JP4140593B2 - メタライズ基板 - Google Patents
メタライズ基板 Download PDFInfo
- Publication number
- JP4140593B2 JP4140593B2 JP2004272709A JP2004272709A JP4140593B2 JP 4140593 B2 JP4140593 B2 JP 4140593B2 JP 2004272709 A JP2004272709 A JP 2004272709A JP 2004272709 A JP2004272709 A JP 2004272709A JP 4140593 B2 JP4140593 B2 JP 4140593B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film
- aluminum
- metallized
- wafer prober
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
- C03C17/09—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/06—Metallic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/14—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using spraying techniques to apply the conductive material, e.g. vapour evaporation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/77—Coatings having a rough surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/13—Moulding and encapsulation; Deposition techniques; Protective layers
- H05K2203/1333—Deposition techniques, e.g. coating
- H05K2203/1344—Spraying small metal particles or droplets of molten metal
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12361—All metal or with adjacent metals having aperture or cut
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12576—Boride, carbide or nitride component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12611—Oxide-containing component
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Coating By Spraying Or Casting (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
2 導体膜
3 溝
4 貫通孔
5 導体層
6 絶縁体
7 回路パターン
Claims (13)
- セラミックスと金属の複合体基板の表面に、溶射により導体膜が形成されており、該導体膜の表面粗さが、Ra≦1.0μmであることを特徴とするウェハプローバに用いられるメタライズ基板。
- 前記溶射が、アーク溶射、プラズマ溶射、フレーム溶射のいずれかであることを特徴とする請求項1に記載のウェハプローバに用いられるメタライズ基板。
- 前記導体膜の主成分が、ニッケル、アルミニウム、銅、チタン、ステンレス、金、白金、銀のいずれか1種以上であることを特徴とする請求項1または2に記載のウェハプローバに用いられるメタライズ基板。
- 前記導体膜が、2種類以上の溶射膜を積層してなることを特徴とする請求項1乃至3のいずれかに記載のウェハプローバに用いられるメタライズ基板。
- 前記導体膜を形成後、熱処理を施すことを特徴とする請求項1乃至4のいずれかに記載のウェハプローバに用いられるメタライズ基板。
- 前記熱処理の雰囲気が、非酸化性雰囲気であることを特徴とする請求項5に記載のウェハプローバに用いられるメタライズ基板。
- 前記セラミックスと金属の複合体が、炭化ケイ素とアルミニウムの複合体、あるいはケイ素と炭化ケイ素の複合体であることを特徴とする請求項1に記載のウェハプローバに用いられるメタライズ基板。
- 前記導体膜の上に、メッキ膜を形成していることを特徴とする請求項1乃至3のいずれかに記載のウェハプローバに用いられるメタライズ基板。
- 前記メッキ膜の表面粗さが、Ra≦1.0μmであることを特徴とする請求項8に記載のウェハプローバに用いられるメタライズ基板。
- 前記基板に貫通孔が形成されていることを特徴とする請求項1乃至9のいずれかに記載のウェハプローバに用いられるメタライズ基板。
- 前記基板に溝が形成されていることを特徴とする請求項1乃至10のいずれかに記載のウェハプローバに用いられるメタライズ基板。
- 前記基板の導体膜が形成されている面の反対側の面、あるいは基板内部に、導体層が形成されていることを特徴とする請求項1乃至11のいずれかに記載のウェハプローバに用いられるメタライズ基板。
- 前記導体層が、発熱体であることを特徴とする請求項12に記載のウェハプローバに用いられるメタライズ基板。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004272709A JP4140593B2 (ja) | 2004-09-21 | 2004-09-21 | メタライズ基板 |
US11/222,037 US20060063024A1 (en) | 2004-09-21 | 2005-09-09 | Metallized substrate |
TW094131567A TW200625989A (en) | 2004-09-21 | 2005-09-14 | Metallized substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004272709A JP4140593B2 (ja) | 2004-09-21 | 2004-09-21 | メタライズ基板 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006089290A JP2006089290A (ja) | 2006-04-06 |
JP4140593B2 true JP4140593B2 (ja) | 2008-08-27 |
Family
ID=36074411
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004272709A Expired - Fee Related JP4140593B2 (ja) | 2004-09-21 | 2004-09-21 | メタライズ基板 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20060063024A1 (ja) |
JP (1) | JP4140593B2 (ja) |
TW (1) | TW200625989A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101827541B1 (ko) * | 2015-12-17 | 2018-02-08 | 주식회사 오킨스전자 | 표면 처리되고, 크라운 형태의 접속 패드를 가지는 테스트 소켓 및 그 제조 방법 |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007266289A (ja) * | 2006-03-28 | 2007-10-11 | Tdk Corp | 積層型セラミック電子部品およびその製造方法 |
FR2918981B1 (fr) * | 2007-07-20 | 2009-09-04 | Saint Gobain | Procede de texturation de surface d'un substrat a fonction verriere, produit verrier a surface texturee. |
EP2416356A1 (en) | 2009-03-30 | 2012-02-08 | Tokuyama Corporation | Process for producing metallized substrate and metallized substrate |
CN101764121B (zh) * | 2010-01-08 | 2012-12-05 | 湖南大学 | 层间绝缘叠层复合材料及其制备方法 |
US9374893B2 (en) | 2010-03-02 | 2016-06-21 | Tokuyama Corporation | Production method of metallized substrate |
JP2012042444A (ja) * | 2010-08-13 | 2012-03-01 | Samsung Electro-Mechanics Co Ltd | プローブ基板及びその製造方法 |
TWI502709B (zh) * | 2011-08-26 | 2015-10-01 | Viking Tech Corp | Metallographic Ceramic Plate Method |
US20130139866A1 (en) * | 2011-12-01 | 2013-06-06 | Marlow Industries, Inc. | Ceramic Plate |
JP5848169B2 (ja) * | 2012-03-14 | 2016-01-27 | Dowaメタルテック株式会社 | 銀めっき材 |
CN102673053B (zh) * | 2012-06-05 | 2016-05-11 | 深圳市五株科技股份有限公司 | 覆铜板、印刷电路板及其制造方法 |
FR2992313B1 (fr) * | 2012-06-21 | 2014-11-07 | Eurokera | Article vitroceramique et procede de fabrication |
CN103854972B (zh) * | 2012-12-06 | 2016-11-02 | 上海华虹宏力半导体制造有限公司 | 改善晶圆表面翘曲的方法 |
US10872701B2 (en) * | 2016-06-10 | 2020-12-22 | Westinghouse Electric Company Llc | Zirconium-coated silicon carbide fuel cladding for accident tolerant fuel application |
EP3572555B1 (en) * | 2017-01-17 | 2021-03-03 | Shinshu University | Method for manufacturing ceramic circuit board |
JP6999117B2 (ja) * | 2017-02-24 | 2022-01-18 | 国立研究開発法人物質・材料研究機構 | アルミニウム回路基板の製造方法 |
CN106946583B (zh) * | 2017-04-07 | 2023-03-21 | 西安明科微电子材料有限公司 | 一种铝碳化硅一体式基板的制备方法 |
CN106910696B (zh) * | 2017-04-07 | 2019-09-17 | 上海华力微电子有限公司 | 图形光罩连接孔缺陷检查测试结构及方法 |
JP2020114788A (ja) * | 2019-01-17 | 2020-07-30 | 日立金属株式会社 | メタライズド窒化ケイ素基板およびメタライズド窒化ケイ素基板の製造方法 |
CN111454080B (zh) * | 2020-05-12 | 2021-10-26 | 清华大学 | 一种敷铜或敷铜合金氧化铝陶瓷基板及其制备方法 |
CN113149715A (zh) * | 2021-04-19 | 2021-07-23 | 清华大学 | 一种多层金属覆膜高导热氮化铝陶瓷基板及制备方法 |
CN112979351A (zh) * | 2021-04-19 | 2021-06-18 | 清华大学 | 一种多层金属覆膜氮化硅陶瓷基板及制备方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4698485A (en) * | 1985-08-06 | 1987-10-06 | Pace Incorporated | Heater device |
JP4272786B2 (ja) * | 2000-01-21 | 2009-06-03 | トーカロ株式会社 | 静電チャック部材およびその製造方法 |
US6700099B2 (en) * | 2000-07-10 | 2004-03-02 | Temptronic Corporation | Wafer chuck having thermal plate with interleaved heating and cooling elements, interchangeable top surface assemblies and hard coated layer surfaces |
JP3818102B2 (ja) * | 2001-08-31 | 2006-09-06 | 住友電気工業株式会社 | 放熱基板とその製造方法及び半導体装置 |
JP2003224180A (ja) * | 2002-01-28 | 2003-08-08 | Kyocera Corp | ウエハ支持部材 |
-
2004
- 2004-09-21 JP JP2004272709A patent/JP4140593B2/ja not_active Expired - Fee Related
-
2005
- 2005-09-09 US US11/222,037 patent/US20060063024A1/en not_active Abandoned
- 2005-09-14 TW TW094131567A patent/TW200625989A/zh unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101827541B1 (ko) * | 2015-12-17 | 2018-02-08 | 주식회사 오킨스전자 | 표면 처리되고, 크라운 형태의 접속 패드를 가지는 테스트 소켓 및 그 제조 방법 |
Also Published As
Publication number | Publication date |
---|---|
JP2006089290A (ja) | 2006-04-06 |
US20060063024A1 (en) | 2006-03-23 |
TW200625989A (en) | 2006-07-16 |
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