JP4035582B2 - 粒子分析装置 - Google Patents
粒子分析装置 Download PDFInfo
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- JP4035582B2 JP4035582B2 JP2004328270A JP2004328270A JP4035582B2 JP 4035582 B2 JP4035582 B2 JP 4035582B2 JP 2004328270 A JP2004328270 A JP 2004328270A JP 2004328270 A JP2004328270 A JP 2004328270A JP 4035582 B2 JP4035582 B2 JP 4035582B2
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- Prior art keywords
- light
- reflecting mirror
- scattered light
- particle
- optical fiber
- Prior art date
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- 239000002245 particle Substances 0.000 title claims description 75
- 230000003287 optical effect Effects 0.000 claims description 45
- 239000013307 optical fiber Substances 0.000 claims description 24
- 230000008033 biological extinction Effects 0.000 claims description 11
- 238000004458 analytical method Methods 0.000 claims description 3
- 230000006870 function Effects 0.000 claims description 3
- 239000012780 transparent material Substances 0.000 claims description 3
- 238000000180 cavity ring-down spectroscopy Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 239000000443 aerosol Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000028161 membrane depolarization Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 239000005436 troposphere Substances 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
- G01N2021/151—Gas blown
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
- G01N2021/391—Intracavity sample
Landscapes
- Optical Measuring Cells (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
Anthony W.Strawa、他4名、「The Measurement ofAerosol Optical Properties Using Continuous Wave Cavity Ring-Down Techniques」、JOURNAL OF ATMOSPHERICAND OCEANIC TECHNOLOGY、VOLUME20、p.454-465
2・・・光源
31、32・・・反射鏡
3・・・光学キャビティ
4・・・反射鏡保持部材
5・・・漏れ光検出器
61、62、63・・・散乱光検出器
7・・・演算装置
4a・・・透光部
611、621、631・・・偏光板
F・・・光ファイバ
Claims (8)
- レーザ光を照射する光源と、
複数の反射鏡によって形成され、前記レーザ光を閉じこめるとともに測定対象である粒子が導入される光学キャビティと、
前記反射鏡を保持する反射鏡保持部材と、
前記レーザ光が前記反射鏡のいずれか1つで反射する際に、その反射鏡から漏れ出た漏れ光の強度を検出する漏れ光検出器と、
前記レーザ光が前記粒子に照射されて生じる散乱光の強度を検出する複数の散乱光検出器と、
前記漏れ光強度及び前記散乱光強度に基づいて、前記粒子の粒径、散乱係数、消散係数等の粒子特性を算出する演算装置とを備え、
前記反射鏡保持部材が、少なくともその一部に光を透過する透光部を有したものであり、前記散乱光検出器が前記透光部を通過して光学キャビティ外に出た散乱光の強度を検出するものである粒子分析装置。 - 前記反射鏡保持部材の全部が透明材料から構成した透光部である請求項1記載の粒子分析装置。
- 前記反射鏡保持部材に、透光部としての機能を奏する光ファイバを装着し、前記散乱光検出器にその光ファイバを透過した散乱光を検出させるようにしている請求項1記載の粒子分析装置。
- 前記透光部と前記散乱光検出器との間に偏光板を設けている請求項1、2又は3記載の粒子分析装置。
- 前記光ファイバが、偏波面保持光ファイバである請求項4記載の粒子分析装置。
- 前記光源から光ファイバを用いてレーザ光を導光し、前記反射鏡から漏れ出た漏れ光を光ファイバで前記漏れ光検出器へ導光させることを特徴とする請求項1、2、3、4又は5記載の粒子分析装置。
- 前記光学キャビティが、注入されるレーザ光の光軸方向に対して、反射波長の互いに異なる複数対の反射鏡を並列することにより形成されている請求項1、2、3、4、5又は6記載の粒子分析装置。
- 前記光源が、所定波長のレーザ光とその所定波長の整数分の1の波長のレーザ光とを発振する多波長光源であることを特徴とする請求項1、2、3、4、5、6又は7記載の粒子分析装置。
Priority Applications (1)
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JP2004328270A JP4035582B2 (ja) | 2004-11-11 | 2004-11-11 | 粒子分析装置 |
Applications Claiming Priority (1)
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---|---|---|---|
JP2004328270A JP4035582B2 (ja) | 2004-11-11 | 2004-11-11 | 粒子分析装置 |
Publications (2)
Publication Number | Publication Date |
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JP2006138727A JP2006138727A (ja) | 2006-06-01 |
JP4035582B2 true JP4035582B2 (ja) | 2008-01-23 |
Family
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JP2004328270A Active JP4035582B2 (ja) | 2004-11-11 | 2004-11-11 | 粒子分析装置 |
Country Status (1)
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JP (1) | JP4035582B2 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008026183A1 (en) * | 2006-08-31 | 2008-03-06 | Koninklijke Philips Electronics N.V. | Cavity-enhanced photo acoustic trace gas detector with improved feedback loop |
JP2008076298A (ja) * | 2006-09-22 | 2008-04-03 | Shimadzu Corp | レーザ回折・散乱式粒度分布測定装置 |
JP4713530B2 (ja) * | 2007-03-23 | 2011-06-29 | 日本電信電話株式会社 | 浮遊粒子状物質測定装置 |
EP2235501B1 (en) | 2008-01-15 | 2018-05-23 | Malvern Panalytical Limited | Light scattering measurements using simultaneous detection |
JP5228718B2 (ja) * | 2008-09-09 | 2013-07-03 | Dic株式会社 | 粒度分布評価方法及びそのプログラム並びに粒度分布評価装置 |
EP3130909B1 (en) | 2014-04-08 | 2021-07-14 | Mitsubishi Electric Corporation | Floating particle detection device |
CN103983544B (zh) * | 2014-05-28 | 2015-12-30 | 南京大学 | 多通道气溶胶散射吸收测量仪 |
CN106198457B (zh) * | 2016-08-31 | 2019-01-11 | 上海复展智能科技股份有限公司 | 多通道液体透射及散射测量装置和方法 |
JP6769330B2 (ja) * | 2017-02-14 | 2020-10-14 | 株式会社島津製作所 | パーティクル計数システム |
CN113884417B (zh) * | 2021-06-25 | 2023-10-27 | 张玉芝 | 一种用于复合气体的综合检测装置 |
-
2004
- 2004-11-11 JP JP2004328270A patent/JP4035582B2/ja active Active
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