JP4049531B2 - 磁気軸受モータおよびエキシマレーザ装置 - Google Patents
磁気軸受モータおよびエキシマレーザ装置 Download PDFInfo
- Publication number
- JP4049531B2 JP4049531B2 JP2000324526A JP2000324526A JP4049531B2 JP 4049531 B2 JP4049531 B2 JP 4049531B2 JP 2000324526 A JP2000324526 A JP 2000324526A JP 2000324526 A JP2000324526 A JP 2000324526A JP 4049531 B2 JP4049531 B2 JP 4049531B2
- Authority
- JP
- Japan
- Prior art keywords
- motor
- magnetic bearing
- housing body
- bearing
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005192 partition Methods 0.000 claims description 46
- 238000006073 displacement reaction Methods 0.000 claims description 26
- 230000002093 peripheral effect Effects 0.000 claims description 15
- 230000001939 inductive effect Effects 0.000 claims description 13
- 239000007769 metal material Substances 0.000 claims description 9
- 238000003466 welding Methods 0.000 claims description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 8
- 239000003566 sealing material Substances 0.000 claims description 5
- 239000000565 sealant Substances 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims 1
- 238000005260 corrosion Methods 0.000 description 7
- 230000007797 corrosion Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 238000001514 detection method Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 5
- 230000004907 flux Effects 0.000 description 4
- 230000006698 induction Effects 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910000963 austenitic stainless steel Inorganic materials 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 229910000976 Electrical steel Inorganic materials 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 210000003027 ear inner Anatomy 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000012811 non-conductive material Substances 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/047—Details of housings; Mounting of active magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Lasers (AREA)
- Insulation, Fastening Of Motor, Generator Windings (AREA)
- Motor Or Generator Frames (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000324526A JP4049531B2 (ja) | 2000-10-24 | 2000-10-24 | 磁気軸受モータおよびエキシマレーザ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000324526A JP4049531B2 (ja) | 2000-10-24 | 2000-10-24 | 磁気軸受モータおよびエキシマレーザ装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002136046A JP2002136046A (ja) | 2002-05-10 |
| JP2002136046A5 JP2002136046A5 (enrdf_load_stackoverflow) | 2005-02-10 |
| JP4049531B2 true JP4049531B2 (ja) | 2008-02-20 |
Family
ID=18802041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000324526A Expired - Lifetime JP4049531B2 (ja) | 2000-10-24 | 2000-10-24 | 磁気軸受モータおよびエキシマレーザ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4049531B2 (enrdf_load_stackoverflow) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5027473B2 (ja) * | 2006-10-11 | 2012-09-19 | カヤバ工業株式会社 | サスペンション装置 |
| US7847454B2 (en) * | 2007-03-08 | 2010-12-07 | General Electric Company | Encapsulated stator assembly and process for making |
| US8593024B2 (en) * | 2010-04-12 | 2013-11-26 | Hamilton Sundstrand Space Systems International, Inc. | Implementation of a non-metallic barrier in an electric motor |
| JP2013038964A (ja) * | 2011-08-09 | 2013-02-21 | Ulvac Japan Ltd | 位置検出器および真空モータ |
| EP2887022B1 (en) * | 2013-12-20 | 2016-09-07 | Skf Magnetic Mechatronics | Rotor sensor target for magnetic bearings |
| JP2021055613A (ja) * | 2019-09-30 | 2021-04-08 | ダイキン工業株式会社 | ターボ圧縮機 |
| CN116868456A (zh) | 2021-03-24 | 2023-10-10 | 极光先进雷射株式会社 | 腔装置、气体激光装置和电子器件的制造方法 |
-
2000
- 2000-10-24 JP JP2000324526A patent/JP4049531B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002136046A (ja) | 2002-05-10 |
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