JP4128958B2 - 二酸化炭素中の不純物を分析する方法 - Google Patents
二酸化炭素中の不純物を分析する方法 Download PDFInfo
- Publication number
- JP4128958B2 JP4128958B2 JP2003562629A JP2003562629A JP4128958B2 JP 4128958 B2 JP4128958 B2 JP 4128958B2 JP 2003562629 A JP2003562629 A JP 2003562629A JP 2003562629 A JP2003562629 A JP 2003562629A JP 4128958 B2 JP4128958 B2 JP 4128958B2
- Authority
- JP
- Japan
- Prior art keywords
- carbon dioxide
- contaminants
- contaminant
- sample
- particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 title claims description 548
- 229910002092 carbon dioxide Inorganic materials 0.000 title claims description 266
- 239000001569 carbon dioxide Substances 0.000 title claims description 266
- 238000000034 method Methods 0.000 title claims description 102
- 239000012535 impurity Substances 0.000 title description 14
- 239000002245 particle Substances 0.000 claims description 171
- 239000000356 contaminant Substances 0.000 claims description 167
- 239000000443 aerosol Substances 0.000 claims description 76
- 238000001514 detection method Methods 0.000 claims description 31
- 238000005070 sampling Methods 0.000 claims description 20
- 238000005259 measurement Methods 0.000 claims description 19
- 239000007787 solid Substances 0.000 claims description 17
- 238000004879 turbidimetry Methods 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 9
- 238000000859 sublimation Methods 0.000 claims description 7
- 230000008022 sublimation Effects 0.000 claims description 7
- 238000009833 condensation Methods 0.000 claims description 6
- 230000005494 condensation Effects 0.000 claims description 6
- 239000012530 fluid Substances 0.000 claims description 6
- 239000002904 solvent Substances 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 5
- 238000009835 boiling Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 description 25
- 238000004140 cleaning Methods 0.000 description 17
- 230000007423 decrease Effects 0.000 description 17
- 239000007789 gas Substances 0.000 description 17
- 235000011089 carbon dioxide Nutrition 0.000 description 16
- 239000002244 precipitate Substances 0.000 description 13
- 239000003344 environmental pollutant Substances 0.000 description 11
- 231100000719 pollutant Toxicity 0.000 description 11
- 238000012545 processing Methods 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 10
- 238000001556 precipitation Methods 0.000 description 8
- 239000000047 product Substances 0.000 description 8
- 238000010897 surface acoustic wave method Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000013459 approach Methods 0.000 description 6
- 230000001419 dependent effect Effects 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 238000012544 monitoring process Methods 0.000 description 6
- 239000012071 phase Substances 0.000 description 6
- 230000006837 decompression Effects 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000000194 supercritical-fluid extraction Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 238000000149 argon plasma sintering Methods 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 238000004128 high performance liquid chromatography Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000037361 pathway Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000004808 supercritical fluid chromatography Methods 0.000 description 3
- 235000013361 beverage Nutrition 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000010924 continuous production Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000013618 particulate matter Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 229910021386 carbon form Inorganic materials 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000005345 coagulation Methods 0.000 description 1
- 230000015271 coagulation Effects 0.000 description 1
- 239000010725 compressor oil Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000000295 fuel oil Substances 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000007620 mathematical function Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000011860 particles by size Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000246 remedial effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000007614 solvation Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000005514 two-phase flow Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/50—Carbon dioxide
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/40—Concentrating samples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/04—Investigating sedimentation of particle suspensions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
- B01D15/08—Selective adsorption, e.g. chromatography
- B01D15/26—Selective adsorption, e.g. chromatography characterised by the separation mechanism
- B01D15/40—Selective adsorption, e.g. chromatography characterised by the separation mechanism using supercritical fluid as mobile phase or eluent
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2290/00—Other details not covered by groups F25J2200/00 - F25J2280/00
- F25J2290/50—Arrangement of multiple equipments fulfilling the same process step in parallel
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/42—Low-temperature sample treatment, e.g. cryofixation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/075—Investigating concentration of particle suspensions by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2226—Sampling from a closed space, e.g. food package, head space
- G01N2001/2238—Sampling from a closed space, e.g. food package, head space the gas being compressed or pressurized
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N2001/2282—Devices for withdrawing samples in the gaseous state with cooling means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0011—Sample conditioning
- G01N33/0016—Sample conditioning by regulating a physical variable, e.g. pressure or temperature
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pathology (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Organic Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Molecular Biology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
図4は、エーロゾル生成の圧力依存性を示す。使用した試料採取システムは、CGS−100粒子計数器を粒子分析器30として使用する図1に示されたものである。任意使用のヒーター20は採用しなかった。
4本を一緒に巻きつけた二酸化炭素ボンベから、液体試料を取り出した。ボンベ中の二酸化炭素の圧力は、室温でほぼ800psigであった。試料採取の方式は、図1に示したものを使用した。任意使用のヒーター20を使用して二酸化炭素試料18の温度を変え、減圧装置22により、得られたエーロゾル24をほぼ大気圧まで下げた。粒子分析器30は、Lasair101であった。
以上本発明をその好ましい実施形態に関して示し且つ述べたが、添付の特許請求の範囲によって包含される本発明の範囲から逸脱することなく本発明に様々な形態及び細部の変更を加えることができることを当業者なら理解するであろう。
Claims (16)
- 二酸化炭素流中に溶解している汚染物質を検出する方法であって、
a)液体又は超臨界相中の二酸化炭素流の少なくとも一部を試料採取して二酸化炭素の試料を形成するステップと、
b)前記二酸化炭素試料の少なくとも1つの物理的状態を変えて、ガス状二酸化炭素及び少なくとも1つの浮遊汚染物質を含むエーロゾルを形成するステップと、
c)前記二酸化炭素試料の少なくとも1つの物理的状態を変えて、ガス状二酸化炭素及び少なくとも1つの浮遊汚染物質を含むエーロゾルを形成した後に、フィルタを通して前記二酸化炭素試料を導くステップと、
d)少なくとも一部の前記二酸化炭素試料中の、エーロゾルの小滴の状態にある前記浮遊汚染物質の粒子の数を、少なくとも1つの粒子計数器により検出するステップを含む方法。 - 少なくとも1つの物理的状態を変える前記ステップが、前記二酸化炭素試料の温度を、前記浮遊汚染物質を検出する圧力における二酸化炭素の昇華点より高くすることを含む請求項1に記載の前記方法。
- 少なくとも1つの物理的状態を変える前記ステップが、前記二酸化炭素試料の温度を、前記浮遊汚染物質を検出する圧力における二酸化炭素の沸点より高くすることを含む請求項2に記載の前記方法。
- 前記粒子計数器が、白色光粒子計数器、レーザー粒子計数器、ガス出力レーザー粒子計数器、及び凝結核計数器からなる群から選択される少なくとも1つの装置である請求項1に記載の前記方法。
- 前記浮遊汚染物質を、白色光粒子計数器、レーザー粒子計数器、ガス出力レーザー粒子計数器、及び凝結核計数器からなる群から選択される少なくとも2つの装置により検出する請求項4に記載の前記方法。
- 前記浮遊汚染物質の少なくとも一部を、圧電装置により検出する請求項4に記載の前記方法。
- 前記圧電装置が、表面波共振器及びマイクロカンチレバーからなる群から選択される少なくとも1つの装置である請求項6に記載の前記方法。
- 前記二酸化炭素試料の少なくとも1つの物理的状態を変えて、ガス状二酸化炭素及び少なくとも1つの浮遊汚染物質を含むエーロゾルを形成する前に、フィルタを通して前記二酸化炭素試料を導くステップをさらに含む請求項1に記載の前記方法。
- 前記浮遊汚染物質の粒子の数を、約3,000psia未満の圧力で検出する請求項1に記載の前記方法。
- 前記浮遊汚染物質の粒子の数を、約1,065psia未満の圧力で検出する請求項9に記載の前記方法。
- 前記浮遊汚染物質の粒子の数を、約14.7psiaの圧力で検出する請求項10に記載の前記方法。
- 前記二酸化炭素流が、1×10 −6 重量%未満の溶解した汚染物質を含有している請求項1に記載の前記方法。
- 前記二酸化炭素流が、1×10 −7 重量%未満の溶解した汚染物質を含有している請求項12に記載の前記方法。
- 溶媒供給ライン中を流れる二酸化炭素流に溶解した汚染物質を連続的に検出するためのシステムであって、
a)試料流を移動させる試料採取手段であって、前記試料流は、前記溶媒供給ライン中を流れる二酸化炭素流の少なくとも一部であるものと、
b)前記試料流の状態を変えてガス状二酸化炭素と浮遊汚染物質のエーロゾルを形成する手段であって、前記試料採取手段と流体で連絡するものと、
c)前記b)の手段と流体で連絡する固体除去手段であって、前記固体除去手段は、前記試料流が少なくとも1つの汚染物質測定領域に到達する前に、前記試料流から固体粒子を濾別するものと、
d)前記c)の手段と流体で連絡する少なくとも1つの汚染物質測定領域と、
e)少なくとも1つの粒子計数手段であって、前記粒子計数手段は、前記汚染物質測定領域内の前記浮遊汚染物質の少なくとも一部を少なくとも1つの粒子計数器により検出することができるものを備えたシステム。 - 少なくとも1つの透過光比濁法に基づく粒子検出器により、少なくとも1つの汚染物質測定領域中の浮遊汚染物質の少なくとも一部を検出することができる粒子検出手段をさらに含む請求項14に記載の前記システム。
- 少なくとも1つの散乱光比濁法に基づく粒子検出器により、少なくとも1つの汚染物質測定領域中の浮遊汚染物質の少なくとも一部を検出することができる粒子検出手段をさらに含む請求項14に記載の前記システム。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US35068802P | 2002-01-22 | 2002-01-22 | |
PCT/US2003/001964 WO2003062816A1 (en) | 2002-01-22 | 2003-01-22 | Method for analyzing impurities in carbon dioxide |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007241713A Division JP4221441B2 (ja) | 2002-01-22 | 2007-09-19 | 二酸化炭素中の不純物を分析する方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005516189A JP2005516189A (ja) | 2005-06-02 |
JP4128958B2 true JP4128958B2 (ja) | 2008-07-30 |
Family
ID=27613418
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003562629A Expired - Fee Related JP4128958B2 (ja) | 2002-01-22 | 2003-01-22 | 二酸化炭素中の不純物を分析する方法 |
JP2007241713A Expired - Fee Related JP4221441B2 (ja) | 2002-01-22 | 2007-09-19 | 二酸化炭素中の不純物を分析する方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007241713A Expired - Fee Related JP4221441B2 (ja) | 2002-01-22 | 2007-09-19 | 二酸化炭素中の不純物を分析する方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7064834B2 (ja) |
EP (1) | EP1485708A4 (ja) |
JP (2) | JP4128958B2 (ja) |
KR (1) | KR101110391B1 (ja) |
CN (1) | CN1643376A (ja) |
TW (1) | TWI312067B (ja) |
WO (1) | WO2003062816A1 (ja) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10143075C2 (de) * | 2001-09-03 | 2003-07-24 | Infineon Technologies Ag | Partikelmeßgerätanordnung sowie Gerät zur Prozessierung von Halbleiterscheiben mit einer solchen Anordnung |
KR100868624B1 (ko) * | 2004-12-23 | 2008-11-13 | 동부일렉트로닉스 주식회사 | 파티클 검출 장치 |
EP1688731A1 (en) * | 2005-02-03 | 2006-08-09 | Air Products and Chemicals, Inc. | System and method for measurement and/or analysis of particles in gas stream |
US7867779B2 (en) * | 2005-02-03 | 2011-01-11 | Air Products And Chemicals, Inc. | System and method comprising same for measurement and/or analysis of particles in gas stream |
EP1830173A1 (en) * | 2005-02-03 | 2007-09-05 | Air Products and Chemicals, Inc. | System and method for measurement and/or analysis of particles in gas stream |
US8017405B2 (en) * | 2005-08-08 | 2011-09-13 | The Boc Group, Inc. | Gas analysis method |
US8168120B1 (en) | 2007-03-06 | 2012-05-01 | The Research Foundation Of State University Of New York | Reliable switch that is triggered by the detection of a specific gas or substance |
JP4973937B2 (ja) * | 2007-08-24 | 2012-07-11 | オルガノ株式会社 | 高圧流体中の微粒子測定システムおよび微粒子測定方法 |
JP4997568B2 (ja) * | 2007-08-24 | 2012-08-08 | オルガノ株式会社 | 高圧二酸化炭素の微粒子測定システムおよび微粒子測定方法 |
FIU20100093U0 (fi) * | 2010-02-25 | 2010-02-25 | Pegasor Oy | Hiukkasten mittauslaite |
JP5599249B2 (ja) * | 2010-07-21 | 2014-10-01 | オルガノ株式会社 | 流体中の微粒子検出装置及び検出方法 |
EP3667705A1 (en) | 2012-04-17 | 2020-06-17 | Praxair Technology, Inc. | Method and system for delivery of purified multiple phases of carbon dioxide to a process chamber |
KR101372907B1 (ko) | 2012-10-11 | 2014-03-10 | 주식회사 포스코 | 두께 측정장치 |
EP3105566B1 (en) * | 2014-02-14 | 2019-11-13 | The Coca-Cola Company | System and method for continuous, real-time monitoring of chemical contaminants in carbon dioxide |
JP6918806B2 (ja) * | 2016-01-08 | 2021-08-11 | ティーエスアイ インコーポレイテッド | ウェアラブル・マスク・フィット・モニタ |
KR102489730B1 (ko) | 2016-07-29 | 2023-01-18 | 삼성전자주식회사 | 초임계 유체 소스 공급 장치 및 이를 구비하는 초임계 기판 처리장치 및 방법 |
CN107796775A (zh) * | 2016-09-07 | 2018-03-13 | 科思创聚合物(中国)有限公司 | 一种废水中有机物浓度的检测方法 |
US10510564B2 (en) * | 2018-01-10 | 2019-12-17 | Lam Research Corporation | Dynamic coolant mixing manifold |
CN108387409A (zh) * | 2018-03-27 | 2018-08-10 | 昆山金宏二氧化碳有限公司 | 一种二氧化碳在线取样分析装置 |
US10955318B2 (en) * | 2019-04-23 | 2021-03-23 | Pall Corporation | Aircraft air contaminant analyzer and method of use |
DE102020109296A1 (de) * | 2020-04-02 | 2021-10-07 | Palas Gmbh Partikel- Und Lasermesstechnik | Verfahren und Aerosol-Messgerät zum Bestimmen einer quellenabhängigen Partikelgrößenverteilung eines Aerosols |
WO2021219816A1 (en) * | 2020-04-29 | 2021-11-04 | Folium Biosciences Europe B.V. | Measurement device for moisture content in supercritical environments |
CN112304825A (zh) * | 2020-11-27 | 2021-02-02 | 中国石油大学(北京) | 一种测量超临界二氧化碳中颗粒沉降速度的装置和方法 |
KR102623388B1 (ko) * | 2021-08-20 | 2024-01-11 | 주식회사 디엔제이테크 | 액체 입자 계수기 및 이를 구비한 액체 입자 모니터링 시스템 |
KR20230038866A (ko) * | 2021-09-13 | 2023-03-21 | 세메스 주식회사 | 기판 처리 방법 및 기판 처리 장치 |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3787122A (en) * | 1973-01-05 | 1974-01-22 | Wehr Corp | Light scattering particle analyzer |
US3854321A (en) * | 1973-04-27 | 1974-12-17 | B Dahneke | Aerosol beam device and method |
FR2611905B1 (fr) * | 1987-03-04 | 1989-05-12 | Commissariat Energie Atomique | Dispositif de mesure, en temps reel, de la teneur d'un gaz en un aerosol |
US4806171A (en) * | 1987-04-22 | 1989-02-21 | The Boc Group, Inc. | Apparatus and method for removing minute particles from a substrate |
US5027642A (en) * | 1987-10-13 | 1991-07-02 | American Air Liquide | Method of detecting and or removing trace amounts of condensible vapors from compressed gas |
US4894529A (en) * | 1988-11-03 | 1990-01-16 | High Yield Technology, Inc. | Real-time particle counter for liquids with nebulizer and dryer |
US5265031A (en) * | 1990-11-26 | 1993-11-23 | Praxair Technology, Inc. | Diagnostic gas monitoring process utilizing an expert system |
US5065794A (en) * | 1990-11-26 | 1991-11-19 | Union Carbide Industrial Gases Technology Corporation | Gas flow distribution system |
US5254719A (en) * | 1991-05-31 | 1993-10-19 | Amoco Corporation | Process for preparing purified dimethyl naphthalenedicarboxylate |
US5278626A (en) * | 1991-09-05 | 1994-01-11 | Amherst Process Instruments, Inc. | Non-volatile residue system for monitoring impurities in a liquid |
US5369033A (en) | 1992-01-24 | 1994-11-29 | Hughes Aircraft Company | Supercritical fluid contamination monitor |
US5777726A (en) | 1992-05-12 | 1998-07-07 | Raytheon Company | Spectrophotometric supercritical fluid contamination monitor |
US5298967A (en) * | 1992-06-02 | 1994-03-29 | Pacific Scientific Company | Measurement of concentrations of dissolved solvent |
US5665902A (en) * | 1994-05-10 | 1997-09-09 | American Air Liquide, Inc. | Method to analyze particle contaminants in compressed gases |
US5918258A (en) | 1996-07-11 | 1999-06-29 | Bowers; William D. | High-sensitivity instrument to measure NVR in fluids |
KR100251645B1 (ko) * | 1997-03-21 | 2000-04-15 | 윤종용 | 반도체 공정용 가스 평가장치에 결합되는 샘플가스 분배 장치 및 구동방법 |
US5865901A (en) * | 1997-12-29 | 1999-02-02 | Siemens Aktiengesellschaft | Wafer surface cleaning apparatus and method |
US5968371A (en) * | 1998-01-26 | 1999-10-19 | Nelson Industries, Inc. | Lubricant circulation diagnostic and modeling system |
US6016686A (en) * | 1998-03-16 | 2000-01-25 | Lockheed Martin Energy Research Corporation | Micromechanical potentiometric sensors |
DE19817468A1 (de) | 1998-04-20 | 1999-10-21 | Basf Ag | Verfahren zur Entfernung von Verunreinigungen aus einem Gasstrom |
JP3933312B2 (ja) | 1998-08-06 | 2007-06-20 | 株式会社前田シェルサービス | 圧縮空気中の微粒子計数装置並びに圧縮空気中の微粒子計数方法 |
FR2795510B1 (fr) * | 1999-06-24 | 2001-08-03 | Air Liquide | Installation d'analyse de l'atmosphere d'une enceinte de brasage ou etamage a l'aide d'un alliage metallique |
US6276169B1 (en) | 1999-10-04 | 2001-08-21 | Eco-Snow Systems, Inc. | Apparatus and method for analysis of impurities in liquid carbon dioxide |
JP2001165848A (ja) * | 1999-11-18 | 2001-06-22 | L'air Liquide | サンプルガス中の含有粒子のカウント方法 |
GB2358791A (en) * | 2000-02-04 | 2001-08-08 | Versar Inc | Method composition and apparatus for cleaning internal surfaces of oxygen converters and cylinders |
AT409799B (de) * | 2001-04-18 | 2002-11-25 | Avl List Gmbh | Verfahren zur messung von aerosolteilchen in gasförmigen proben |
US6639671B1 (en) * | 2002-03-01 | 2003-10-28 | Msp Corporation | Wide-range particle counter |
US7367530B2 (en) * | 2005-06-21 | 2008-05-06 | The Boeing Company | Aerospace vehicle yaw generating systems and associated methods |
-
2003
- 2003-01-22 JP JP2003562629A patent/JP4128958B2/ja not_active Expired - Fee Related
- 2003-01-22 TW TW092101376A patent/TWI312067B/zh not_active IP Right Cessation
- 2003-01-22 US US10/350,307 patent/US7064834B2/en not_active Expired - Lifetime
- 2003-01-22 KR KR1020047011305A patent/KR101110391B1/ko active IP Right Grant
- 2003-01-22 WO PCT/US2003/001964 patent/WO2003062816A1/en active Application Filing
- 2003-01-22 CN CNA038067552A patent/CN1643376A/zh active Pending
- 2003-01-22 EP EP03703970A patent/EP1485708A4/en not_active Withdrawn
-
2007
- 2007-09-19 JP JP2007241713A patent/JP4221441B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TWI312067B (en) | 2009-07-11 |
JP4221441B2 (ja) | 2009-02-12 |
JP2008046137A (ja) | 2008-02-28 |
TW200306412A (en) | 2003-11-16 |
US20030197852A1 (en) | 2003-10-23 |
CN1643376A (zh) | 2005-07-20 |
JP2005516189A (ja) | 2005-06-02 |
WO2003062816A1 (en) | 2003-07-31 |
EP1485708A4 (en) | 2006-05-03 |
KR101110391B1 (ko) | 2012-02-15 |
KR20040086283A (ko) | 2004-10-08 |
US7064834B2 (en) | 2006-06-20 |
EP1485708A1 (en) | 2004-12-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4221441B2 (ja) | 二酸化炭素中の不純物を分析する方法 | |
Koch et al. | Particle size distributions and compositions of aerosols produced by near-IR femto-and nanosecond laser ablation of brass | |
JP2680856B2 (ja) | 圧縮ガスから痕跡量の凝縮性ガスを検出する方法 | |
EP0242564A2 (en) | A method for measuring impurity concentrations in a liquid and an apparatus therefor | |
US20090183554A1 (en) | Particle concentration measurement technology | |
JPH0399248A (ja) | 凝縮核計数法を使用した粒子径測定法 | |
JP2863663B2 (ja) | 光学式露点計の反射鏡の洗浄方法及び洗浄装置付き光学式露点計 | |
US5369033A (en) | Supercritical fluid contamination monitor | |
JP3280464B2 (ja) | 被験液中の不揮発性残留物濃度監視装置及び同濃度測定方法 | |
Zenker et al. | Using depolarization to quantify ice nucleating particle concentrations: a new method | |
KR20240007211A (ko) | 에어로졸 기반 액체 입자 검출 측정 | |
JPH0235334A (ja) | 低圧力環境内の極めて小さな粒子を検知する方式 | |
Derrough et al. | Behaviour of nanoparticles during high temperature treatment (Incineration type) | |
Möhler et al. | The Karlsruhe aerosol chamber facility AIDA: technical description and first results of homogeneous and heterogeneous ice nucleation experiments | |
Matsunaga et al. | In situ optical monitoring of RDX nanoparticles formation during rapid expansion of supercritical CO 2 solutions | |
EP3526595B1 (en) | A piezoelectric crystal microbalance purity monitor | |
Bhushan et al. | Detection and sizing of particulate contamination in rigid disk drives: instruments and sampling techniques | |
JP3865941B2 (ja) | 気中不純物監視装置 | |
Büurkholz | The technology of droplet measurement with cascade impactors | |
WO2000014510A1 (en) | Particle shape | |
Vyakhirev et al. | Flow resistance of high-velocity multilayer cermet gas filters |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20051221 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070424 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20070724 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20070731 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20070824 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20070831 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070919 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20070919 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20071026 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20080124 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20080131 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20080222 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20080229 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20080325 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20080401 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080408 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20080507 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20080515 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110523 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4128958 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110523 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120523 Year of fee payment: 4 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130523 Year of fee payment: 5 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |