JP4138959B2 - シリコン単結晶引き上げ用大口径石英ガラスるつぼ及びその製造方法 - Google Patents

シリコン単結晶引き上げ用大口径石英ガラスるつぼ及びその製造方法 Download PDF

Info

Publication number
JP4138959B2
JP4138959B2 JP24302198A JP24302198A JP4138959B2 JP 4138959 B2 JP4138959 B2 JP 4138959B2 JP 24302198 A JP24302198 A JP 24302198A JP 24302198 A JP24302198 A JP 24302198A JP 4138959 B2 JP4138959 B2 JP 4138959B2
Authority
JP
Japan
Prior art keywords
quartz glass
glass crucible
crucible
single crystal
silicon single
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP24302198A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000072594A (ja
JP2000072594A5 (enExample
Inventor
龍弘 佐藤
博行 渡辺
富士雄 岩谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Quartz Products Co Ltd
Original Assignee
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Quartz Products Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Priority to JP24302198A priority Critical patent/JP4138959B2/ja
Publication of JP2000072594A publication Critical patent/JP2000072594A/ja
Publication of JP2000072594A5 publication Critical patent/JP2000072594A5/ja
Application granted granted Critical
Publication of JP4138959B2 publication Critical patent/JP4138959B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP24302198A 1998-08-28 1998-08-28 シリコン単結晶引き上げ用大口径石英ガラスるつぼ及びその製造方法 Expired - Lifetime JP4138959B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24302198A JP4138959B2 (ja) 1998-08-28 1998-08-28 シリコン単結晶引き上げ用大口径石英ガラスるつぼ及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24302198A JP4138959B2 (ja) 1998-08-28 1998-08-28 シリコン単結晶引き上げ用大口径石英ガラスるつぼ及びその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007041697A Division JP4651119B2 (ja) 2007-02-22 2007-02-22 シリコン単結晶引き上げ用大口径石英ガラスるつぼ

Publications (3)

Publication Number Publication Date
JP2000072594A JP2000072594A (ja) 2000-03-07
JP2000072594A5 JP2000072594A5 (enExample) 2007-04-12
JP4138959B2 true JP4138959B2 (ja) 2008-08-27

Family

ID=17097701

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24302198A Expired - Lifetime JP4138959B2 (ja) 1998-08-28 1998-08-28 シリコン単結晶引き上げ用大口径石英ガラスるつぼ及びその製造方法

Country Status (1)

Country Link
JP (1) JP4138959B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4592037B2 (ja) * 2000-05-31 2010-12-01 信越石英株式会社 石英ガラスルツボの製造方法
JP4288652B2 (ja) * 2002-10-22 2009-07-01 ジャパンスーパークォーツ株式会社 溶融シリコンの湯面振動の判定方法
JP5245129B2 (ja) * 2007-07-27 2013-07-24 株式会社Ｓｕｍｃｏ 石英ガラスルツボの製造方法
JP4995068B2 (ja) * 2007-12-28 2012-08-08 ジャパンスーパークォーツ株式会社 シリコン単結晶引上げ用石英ガラスルツボ
JP5043048B2 (ja) * 2009-01-21 2012-10-10 株式会社Ｓｕｍｃｏ シリコン単結晶引き上げ用石英ガラスルツボ及びその製造方法
JP4951040B2 (ja) 2009-08-05 2012-06-13 信越石英株式会社 シリカ容器及びその製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6144793A (ja) * 1984-08-09 1986-03-04 Toshiba Ceramics Co Ltd シリコン単結晶引上げ用石英ガラスルツボ
JPH0653634B2 (ja) * 1989-01-13 1994-07-20 三菱マテリアル株式会社 シリコン単結晶引上げ用石英ルツボの再生方法
JP2933404B2 (ja) * 1990-06-25 1999-08-16 信越石英 株式会社 シリコン単結晶引き上げ用石英ガラスルツボとその製造方法
JP3433976B2 (ja) * 1993-06-25 2003-08-04 オリンパス光学工業株式会社 ガラス溶融ルツボ
JP3124674B2 (ja) * 1993-12-28 2001-01-15 東芝セラミックス株式会社 シリコン単結晶引上げ用石英ガラス製ルツボの製造方法
JPH0920586A (ja) * 1995-06-30 1997-01-21 Toshiba Ceramics Co Ltd シリコン単結晶引上げ用石英ガラスルツボの製造方法

Also Published As

Publication number Publication date
JP2000072594A (ja) 2000-03-07

Similar Documents

Publication Publication Date Title
US6136092A (en) Quart crucible with large diameter for pulling single crystal and method of producing the same
US6886364B2 (en) Method for producing quartz glass crucible
JP3764776B2 (ja) 単結晶引き上げ用石英ガラスるつぼ及びその製造方法
JP5069663B2 (ja) 多層構造を有する石英ガラスルツボ
JP2004059410A (ja) シリコン単結晶引上げ用石英ガラスルツボおよびその製造方法
JPH05105577A (ja) シリコン単結晶引き上げ用石英ガラスルツボとその製造方法
JPH0422861B2 (enExample)
JP4651119B2 (ja) シリコン単結晶引き上げ用大口径石英ガラスるつぼ
KR20100088719A (ko) 석영 유리 도가니와 그 제조 방법 및 그 용도
CN101724888B (zh) 硅单晶提拉用石英玻璃坩埚的制造方法
JPWO2000006811A1 (ja) シリコン単結晶引上げ用石英ガラスるつぼおよびその製造方法
JP4454059B2 (ja) シリコン単結晶引き上げ用大口径石英ガラスるつぼ
JP4841764B2 (ja) シリコン単結晶引上げ用石英ガラスるつぼの製造方法及び装置
JP4138959B2 (ja) シリコン単結晶引き上げ用大口径石英ガラスるつぼ及びその製造方法
JP2840195B2 (ja) 単結晶引上用石英ガラスルツボの製造方法
JP2000072594A5 (enExample)
JP2012017240A (ja) シリコン単結晶引上げ用シリカガラスルツボの製造方法
JP5226754B2 (ja) シリコン単結晶引き上げ用大口径石英ガラスるつぼの製造方法
JP3983054B2 (ja) シリコン単結晶引上げ用石英ガラスるつぼ及びその製造方法
JP4140868B2 (ja) シリコン単結晶引き上げ用石英ガラスるつぼ及び その製造方法
JP2005060152A (ja) 石英ルツボの製造方法及び石英ルツボ並びにこれを用いたシリコン単結晶の製造方法
JP7694149B2 (ja) 石英ガラスルツボ及びその製造方法並びにシリコン単結晶の製造方法
TWI900878B (zh) 矽單結晶上拉用石英玻璃坩堝及使用矽單結晶上拉用石英玻璃坩堝的矽單結晶製造方法
JP7768072B2 (ja) シリコン単結晶引き上げ用石英ガラスルツボ及びこれを用いたシリコン単結晶の製造方法
CN117295852A (zh) 石英玻璃坩埚及其制造方法、以及单晶硅的制造方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20040420

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070222

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20070323

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070418

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070615

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070723

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070911

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20080602

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20080606

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110613

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110613

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120613

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120613

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130613

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term