JP4140737B2 - 広帯域分光回転補償器楕円偏光計 - Google Patents

広帯域分光回転補償器楕円偏光計 Download PDF

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Publication number
JP4140737B2
JP4140737B2 JP50724798A JP50724798A JP4140737B2 JP 4140737 B2 JP4140737 B2 JP 4140737B2 JP 50724798 A JP50724798 A JP 50724798A JP 50724798 A JP50724798 A JP 50724798A JP 4140737 B2 JP4140737 B2 JP 4140737B2
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light beam
sample
compensator
ellipsometer
wavelength
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JP2000515247A (ja
JP2000515247A5 (enExample
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アスピンズ、デビッド・イー
オプサル、ジョン
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サーマ―ウェイブ・インク
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0232—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using shutters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/213—Spectrometric ellipsometry

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
JP50724798A 1996-07-24 1997-07-22 広帯域分光回転補償器楕円偏光計 Expired - Lifetime JP4140737B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/685,606 1996-07-24
US08/685,606 US5877859A (en) 1996-07-24 1996-07-24 Broadband spectroscopic rotating compensator ellipsometer
PCT/US1997/013313 WO1998003853A1 (en) 1996-07-24 1997-07-22 Broadband spectroscopic rotating compensator ellipsometer

Publications (3)

Publication Number Publication Date
JP2000515247A JP2000515247A (ja) 2000-11-14
JP2000515247A5 JP2000515247A5 (enExample) 2005-03-10
JP4140737B2 true JP4140737B2 (ja) 2008-08-27

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Application Number Title Priority Date Filing Date
JP50724798A Expired - Lifetime JP4140737B2 (ja) 1996-07-24 1997-07-22 広帯域分光回転補償器楕円偏光計

Country Status (6)

Country Link
US (7) US5877859A (enExample)
EP (2) EP0914600B1 (enExample)
JP (1) JP4140737B2 (enExample)
DE (1) DE69716272T2 (enExample)
ES (1) ES2185038T3 (enExample)
WO (1) WO1998003853A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140045388A (ko) * 2011-05-13 2014-04-16 케이엘에이-텐코 코포레이션 재구성가능한 분광 타원계
JP2021529328A (ja) * 2018-07-12 2021-10-28 コリア リサーチ インスティトゥート オブ スタンダーズ アンド サイエンス 垂直入射エリプソメータおよびこれを用いた試験片の光物性の測定方法

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