JP4035519B2 - 半導体圧力センサおよびその製造方法 - Google Patents

半導体圧力センサおよびその製造方法 Download PDF

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Publication number
JP4035519B2
JP4035519B2 JP2004176853A JP2004176853A JP4035519B2 JP 4035519 B2 JP4035519 B2 JP 4035519B2 JP 2004176853 A JP2004176853 A JP 2004176853A JP 2004176853 A JP2004176853 A JP 2004176853A JP 4035519 B2 JP4035519 B2 JP 4035519B2
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Japan
Prior art keywords
diaphragm
pressure sensor
semiconductor pressure
semiconductor
piezoresistive elements
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Expired - Fee Related
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JP2004176853A
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Japanese (ja)
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JP2006003099A5 (enExample
JP2006003099A (ja
Inventor
武史 市川
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2004176853A priority Critical patent/JP4035519B2/ja
Priority to PCT/JP2005/011191 priority patent/WO2005124306A1/en
Priority to US11/597,501 priority patent/US7540198B2/en
Publication of JP2006003099A publication Critical patent/JP2006003099A/ja
Publication of JP2006003099A5 publication Critical patent/JP2006003099A5/ja
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Publication of JP4035519B2 publication Critical patent/JP4035519B2/ja
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  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP2004176853A 2004-06-15 2004-06-15 半導体圧力センサおよびその製造方法 Expired - Fee Related JP4035519B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004176853A JP4035519B2 (ja) 2004-06-15 2004-06-15 半導体圧力センサおよびその製造方法
PCT/JP2005/011191 WO2005124306A1 (en) 2004-06-15 2005-06-13 Semiconductor device
US11/597,501 US7540198B2 (en) 2004-06-15 2005-06-13 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004176853A JP4035519B2 (ja) 2004-06-15 2004-06-15 半導体圧力センサおよびその製造方法

Publications (3)

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JP2006003099A JP2006003099A (ja) 2006-01-05
JP2006003099A5 JP2006003099A5 (enExample) 2007-07-19
JP4035519B2 true JP4035519B2 (ja) 2008-01-23

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JP2004176853A Expired - Fee Related JP4035519B2 (ja) 2004-06-15 2004-06-15 半導体圧力センサおよびその製造方法

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JP (1) JP4035519B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007292559A (ja) * 2006-04-24 2007-11-08 Mitsumi Electric Co Ltd 半導体圧力センサーの製造方法
JP4739164B2 (ja) 2006-10-20 2011-08-03 三菱電機株式会社 車両用エンジンの吸入空気圧力測定用の半導体感歪センサ
JP5139759B2 (ja) * 2007-09-25 2013-02-06 アルプス電気株式会社 半導体圧力センサ
JP5220866B2 (ja) * 2008-11-17 2013-06-26 アルプス電気株式会社 半導体圧力センサ
JP2015184046A (ja) 2014-03-20 2015-10-22 セイコーエプソン株式会社 物理量センサー、圧力センサー、高度計、電子機器および移動体
JP6318760B2 (ja) 2014-03-25 2018-05-09 セイコーエプソン株式会社 物理量センサー、高度計、電子機器および移動体
JP7049522B2 (ja) * 2019-02-28 2022-04-06 アルプスアルパイン株式会社 圧力センサ

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