JP4079841B2 - Defect display device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a defect display device capable of setting and changing an optimum defect detection level for extracting a defect portion on an inspection object such as a semiconductor wafer or a glass substrate of a liquid crystal display.
[0002]
[Prior art]
In a manufacturing process of a liquid crystal display, a substrate inspection is performed on a glass substrate by a substrate inspection apparatus. In Patent Document 1, image data obtained by macroscopic imaging of a glass substrate is displayed on a display screen, and an operator extracts a part of an image area including a defective portion on this screen and saves it as defective image data. In addition, it is described that the defect image data is combined with the reference image data and displayed on the display screen.
[0003]
As a technique for storing and displaying a defect image, for example, there is Patent Document 2. In Patent Document 2, a reference image and an inspection target image are compared to cut out an area including a defective portion, the defect image data is stored, and the defect image data is pasted on the reference image data and reproduced. Is described.
[0004]
[Patent Document 1]
[Patent Document 1] Japanese Patent Application Laid-Open No. 2003-100827
[Patent Document 2]
JP-A-2002-192699 gazette
[Problems to be solved by the invention]
When inspecting a glass substrate, it is formed on the glass substrate according to the state of the glass substrate, for example, the number of layers formed on the glass substrate, or whether the resist is applied or not applied in each step of manufacturing the liquid crystal display The appearance of the formed pattern and defect changes. In such a case, it is necessary to change, for example, the defect detection level as an inspection condition (recipe) for the glass substrate.
[0007]
However, Patent Documents 1 and 2 only reproduce and display the stored defect image data, and do not change the defect detection level for detecting a defective portion in the inspection target image data.
[0008]
The current state of glass substrate inspection is to acquire each defect image data of the defective part on the glass substrate and display it on the display screen, check the state of the displayed glass substrate, and set the defect detection level on the spot. The setting has been changed.
[0009]
For this reason, if the optimum defect detection level is not set according to each process of liquid crystal display manufacturing or the lot of glass substrates, it is impossible to detect defective parts that affect liquid crystal display manufacturing, or defective parts Unnecessary parts that do not become false are erroneously detected as pseudo defects, and accurate substrate inspection cannot be performed.
[0010]
Also, it takes time to change the setting of the defect detection level, and the substrate inspection must be suspended until the setting change is repaired. In addition, after setting the defect detection level, it is necessary to acquire each defect image data of the defective part on the glass substrate to check whether the defect detection level has been properly changed. In such a case, it is necessary to acquire defect data again, and skill is required to set the defect detection level.
[0011]
Since the defect image data of Patent Document 2 described above is only displayed on the display screen, the result of setting and changing the defect detection level is not reflected in the displayed defect image data. For this reason, it is necessary to acquire and check the defect image data again at the defect detection level whose setting has been changed.
[0012]
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a defect display device that can easily and quickly change the setting of optimum inspection conditions according to the change in the state of the glass substrate even if the state of the glass substrate changes.
[0013]
[Means for Solving the Problems]
The present invention provides an image storage unit for storing original image data obtained by cutting out a peripheral original image including a defective portion on an inspection target substrate from the entire surface image data acquired by imaging the entire surface of the inspection target substrate by the substrate inspection apparatus ; Display a defect extraction unit that extracts defect image data of a defective part from original image data stored in an image storage unit based on a defect detection level for extracting the defect part, and a variable button that varies the defect detection level An inspection condition changing unit that changes the defect detection level for the original image data displayed on the screen and stored in the image storage unit by operating the variable button, and the original image data by the defect detection level changed by the inspection condition changing unit It is defective display defect image data re-extracted with defect extraction unit equipped with a display control unit for displaying on a display screen with respect to
[0014]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
[0015]
FIG. 1 is a configuration diagram of a defect display device. A main control unit 1 having a CPU is connected to a display 3 such as a liquid crystal or a CRT via an output unit 2. In addition, a manual input unit 5 such as a keyboard or a mouse is connected to the main control unit 1 via an input unit 4.
[0016]
The main control unit 1 stores and reads image data from and to the image storage unit 6 and writes and reads information on the defect unit to and from the defect information storage unit 7. The display control unit 8, the inspection condition change unit 9, and the defect An operation command is issued to the extraction unit 10 and the defect information display unit 11.
[0017]
The image storage unit 6 stores, for example, original image (defect image) data of a defective portion on an inspection object detected by inspecting an inspection object such as a semiconductor wafer or a glass substrate of a liquid crystal display by the substrate inspection device 12. . Hereinafter, an example in which a glass substrate of a flat panel display is used as an inspection target will be described. The original image data is obtained by cutting out peripheral image data Dm ₁ including a defective portion G from the entire surface image data D acquired by imaging the entire surface of the glass substrate in the substrate inspection apparatus as shown in FIG. is there. If a plurality of defective portions G, for example, six defective portions G _{1 to} G ₆ exist on the glass substrate, six original image data Dm _{1 to} Dm ₆ are stored in the image storage portion 6.
[0018]
In the defect information storage unit 7, information on each defect part G _{1 to} G ₆ on the glass substrate, for example, each coordinate of each of the _six defect parts G _{1 to} G ₆ , each brightness, each defect type, each size, etc. Is memorized.
[0019]
The display control unit 8, each original image data Dm ₁ Dm ₆ stored in the image storage unit 6 Screen List displayed on the display 3 (thumbnail display) to in response to the manual operation on the manual input unit 5. Further, the display control unit 8, the inspection condition changing unit extracting operation results by the respective defect G ₁ obtained in the defect extraction portion 10 when changing the test conditions for each defect G ₁ ~G ₆ on the glass substrate by 9 Each defect image data Dg _{1 to} Dg ₆ displaying only .about.G ₆ is displayed as a list on the screen of the display 3.
[0020]
On the screen of the display 3 shown in FIG. 1, for example, the defect image data Dg _{1 to} Dg ₆ are displayed in a list. These defect image data Dg _{1 to} Dg ₆ have defect portions G _{1 to} G ₆ , respectively.
[0021]
In addition, the display control unit 8 follows the manual operation on the manual input unit 5, and each defect image data Dg of each of the original image data Dm _{1 to} Dm ₆ and each of the defect portions G _{1 to} G ₆ extracted by the defect extraction unit 10. _{1 ~Dg 6,} or each original image data _Dm 1 Dm ₆ and any one of the overlay image data _Dr 1 _{~Dr 6} to suit each defect image data _Dg 1 _{~Dg 6} and respectively on the screen of the display 3 Select and display.
[0022]
For example, FIG. 3A shows an example of the original image data Dm ₁ . In the original image data Dm ₁ , a regular pattern (for example, a bus line) P formed on a glass substrate is imaged, and a defective portion G ₁ is also present. FIG. 5B shows an example of the defect image data Dg ₁ , and only the defect part G ₁ exists. FIG. 4C shows an example of overlay image data Dr ₁ , which is created by combining the original image data Dm ₁ and the defect image data Dg ₁ .
[0023]
The display control unit 8, when displaying each defect image on, for example, a screen data _Dg 1 _{~Dg 6} or each overlay image data _Dr 1 _{~Dr 6} of the display 3, the defect the display color of each defective portion _G 1 ~G ₆ Display output with different colors for each type.
[0024]
The display control unit 8 sorts the original image data Dm _{1 to} Dm ₆ , the defect image data Dg _{1 to} Dg ₆ , or the overlay image data Dr _{1 to} Dr ₆ and displays them on the screen of the display 3. . The items to be sorted are information on the defect portions G _{1 to} G ₆ on the glass substrate stored in the defect information storage unit 7. For example, the coordinate order, the luminance order, and the like of each defect portion G _{1 to} G _6. The order of defect types, the order of sizes, and the like.
[0025]
Further, the display control unit 8 in accordance with the manual selection instruction for manual input unit 5, the original image data _Dm 1 Dm _6, the defect image data _Dg 1 _{~Dg 6,} or of the overlay image data _Dr 1 _{~Dr 6} Arbitrary image data is selected from the inside and displayed on the screen of the display 3.
[0026]
Inspection condition changing unit 9 changes the setting of the inspection conditions from the original image data Dm ₁ Dm ₆ stored in the image storage unit 6 for extracting each defective portion G ₁ ~G _6. Test conditions, the original image data _Dm 1 Dm ₆ white and black levels each brightness (luminance) each defect detection level La for the, and configuration changes Lb, contrast for each original image data _Dm 1 Dm ₆ This is to change the setting of the emphasis level.
[0027]
The method of changing each defect detection level La, Lb is as follows.
[0028]
As shown in FIG. 1, the inspection condition changing unit 9 displays a defect detection level change block BL for changing the setting of the defect detection levels La and Lb on the screen of the display 3. In this defect detection level changing block BL, each variable button for changing the defect detection level La for the white level defect portion Gh such as disconnection in each of the original image data Dm _{1 to} Dm ₆ as shown in FIG. Bh ₁ , Bh _2, and variable buttons Bd ₁ , Bd ₂ for varying the defect detection level Lb for the black level defect part Gd due to, for example, dust as shown in FIG.
[0029]
The inspection condition changing unit 9 can collectively change the setting of the defect detection levels La and Lb for each of the original image data Dm _{1 to} Dm ₆ , and operates each mouse by operating the mouse or the like of the manual input unit 5. It is also possible to specify the image data Dm _{1 to} Dm ₆ with a pointer and individually change the setting of the defect detection levels La and Lb.
[0030]
The defect detection level change block BL displays the detection results of the defect portions G _{1 to} G ₆ on the screen of the display 3 when the defect detection levels La and Lb are arbitrarily changed by a manual operation on the manual input unit 5. An emulate button EB for displaying and confirming, and an automatic setting button AB for automatically setting the defect detection levels La and Lb.
[0031]
Each variable button Bh ₁ , Bh ₂ , Bd ₁ , Bd ₂ is set by manual operation on the manual input unit 5, and each variable button Bh ₁ , Bd ₁ sets each defect detection level La, Lb high. The variable buttons Bh ₂ and Bd ₂ set the defect detection levels La and Lb low.
[0032]
For example, as shown in FIG. 5A, when the brightness is set to the low level on the left side and set to the high level on the right side, for example, if the defect detection level La for the original image data Dm ₁ is set to the low level side, the defective part G ₁ detection accuracy for become stricter, if set to the high level side, loose detection accuracy for defective unit G _1.
[0033]
Therefore, if brightness is defective unit G ₁ to a higher level than the defect detection level La, the defective part wherein G ₁ is detectable In the detection level range, the defect detection as shown in FIG. 5 (b) if there is a defect portion G ₁ to the low level side than the level La, the defective unit G ₁ is undetectable in the undetectable range.
[0034]
As described above, when each of the variable buttons Bh ₁ , Bd ₁ , Bh ₂ , and Bd ₂ is manually operated and each of the defect detection levels La and Lb is arbitrarily set, and the emulation button EB is operated, the inspection condition changing unit 9 , performs detection of the defective portion G ₁ ~G ₆ for each original image data Dm ₁ Dm ₆ stored in the image storage unit 6 with the configuration changes defect detection level La or Lb, the detection The defect image data Dg _{1 to} Dg ₆ re-extracted as a result are displayed as a list on the screen of the display 3.
[0035]
When operating the automatic setting button AB, the inspection condition changing unit 9, the original image data _Dm 1 Dm _6, or one of the original image data Dm _1, ..., or the defect detection level La for Dm _6, the Lb separate Automatically set to
[0036]
Each defect detection level La, Lb is automatically set as follows.
[0037]
For example, when the defect detection level La for the original image data Dm ₁ shown in FIG. 6A is automatically set, first, the inspection condition changing unit 9 converts the original image data Dm ₁ to glass as shown in FIG. Horizontal image data Dm ₁ ′ that is laterally shifted by one period of a regular pattern formed on the substrate is created.
[0038]
Next, the inspection condition changing unit 9 creates difference image data Dm _1S between the original image data Dm ₁ and the image data Dm ₁ ′ as shown in FIG. In the difference image data Dm _1S , since the regular pattern formed on the glass substrate is shifted laterally by one cycle, the pattern on the glass substrate is canceled and the defective portion G on the original image data Dm ₁ is canceled. ₁ and a defective portion G ₁ ′ on the laterally shifted image data Dm ₁ ′ remain.
[0039]
Next, the inspection condition changing unit 9 counts the number of data of the brightness of each pixel in the difference image data Dm _1S (the difference in brightness of each pixel between the original image data Dm ₁ and the image data Dm ₁ ′). A brightness frequency distribution diagram shown in FIG. In the brightness distribution diagram, the distribution K ₁ indicates the defective portions G ₁ and G ₁ ′, and the distribution K ₂ indicates low-level noise.
[0040]
Therefore, in order to detect each defect part G ₁ , G ₁ ′, the inspection condition changing part 9 automatically sets the defect detection level La to a level lower than the distribution K ₁ .
[0041]
The inspection condition changing unit 9 displays a contrast enhancement level changing block BC for changing the setting of the contrast enhancement level on the screen of the display 3 as shown in FIG.
[0042]
The setting change of the contrast enhancement level is as follows.
[0043]
The inspection condition changing unit 9 creates the brightness frequency distribution diagram shown in FIG. 7A by counting, for example, the number of brightness data of each pixel in the original image data Dm ₁ .
[0044]
Next, the inspection condition changing unit 9 expands the brightness range of the brightness frequency distribution diagram as shown in FIG. 5B, and the original image according to the brightness frequency distribution diagram with the brightness range expanded. Convert to data Dm ₁ '. The original image data Dm ₁ ′ obtained in this way becomes an image in which the difference between light and dark is clear, and is displayed on the screen of the display 3 with the defect portion G ₁ being emphasized.
[0045]
The defect extraction unit 10 collects defective portions of the original image data Dm _{1 to} Dm ₆ collectively based on the inspection conditions of the defect detection levels La and Lb and the contrast enhancement level changed by the inspection condition changing unit 9. Or by operating the mouse or the like of the manual input unit 5 to designate each of the original image data Dm _{1 to} Dm ₆ with a pointer, and individually extract the defective portion.
[0046]
When the defect information display unit 11 manually designates each defect part G _{1 to} G ₆ on the glass substrate displayed on the screen of the display 3 with a mouse or the like of the manual input unit 5, the defect part G _{1 to} G _6. Information, that is, each coordinate, brightness, type, size, etc. of each of the defect portions G _{1 to} G ₆ is read from the defect information storage portion 7 and each original image data Dm _{1 to} Dm ₆ is displayed on the display screen. image data _Dg 1 _{~Dg 6,} or with the overlay image data _Dr 1 _{~Dr 6,} displayed together in the empty area of the screen on the display screen.
[0047]
Next, the operation of the apparatus configured as described above will be described.
[0048]
When inspecting a regular pattern formed on a glass substrate of a liquid crystal display, for example, the number of layers formed on the glass substrate differs depending on the manufacturing process of the glass substrate, or on the glass substrate depending on whether or not a resist is applied. When the appearance of the pattern or the like changes, it is necessary to change the inspection conditions for the glass substrate.
[0049]
The image storage unit 6, the original image data _Dm 1 Dm ₆ already with the respective defect _G 1 ~G ₆ on the glass substrate is stored. At the same time, the defect information storage unit 7 stores information such as coordinates of the defect portions G _{1 to} G ₆ on the glass substrate, brightnesses, defect types, and sizes.
[0050]
When an instruction to display a list of the original image data Dm _{1 to} Dm ₆ is input by the manual input unit 5, the display control unit 8 displays the original image data Dm _{1 to} Dm 6 stored in the image storage unit _6. Are displayed as a list on the screen of the display 3.
[0051]
Each of the defect portions G _{1 to} G ₆ included in the original image data Dm _{1 to} Dm ₆ displayed in a list is a defect portion (for example, each defect portion G ₁₎ that must be detected in order to affect the liquid crystal display manufacturing. To G ₃ ) and defective portions that do not affect the liquid crystal display manufacture and do not require detection (for example, the respective defective portions G _{4 to} G ₆ ). Therefore, in order to reliably detect only the defective portions G _{1 to} G ₃ that must be detected, the setting of the defect detection levels La and Lb is changed.
[0052]
When the setting of each defect detection level La, Lb is changed manually, each variable button Bh ₁ in the defect detection level changing block BL displayed on the screen of the display 3 by the inspection condition changing unit 9 as shown in FIG. Bh ₂ is changed by manual operation from the manual input unit 5.
[0053]
As a result, the defect detection level La for the white level defect portion Gh in the original image data Dm ₁ as shown in FIG. Further, by changing each of the variable buttons Bd ₁ and Bd ₂ by manual operation from the manual input unit 5, the defect detection level Lb for the black level defect part Gd as shown in FIG.
[0054]
When the emulation button EB is operated after setting the defect detection levels La and Lb in this way, the defect extraction unit 10 causes the defect detection levels La and Lb that have been set and changed by the inspection condition changing unit 9. Based on the above, a defective portion extraction operation is performed on each of the original image data Dm _{1 to} Dm ₆ .
[0055]
When extracting operation of the defect is completed, the display control unit 8, each defect image data Dg ₁ ~Dg ₆ of each defect unit G ₁ ~G ₆ only extracted by the defect extracting unit 10 on the screen of the display 3 Display a list.
[0056]
As a result, the defect image data Dg _{1 to} Dg ₆ displayed in a list on the screen of the display 3 are checked, and the detection results of the defect portions G _{1 to} G ₆ based on the defect detection levels La and Lb whose settings are changed. Can be confirmed.
[0057]
That is, on the screen of the display 3, displays the defect image data Dg ₁ ~Dg ₃ containing each defective portion G ₁ ~G ₃ must always be detected, the defective portion may not be detected (pseudodefects ) _G 4 ~G ₆ are not displayed. As a result, it is possible to immediately determine whether the defect detection levels La and Lb whose settings have been changed manually are appropriate levels.
[0058]
If any one of the defective parts G _{4 to} G ₆ that do not need to be detected is displayed, the variable buttons Bh ₁ and Bh ₂ and the variable buttons Bd ₁ and Bd ₂ are manually operated again. Each defect detection level La and Lb is set and changed.
[0059]
When the setting of the defect detection levels La and Lb is automatically changed, when the automatic setting button AB is operated by the manual input unit 5, the inspection condition changing unit 9 causes the original image data Dm _{1 to} Dm ₆ or one original image data. The defect detection levels La and Lb for the image data Dm ₁ ,... Or Dm ₆ are automatically set separately.
[0060]
For example, when the defect detection levels La and Lb are automatically set so as not to detect the respective defect portions G _{4 to} G ₆ determined as pseudo defects, the inspection condition changing unit 9 converts the original image data Dm _{4 to} Dm ₆ into glass. The pattern is shifted laterally by one period of the pattern on the substrate, and then the difference image data Dm between the original image data Dm _{4 to} Dm ₆ and the laterally shifted image data Dm ₄ ′ to Dm ₆ ′ as shown in FIG. _{4S to} Dm _6S are created.
[0061]
Next, the inspection condition changing unit 9 creates a brightness frequency distribution diagram of the difference image data Dm _{4S to} Dm _6S , and from each of the brightness frequency distribution diagrams, the defect portions G _{4 to} G ₆ and G ₄ ′ to Defect detection levels La and Lb for detecting G ₆ ′ are automatically set.
[0062]
When the automatic setting of the defect detection level La is completed, the defect extraction unit 10 performs the defect extraction operation for each of the original image data Dm _{1 to} Dm ₆ based on the automatically set defect detection levels La and Lb. .
[0063]
The display control unit 8 displays a list of only the defect image data Dg _{1 to} Dg ₃ including the defect portions (true defects) G _{1 to} G ₆ extracted by the defect extraction unit 10 on the screen of the display 3. . Thereby, by checking each defect image data Dg _{1 to} Dg ₃ displayed as a list on the screen of the display 3, it is possible to immediately confirm whether or not the automatically set defect detection levels La and Lb are appropriate levels.
[0064]
Each defect detection level La, when performing manual setting or automatic setting of Lb, for display on the screen of the display 3 is emphasized each defective portions G ₁ ~G ₆ on the original image data Dm ₁ Dm ₆ Further, the contrast of each of the original image data Dm _{1 to} Dm ₆ can be enhanced.
[0065]
As described above, according to the above-described embodiment, the original image data Dm _{1 to} Dm ₆ of the glass substrate are stored, and the defect detection levels La and Lb are set to the original image data Dm _{1 to} Dm ₆ manually or Since the detection results of the defective portions G _{1 to} G ₆ when the setting is automatically changed can be confirmed on the screen of the display 3, the setting can be easily and quickly changed to the optimum defect detection levels La and Lb.
[0066]
As a result, by feeding back the reset defect detection levels La and Lb to the substrate inspection apparatus 12, the substrate inspection apparatus 12 can shorten the rise time of the substrate inspection even when the state of the glass substrate changes.
[0067]
When manual setting or automatic setting of the defect detection levels La and Lb is performed, the original image data Dm displayed on the screen of the display 3 is performed by performing contrast enhancement processing on the original image data Dm _{1 to} Dm _{6. 1} can be viewed by highlighting the respective defect _G 1 ~G ₆ of ~Dm on ₆ becomes easy to recognize each defect _G 1 ~G _6.
[0068]
Further, the original image data Dm ₁ Dm _6, by cutting out only a portion of the region including the defective portion from the image data D obtained by imaging the entire surface of the glass substrate, each of the original image data Dm ₁ Dm ₆ is reduced, the storage capacity of the image storage unit 6 can be greatly reduced, and original image data, defect image data, and overlay image data can be displayed on the screen of the display 3 in a short time.
[0069]
In addition, the display control unit 8 is set and changed only for the original image data instructed by the manual input unit 5 among the original image data Dm _{1 to} Dm ₆ , for example, each of the original image data Dm ₁ and Dm ₃ . The defect portions G ₁ and G ₃ can be detected based on the defect detection levels La and Lb.
[0070]
Further, the display control unit 8 makes it easy to inspect the defective portions G _{1 to} G ₆ in accordance with the selection instruction from the manual input unit 5. The original image data Dm _{1 to} Dm ₆ and the defective image data Dg _{1 to} Dg are used. ₆ , or arbitrary image data is selected from the overlay image data and displayed on the screen of the display 3, or each coordinate order, each brightness order, each kind order, each order of each defect part G _{1 to} G ₆ It can be displayed on the screen of the display 3 by sorting in order of size.
[0071]
Note that the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. Further, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, you may combine suitably the component covering different embodiment.
[0072]
In the embodiment described above, the setting change of the defect detection level used in the substrate inspection apparatus for the glass substrate of the liquid crystal display has been described. However, the present invention is not limited to this, and can be applied to the inspection of a semiconductor wafer on which a regular pattern is formed. .
[0073]
【The invention's effect】
As described above in detail, according to the present invention, original image data is obtained by storing original image data obtained by cutting out a peripheral original image including a defective portion from entire image data acquired by imaging the entire surface of the inspection target substrate. The image data storage capacity can be reduced significantly, and the storage capacity of image data can be greatly reduced, and by simply operating the variable buttons displayed on the display screen, it is optimal to immediately check the detection results of defective parts on the display screen. Defect display device that can easily and quickly change the setting to a certain defect detection level, and can easily change the setting of the optimum inspection conditions according to the change in the state of the glass substrate even if the state of the glass substrate changes Can provide.
[Brief description of the drawings]
FIG. 1 is a configuration diagram showing an embodiment of a defect display device according to the present invention.
FIG. 2 is a schematic diagram showing extraction of original image data in the apparatus.
FIG. 3 is a view showing original image data, defect image data, and overlay image data selected and displayed by the apparatus.
FIG. 4 is a view showing a setting change of a detection level for a defective portion by the apparatus.
FIG. 5 is a view for explaining emulation of a defect detection level in the apparatus.
FIG. 6 is a view for explaining automatic setting of a defect detection level in the apparatus.
FIG. 7 is a diagram for explaining setting change of contrast enhancement level in the apparatus.
[Explanation of symbols]
1: main control unit, 2: output unit, 3: display, 4: input unit, 5: manual input unit, 6: image storage unit, 7: defect information storage unit, 8: display control unit, 9: inspection condition change Part: 10: defect extraction part, 11: defect information display part, 12: substrate inspection apparatus.

Claims (5)

An image storage unit for storing original image data obtained by cutting out a peripheral original image including a defective portion on the inspection target substrate from the entire image data acquired by imaging the entire surface of the inspection target substrate by the substrate inspection device ;
A defect extraction unit that extracts defect image data of the defect from the original image data stored in the image storage unit based on a defect detection level for extracting the defect;
A variable button for changing the defect detection level is displayed on a display screen, and an inspection condition changing unit for changing the defect detection level for the original image data stored in the image storage unit by operating the variable button;
A display control unit for displaying on the display screen the defect image data re-extracted by the defect extraction unit with respect to the original image data by the defect detection level changed by the inspection condition changing unit ;
A defect display device comprising: The display control unit displays a list of the original image data stored in the image storage unit on the display screen,
The variable button of the inspection condition changing unit collectively changes the defect detection level for all the original image data listed on the display screen or the original image data designated by a pointer .
The defect display device according to claim 1. The inspection condition changing unit includes a variable button for changing the defect detection level of the defective part having a white level higher than the normal level in the original image data, and a black level having a lower brightness than the normal level. The defect display device according to claim 1 , wherein a variable button for changing a defect detection level of the defect portion is displayed separately on the display screen . The display controller, according to claim 1, wherein the displaying the overlay image data obtained by superimposing the defect image data re-extracted with the defect extracting unit with respect to the original image data on the display screen Defect display device. The defect display device according to claim 4 , wherein the display control unit changes the color of the defect portion of the defect image data when displaying the overlay image on the display screen .

Images