JP4020713B2 - 光学式エンコーダ - Google Patents
光学式エンコーダ Download PDFInfo
- Publication number
- JP4020713B2 JP4020713B2 JP2002188554A JP2002188554A JP4020713B2 JP 4020713 B2 JP4020713 B2 JP 4020713B2 JP 2002188554 A JP2002188554 A JP 2002188554A JP 2002188554 A JP2002188554 A JP 2002188554A JP 4020713 B2 JP4020713 B2 JP 4020713B2
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- Prior art keywords
- optical pattern
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- optical
- Prior art date
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- 230000003287 optical effect Effects 0.000 title claims description 286
- 230000000737 periodic effect Effects 0.000 claims description 28
- 230000005540 biological transmission Effects 0.000 claims description 13
- 230000015572 biosynthetic process Effects 0.000 claims 1
- LFEUVBZXUFMACD-UHFFFAOYSA-H lead(2+);trioxido(oxo)-$l^{5}-arsane Chemical compound [Pb+2].[Pb+2].[Pb+2].[O-][As]([O-])([O-])=O.[O-][As]([O-])([O-])=O LFEUVBZXUFMACD-UHFFFAOYSA-H 0.000 description 11
- 230000001427 coherent effect Effects 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 238000001514 detection method Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002188554A JP4020713B2 (ja) | 2002-06-27 | 2002-06-27 | 光学式エンコーダ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002188554A JP4020713B2 (ja) | 2002-06-27 | 2002-06-27 | 光学式エンコーダ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004028905A JP2004028905A (ja) | 2004-01-29 |
| JP2004028905A5 JP2004028905A5 (enExample) | 2005-10-06 |
| JP4020713B2 true JP4020713B2 (ja) | 2007-12-12 |
Family
ID=31183274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002188554A Expired - Fee Related JP4020713B2 (ja) | 2002-06-27 | 2002-06-27 | 光学式エンコーダ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4020713B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106123934A (zh) * | 2016-08-26 | 2016-11-16 | 长春禹衡光学有限公司 | 一种分体式光栅编码器 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5393952B2 (ja) * | 2007-03-01 | 2014-01-22 | 株式会社アイエイアイ | リニアエンコーダとアクチュエータ |
| JP2009036637A (ja) * | 2007-08-01 | 2009-02-19 | Sony Corp | 変位測定装置 |
| JP2011095180A (ja) * | 2009-10-30 | 2011-05-12 | Iai:Kk | エンコーダ及びサーボモータ |
| JP2011099869A (ja) * | 2011-01-17 | 2011-05-19 | Canon Inc | 光学式エンコーダ |
| DE102013222197A1 (de) * | 2013-10-31 | 2015-04-30 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| CN108731710A (zh) * | 2018-07-11 | 2018-11-02 | 上海市雷智电机有限公司 | 一种编码器 |
-
2002
- 2002-06-27 JP JP2002188554A patent/JP4020713B2/ja not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106123934A (zh) * | 2016-08-26 | 2016-11-16 | 长春禹衡光学有限公司 | 一种分体式光栅编码器 |
| CN106123934B (zh) * | 2016-08-26 | 2019-01-25 | 长春禹衡光学有限公司 | 一种分体式光栅编码器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004028905A (ja) | 2004-01-29 |
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