JPH1172355A5 - - Google Patents

Info

Publication number
JPH1172355A5
JPH1172355A5 JP1998082811A JP8281198A JPH1172355A5 JP H1172355 A5 JPH1172355 A5 JP H1172355A5 JP 1998082811 A JP1998082811 A JP 1998082811A JP 8281198 A JP8281198 A JP 8281198A JP H1172355 A5 JPH1172355 A5 JP H1172355A5
Authority
JP
Japan
Prior art keywords
region
displacement information
grating
light beam
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998082811A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1172355A (ja
JP4136059B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP08281198A priority Critical patent/JP4136059B2/ja
Priority claimed from JP08281198A external-priority patent/JP4136059B2/ja
Publication of JPH1172355A publication Critical patent/JPH1172355A/ja
Publication of JPH1172355A5 publication Critical patent/JPH1172355A5/ja
Application granted granted Critical
Publication of JP4136059B2 publication Critical patent/JP4136059B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP08281198A 1997-06-30 1998-03-13 変位情報検出装置 Expired - Fee Related JP4136059B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP08281198A JP4136059B2 (ja) 1997-06-30 1998-03-13 変位情報検出装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP19052097 1997-06-30
JP9-190520 1997-06-30
JP08281198A JP4136059B2 (ja) 1997-06-30 1998-03-13 変位情報検出装置

Publications (3)

Publication Number Publication Date
JPH1172355A JPH1172355A (ja) 1999-03-16
JPH1172355A5 true JPH1172355A5 (https=) 2007-06-07
JP4136059B2 JP4136059B2 (ja) 2008-08-20

Family

ID=26423826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP08281198A Expired - Fee Related JP4136059B2 (ja) 1997-06-30 1998-03-13 変位情報検出装置

Country Status (1)

Country Link
JP (1) JP4136059B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7474186B2 (ja) * 2020-11-30 2024-04-24 株式会社ミツトヨ 光電式ロータリエンコーダ

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