JP4136059B2 - 変位情報検出装置 - Google Patents

変位情報検出装置 Download PDF

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Publication number
JP4136059B2
JP4136059B2 JP08281198A JP8281198A JP4136059B2 JP 4136059 B2 JP4136059 B2 JP 4136059B2 JP 08281198 A JP08281198 A JP 08281198A JP 8281198 A JP8281198 A JP 8281198A JP 4136059 B2 JP4136059 B2 JP 4136059B2
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JP
Japan
Prior art keywords
region
light
light beam
optical scale
incident
Prior art date
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Expired - Fee Related
Application number
JP08281198A
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English (en)
Japanese (ja)
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JPH1172355A5 (https=
JPH1172355A (ja
Inventor
学 高山
正彦 井垣
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP08281198A priority Critical patent/JP4136059B2/ja
Publication of JPH1172355A publication Critical patent/JPH1172355A/ja
Publication of JPH1172355A5 publication Critical patent/JPH1172355A5/ja
Application granted granted Critical
Publication of JP4136059B2 publication Critical patent/JP4136059B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP08281198A 1997-06-30 1998-03-13 変位情報検出装置 Expired - Fee Related JP4136059B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP08281198A JP4136059B2 (ja) 1997-06-30 1998-03-13 変位情報検出装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP19052097 1997-06-30
JP9-190520 1997-06-30
JP08281198A JP4136059B2 (ja) 1997-06-30 1998-03-13 変位情報検出装置

Publications (3)

Publication Number Publication Date
JPH1172355A JPH1172355A (ja) 1999-03-16
JPH1172355A5 JPH1172355A5 (https=) 2007-06-07
JP4136059B2 true JP4136059B2 (ja) 2008-08-20

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ID=26423826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP08281198A Expired - Fee Related JP4136059B2 (ja) 1997-06-30 1998-03-13 変位情報検出装置

Country Status (1)

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JP (1) JP4136059B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7474186B2 (ja) * 2020-11-30 2024-04-24 株式会社ミツトヨ 光電式ロータリエンコーダ

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Publication number Publication date
JPH1172355A (ja) 1999-03-16

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