 Micronics Japan Co Ltd プローブシート及びプローブ装置
JP4443916B2 (ja) * 2003-12-25 2010-03-31 株式会社日本マイクロニクス プローブ装置
JP2005300409A (ja) * 2004-04-14 2005-10-27 Nhk Spring Co Ltd 検査ユニット
KR100638106B1 (ko) 2005-06-21 2006-10-24 주식회사 코디에스 평판형 디스플레이장치 검사용 프로브장치
KR100833813B1 (ko) 2007-04-13 2008-05-30 나노세미텍(주) 이방성 실리콘커넥터와 탈부착식 조인트플레이트를 갖는일체형 프로브블록
JP2010127706A (ja) * 2008-11-26 2010-06-10 Micronics Japan Co Ltd プローブユニット及び検査装置
JP2012078222A (ja) 2010-10-01 2012-04-19 Fujifilm Corp 回路基板接続構造体および回路基板の接続方法
KR101420076B1 (ko) 2014-06-03 2014-08-14 김재길 Pcb 직결식 프로브 카드
JP6390354B2 (ja) * 2014-11-06 2018-09-19 オムロン株式会社 端子固定装置および端子固定方法
CN109870658B (zh) * 2019-02-14 2024-05-24 株洲福德轨道交通研究院有限公司 针床机构
CN119804995B (zh) * 2025-03-12 2025-06-17 浙江丽水中欣晶圆半导体科技有限公司 晶圆的电阻率检测装置及方法

Also Published As

Publication number Publication date
JP2001141747A (ja) 2001-05-25

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