JP4074370B2 - 真空成膜装置 - Google Patents

真空成膜装置 Download PDF

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Publication number
JP4074370B2
JP4074370B2 JP07895898A JP7895898A JP4074370B2 JP 4074370 B2 JP4074370 B2 JP 4074370B2 JP 07895898 A JP07895898 A JP 07895898A JP 7895898 A JP7895898 A JP 7895898A JP 4074370 B2 JP4074370 B2 JP 4074370B2
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JP
Japan
Prior art keywords
plasma
electron
plasma beam
vacuum
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP07895898A
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English (en)
Japanese (ja)
Other versions
JPH11269636A (ja
JPH11269636A5 (enExample
Inventor
欣弥 木曽田
英二 古屋
良一 大東
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chugai Ro Co Ltd
Dai Nippon Printing Co Ltd
Original Assignee
Chugai Ro Co Ltd
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chugai Ro Co Ltd, Dai Nippon Printing Co Ltd filed Critical Chugai Ro Co Ltd
Priority to JP07895898A priority Critical patent/JP4074370B2/ja
Priority to TW88112473A priority patent/TW473553B/zh
Publication of JPH11269636A publication Critical patent/JPH11269636A/ja
Publication of JPH11269636A5 publication Critical patent/JPH11269636A5/ja
Application granted granted Critical
Publication of JP4074370B2 publication Critical patent/JP4074370B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP07895898A 1998-03-26 1998-03-26 真空成膜装置 Expired - Lifetime JP4074370B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP07895898A JP4074370B2 (ja) 1998-03-26 1998-03-26 真空成膜装置
TW88112473A TW473553B (en) 1998-03-26 1999-07-22 Vacuum coating forming device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07895898A JP4074370B2 (ja) 1998-03-26 1998-03-26 真空成膜装置

Publications (3)

Publication Number Publication Date
JPH11269636A JPH11269636A (ja) 1999-10-05
JPH11269636A5 JPH11269636A5 (enExample) 2005-07-21
JP4074370B2 true JP4074370B2 (ja) 2008-04-09

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ID=13676413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP07895898A Expired - Lifetime JP4074370B2 (ja) 1998-03-26 1998-03-26 真空成膜装置

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JP (1) JP4074370B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014027508A1 (ja) 2012-08-15 2014-02-20 中外炉工業株式会社 プラズマ処理装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4287936B2 (ja) * 1999-02-01 2009-07-01 中外炉工業株式会社 真空成膜装置
JP5350911B2 (ja) * 2008-07-31 2013-11-27 キヤノンアネルバ株式会社 プラズマ発生装置及び成膜装置並びに成膜方法及び表示素子の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014027508A1 (ja) 2012-08-15 2014-02-20 中外炉工業株式会社 プラズマ処理装置
JP2014037572A (ja) * 2012-08-15 2014-02-27 Chugai Ro Co Ltd プラズマ処理装置
US8986458B2 (en) 2012-08-15 2015-03-24 Chugai Ro Co., Ltd. Plasma processing apparatus

Also Published As

Publication number Publication date
JPH11269636A (ja) 1999-10-05

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