JP4079206B2 - 基板検査装置および基板検査方法ならびに基板検査装置を備えた液処理装置 - Google Patents
基板検査装置および基板検査方法ならびに基板検査装置を備えた液処理装置 Download PDFInfo
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- JP4079206B2 JP4079206B2 JP2000381715A JP2000381715A JP4079206B2 JP 4079206 B2 JP4079206 B2 JP 4079206B2 JP 2000381715 A JP2000381715 A JP 2000381715A JP 2000381715 A JP2000381715 A JP 2000381715A JP 4079206 B2 JP4079206 B2 JP 4079206B2
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JP2000381715A JP4079206B2 (ja) | 2000-12-15 | 2000-12-15 | 基板検査装置および基板検査方法ならびに基板検査装置を備えた液処理装置 |
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JP2000381715A JP4079206B2 (ja) | 2000-12-15 | 2000-12-15 | 基板検査装置および基板検査方法ならびに基板検査装置を備えた液処理装置 |
Publications (3)
Publication Number | Publication Date |
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JP2002184839A JP2002184839A (ja) | 2002-06-28 |
JP2002184839A5 JP2002184839A5 (no) | 2005-06-16 |
JP4079206B2 true JP4079206B2 (ja) | 2008-04-23 |
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JP2000381715A Expired - Fee Related JP4079206B2 (ja) | 2000-12-15 | 2000-12-15 | 基板検査装置および基板検査方法ならびに基板検査装置を備えた液処理装置 |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005072374A (ja) * | 2003-08-26 | 2005-03-17 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
CN100528415C (zh) | 2004-07-02 | 2009-08-19 | 新东工业株式会社 | 粗铝铸件的后处理方法和其设备 |
JP2006140418A (ja) * | 2004-11-15 | 2006-06-01 | Kaijo Corp | 被処理基板の検出システム |
JP4863985B2 (ja) * | 2007-12-20 | 2012-01-25 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP5059054B2 (ja) | 2009-05-25 | 2012-10-24 | 東京エレクトロン株式会社 | 基板処理システム、基板検出装置および基板検出方法 |
JP5579796B2 (ja) * | 2012-07-23 | 2014-08-27 | 東京エレクトロン株式会社 | 基板処理システム、基板検出装置および基板検出方法 |
JP6128941B2 (ja) | 2013-05-10 | 2017-05-17 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法及び半導体製造装置 |
CN109817509A (zh) * | 2017-11-20 | 2019-05-28 | 顶程国际股份有限公司 | 晶圆侦测装置及晶圆清洗机 |
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JP2002184839A (ja) | 2002-06-28 |
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