JP2019015563A - 流体分析装置 - Google Patents
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Abstract
Description
[第1実施形態]
[第2実施形態]
[第3実施形態]
[第4実施形態]
[第5実施形態]
[変形例]
Claims (11)
- 基板と、
前記基板の表面に形成され、前記表面に平行な所定方向において互いに対向する第1光出射面及び第2光出射面を有する量子カスケードレーザと、
前記表面に形成され、前記量子カスケードレーザと同一の層構造、及び前記所定方向において前記第2光出射面に対向する光入射面を有する量子カスケード検出器と、
前記第1光出射面から出射された光の光路上に、分析対象の流体が配置される検査領域を介して配置され、前記光を反射することにより、前記光を前記第1光出射面に帰還させる光学素子と、を備える、流体分析装置。 - 前記第1光出射面と前記第2光出射面との間で光共振器が構成されている、請求項1記載の流体分析装置。
- 前記量子カスケードレーザは、マルチモードで発振するファブリペロー型素子として構成されている、請求項2記載の流体分析装置。
- 前記量子カスケードレーザは、シングルモードで発振する分布帰還型素子として構成されており、
前記第1光出射面から前記光学素子までの前記光の光路長は、前記量子カスケードレーザの発振波長の半波長の整数倍である、請求項2記載の流体分析装置。 - 前記光学素子は、前記第1光出射面から出射された前記光を回折すると共に反射する回折格子であり、
前記回折格子は、前記光のうち、前記光の入射角に応じた波長の光を反射させることにより、当該波長の光を前記第1光出射面に帰還させるように駆動され、
前記第2光出射面と前記回折格子との間で光共振器が構成されている、請求項1記載の流体分析装置。 - 前記第1光出射面から出射された前記光を回折すると共に反射する回折格子と、
前記回折格子により回折されると共に反射された前記光を反射するミラーと、を更に備え、
前記ミラーは、前記光のうち、前記光の入射角に応じた波長の光を反射させることにより、前記回折格子を介して前記第1光出射面に当該波長の光を帰還させるように駆動され、
前記第2光出射面と前記ミラーとの間で光共振器が構成されており、
前記光学素子は、前記回折格子により反射された前記光の0次の反射光の光路上に、前記分析対象の流体が配置される前記検査領域を介して配置され、前記0次の反射光を反射させることにより、前記回折格子を介して前記第1光出射面に前記光を帰還させる、請求項1記載の流体分析装置。 - 前記光入射面は、前記第2光出射面と鋭角を成す位置関係となるように傾斜している、請求項1〜6のいずれか一項記載の流体分析装置。
- 前記光入射面は、前記第2光出射面と鋭角を成す位置関係となるように傾斜すると共に、前記基板の前記表面に垂直であって前記所定方向に沿う仮想面と直角を成し且つ前記基板の前記表面と45°以上の角度を成すように傾斜している、請求項1〜7のいずれか一項記載の流体分析装置。
- 前記第1光出射面と前記検査領域との間に配置され、前記第1光出射面から出射された前記光をコリメートするレンズを更に備える、請求項1〜8のいずれか一項記載の流体分析装置。
- 前記検査領域を内部に有するマルチパスセルを更に備える、請求項1〜9のいずれか一項記載の流体分析装置。
- 前記量子カスケード検出器は、前記所定方向において前記光入射面に対向する光反射面を有し、
前記光反射面には、前記第2光出射面から出射された光を反射する反射膜が形成されている、請求項1〜10のいずれか一項記載の流体分析装置。
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Cited By (3)
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JP2021077670A (ja) * | 2019-11-05 | 2021-05-20 | 住友電気工業株式会社 | 量子カスケードレーザ |
WO2023218782A1 (ja) * | 2022-05-12 | 2023-11-16 | 浜松ホトニクス株式会社 | 光源装置及び制御方法 |
WO2024090042A1 (ja) * | 2022-10-26 | 2024-05-02 | 株式会社堀場製作所 | 分析装置、レーザ素子の駆動方法、及び、分析方法 |
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US11456577B2 (en) * | 2020-07-28 | 2022-09-27 | Raytheon Company | Monolithic quantum cascade laser (QCL)/avalanche photodiode (APD) infrared transceiver |
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