JP2005024312A5 - - Google Patents

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Publication number
JP2005024312A5
JP2005024312A5 JP2003187854A JP2003187854A JP2005024312A5 JP 2005024312 A5 JP2005024312 A5 JP 2005024312A5 JP 2003187854 A JP2003187854 A JP 2003187854A JP 2003187854 A JP2003187854 A JP 2003187854A JP 2005024312 A5 JP2005024312 A5 JP 2005024312A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003187854A
Other languages
Japanese (ja)
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JP2005024312A (en
JP4079841B2 (en
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2003187854A external-priority patent/JP4079841B2/en
Priority to JP2003187854A priority Critical patent/JP4079841B2/en
Priority to CNB2004800185074A priority patent/CN100476416C/en
Priority to KR1020057024959A priority patent/KR100791195B1/en
Priority to PCT/JP2004/009467 priority patent/WO2005001455A1/en
Priority to TW093119098A priority patent/TWI340356B/en
Publication of JP2005024312A publication Critical patent/JP2005024312A/en
Publication of JP2005024312A5 publication Critical patent/JP2005024312A5/ja
Publication of JP4079841B2 publication Critical patent/JP4079841B2/en
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003187854A 2003-06-30 2003-06-30 Defect display device Expired - Fee Related JP4079841B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2003187854A JP4079841B2 (en) 2003-06-30 2003-06-30 Defect display device
CNB2004800185074A CN100476416C (en) 2003-06-30 2004-06-28 Defect dispay unit
KR1020057024959A KR100791195B1 (en) 2003-06-30 2004-06-28 Defect display unit
PCT/JP2004/009467 WO2005001455A1 (en) 2003-06-30 2004-06-28 Defect dispay unit
TW093119098A TWI340356B (en) 2003-06-30 2004-06-29 Defect display apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003187854A JP4079841B2 (en) 2003-06-30 2003-06-30 Defect display device

Publications (3)

Publication Number Publication Date
JP2005024312A JP2005024312A (en) 2005-01-27
JP2005024312A5 true JP2005024312A5 (en) 2006-08-10
JP4079841B2 JP4079841B2 (en) 2008-04-23

Family

ID=33549735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003187854A Expired - Fee Related JP4079841B2 (en) 2003-06-30 2003-06-30 Defect display device

Country Status (5)

Country Link
JP (1) JP4079841B2 (en)
KR (1) KR100791195B1 (en)
CN (1) CN100476416C (en)
TW (1) TWI340356B (en)
WO (1) WO2005001455A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007071678A (en) * 2005-09-07 2007-03-22 Hitachi High-Technologies Corp Inspection system
JP2008033306A (en) * 2006-07-03 2008-02-14 Olympus Corp Defect correcting device
JP4956077B2 (en) * 2006-07-19 2012-06-20 株式会社メック Defect inspection apparatus and defect inspection method
JP4843399B2 (en) * 2006-07-31 2011-12-21 株式会社日立ハイテクノロジーズ Inspection apparatus and inspection method
JP4913838B2 (en) * 2008-04-14 2012-04-11 日東電工株式会社 Optical display device manufacturing system and optical display device manufacturing method
CN102937594B (en) * 2012-11-02 2015-01-21 上海华力微电子有限公司 Defect detecting system and method
CN103489817B (en) * 2013-09-30 2016-01-27 上海华力微电子有限公司 defect detecting system and method
CN103809309B (en) * 2014-01-22 2016-07-06 北京京东方显示技术有限公司 Substrate detection equipment and method
CN103792705B (en) * 2014-01-28 2017-02-01 北京京东方显示技术有限公司 Detecting method and detecting device for detecting substrate defects
KR20180052246A (en) * 2016-11-10 2018-05-18 (주) 지펙케이앤디 Manually or automatically brightness controlling display device by sensor value setting of illuminance sensor
CN107040725B (en) * 2017-05-15 2021-04-30 惠科股份有限公司 Coordinate correction method of image acquisition device and image acquisition device
CN110132979A (en) * 2019-05-05 2019-08-16 东方电气集团东方锅炉股份有限公司 A kind of analysis method of metal material microscopic defect

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59192943A (en) * 1983-04-15 1984-11-01 Hitachi Ltd Defect inspecting device repetitive pattern
JPH07119704B2 (en) * 1986-03-18 1995-12-20 オムロン株式会社 Board inspection equipment
JP2647502B2 (en) * 1989-06-30 1997-08-27 株式会社日立製作所 Pattern comparison inspection method and apparatus
JPH0357241A (en) * 1989-07-26 1991-03-12 Hitachi Ltd Automatic external-appearance inspection apparatus
JPH0776757B2 (en) * 1990-12-14 1995-08-16 インターナショナル・ビジネス・マシーンズ・コーポレイション Optical inspection device
JPH05172548A (en) * 1991-12-25 1993-07-09 Honda Motor Co Ltd Data output method and work surface inspection device
JPH0614959U (en) * 1992-06-01 1994-02-25 エヌオーケー株式会社 Image processing device
JP2710527B2 (en) * 1992-10-21 1998-02-10 大日本スクリーン製造株式会社 Inspection equipment for periodic patterns
JPH08219721A (en) * 1995-02-14 1996-08-30 Sony Corp Image processor
JP2981434B2 (en) * 1997-01-27 1999-11-22 株式会社日立製作所 Pattern defect detection method and apparatus
JP3288613B2 (en) * 1997-09-25 2002-06-04 株式会社クボタ Defect detection device and defect removal device
JPH11346308A (en) * 1998-06-02 1999-12-14 Olympus Optical Co Ltd Image reader for transparent original
JP2000193594A (en) * 1998-12-24 2000-07-14 Hitachi Ltd Circuit pattern inspecting method and its device
JP2000188075A (en) * 1998-12-22 2000-07-04 Hitachi Ltd Inspection method and inspection device for circuit pattern
JP4588138B2 (en) * 1999-07-23 2010-11-24 株式会社日立製作所 Circuit pattern inspection device
JP3869588B2 (en) * 1999-09-01 2007-01-17 株式会社日立製作所 Circuit pattern inspection device
JP2001141601A (en) * 1999-11-11 2001-05-25 Sony Corp Method and system for evaluating/sorting display or imaging device
JP2001156135A (en) * 1999-11-29 2001-06-08 Hitachi Ltd Method and device for sorting defective image and manufacturing method of semiconductor device using them
JP2001256480A (en) * 2000-03-09 2001-09-21 Hitachi Ltd Automatic picture classifying method and its device
JP2002228606A (en) * 2001-01-31 2002-08-14 Hitachi Ltd Electron beam circuit pattern inspecting method and apparatus therefor

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