JP4138110B2 - Ｓｆ６分解ガスを含むｓｆ６ガスの精製処理方法 - Google Patents

Ｓｆ６分解ガスを含むｓｆ６ガスの精製処理方法 Download PDF

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Publication number
JP4138110B2
JP4138110B2 JP32947398A JP32947398A JP4138110B2 JP 4138110 B2 JP4138110 B2 JP 4138110B2 JP 32947398 A JP32947398 A JP 32947398A JP 32947398 A JP32947398 A JP 32947398A JP 4138110 B2 JP4138110 B2 JP 4138110B2
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gas
processing agent
solid processing
agent layer
pressure
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Japanese (ja)
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JP2000159511A5 (enExample
JP2000159511A (ja
Inventor
純一 寺門
伸次 渡辺
浩三 大矢
栄作 茂木
守之 福島
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Kanto Denka Kogyo Co Ltd
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Kanto Denka Kogyo Co Ltd
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  • Separation Of Gases By Adsorption (AREA)
JP32947398A 1998-11-19 1998-11-19 Ｓｆ６分解ガスを含むｓｆ６ガスの精製処理方法 Expired - Lifetime JP4138110B2 (ja)

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JP32947398A JP4138110B2 (ja) 1998-11-19 1998-11-19 Ｓｆ６分解ガスを含むｓｆ６ガスの精製処理方法

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JP32947398A JP4138110B2 (ja) 1998-11-19 1998-11-19 Ｓｆ６分解ガスを含むｓｆ６ガスの精製処理方法

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JP2000159511A JP2000159511A (ja) 2000-06-13
JP2000159511A5 JP2000159511A5 (enExample) 2005-10-27
JP4138110B2 true JP4138110B2 (ja) 2008-08-20

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4769333B1 (ja) * 2010-11-02 2011-09-07 大陽日酸東関東株式会社 回収された液化ｓｆ６ガスの純度推算装置及びその純度推算方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003103134A (ja) * 2001-09-28 2003-04-08 Toshiba Corp Ｓｆ６ガス捕集装置およびその方法
CN109704291A (zh) * 2019-03-01 2019-05-03 绵阳华鑫瑞建筑劳务有限公司 一种四氟化硫的提纯精馏工艺

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4769333B1 (ja) * 2010-11-02 2011-09-07 大陽日酸東関東株式会社 回収された液化ｓｆ６ガスの純度推算装置及びその純度推算方法

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