JP4068709B2 - 単結晶引上装置及び引上方法 - Google Patents

単結晶引上装置及び引上方法 Download PDF

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Publication number
JP4068709B2
JP4068709B2 JP03201098A JP3201098A JP4068709B2 JP 4068709 B2 JP4068709 B2 JP 4068709B2 JP 03201098 A JP03201098 A JP 03201098A JP 3201098 A JP3201098 A JP 3201098A JP 4068709 B2 JP4068709 B2 JP 4068709B2
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single crystal
gripping
rod
rods
grip
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Japanese (ja)
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JPH10310492A (ja
JPH10310492A5 (enExample
Inventor
純輔 冨岡
宏 稲垣
歩 須田
利通 久保田
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Sumco Techxiv Corp
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Sumco Techxiv Corp
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  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP03201098A 1997-01-29 1998-01-28 単結晶引上装置及び引上方法 Expired - Lifetime JP4068709B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03201098A JP4068709B2 (ja) 1997-01-29 1998-01-28 単結晶引上装置及び引上方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP9-28260 1997-01-29
JP2826097 1997-01-29
JP03201098A JP4068709B2 (ja) 1997-01-29 1998-01-28 単結晶引上装置及び引上方法

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JPH10310492A JPH10310492A (ja) 1998-11-24
JPH10310492A5 JPH10310492A5 (enExample) 2005-08-11
JP4068709B2 true JP4068709B2 (ja) 2008-03-26

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8601044B2 (en) 2010-03-02 2013-12-03 Altera Corporation Discrete Fourier Transform in an integrated circuit device
US8620980B1 (en) 2005-09-27 2013-12-31 Altera Corporation Programmable device with specialized multiplier blocks
US8645451B2 (en) 2011-03-10 2014-02-04 Altera Corporation Double-clocked specialized processing block in an integrated circuit device
US8650236B1 (en) 2009-08-04 2014-02-11 Altera Corporation High-rate interpolation or decimation filter in integrated circuit device

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101880910B (zh) * 2010-06-30 2012-05-23 宁夏日晶新能源装备股份有限公司 单晶炉称重装置
KR101318339B1 (ko) * 2010-09-09 2013-10-18 이태용 발바닥의 족저압 및 전단력 동시 측정을 위한 포스 센서 및 이를 이용한 측정장치
CN112173702B (zh) * 2020-10-13 2025-03-28 洛阳市自动化研究所有限公司 一种用于使籽晶转动的籽晶夹头的快速取放装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8620980B1 (en) 2005-09-27 2013-12-31 Altera Corporation Programmable device with specialized multiplier blocks
US8650236B1 (en) 2009-08-04 2014-02-11 Altera Corporation High-rate interpolation or decimation filter in integrated circuit device
US8601044B2 (en) 2010-03-02 2013-12-03 Altera Corporation Discrete Fourier Transform in an integrated circuit device
US8645451B2 (en) 2011-03-10 2014-02-04 Altera Corporation Double-clocked specialized processing block in an integrated circuit device

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Publication number Publication date
JPH10310492A (ja) 1998-11-24

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