JP2004028905A5 - - Google Patents

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Publication number
JP2004028905A5
JP2004028905A5 JP2002188554A JP2002188554A JP2004028905A5 JP 2004028905 A5 JP2004028905 A5 JP 2004028905A5 JP 2002188554 A JP2002188554 A JP 2002188554A JP 2002188554 A JP2002188554 A JP 2002188554A JP 2004028905 A5 JP2004028905 A5 JP 2004028905A5
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JP
Japan
Prior art keywords
scale
optical pattern
pattern
optical
pitch
Prior art date
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Application number
JP2002188554A
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English (en)
Japanese (ja)
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JP2004028905A (ja
JP4020713B2 (ja
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Application filed filed Critical
Priority to JP2002188554A priority Critical patent/JP4020713B2/ja
Priority claimed from JP2002188554A external-priority patent/JP4020713B2/ja
Publication of JP2004028905A publication Critical patent/JP2004028905A/ja
Publication of JP2004028905A5 publication Critical patent/JP2004028905A5/ja
Application granted granted Critical
Publication of JP4020713B2 publication Critical patent/JP4020713B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002188554A 2002-06-27 2002-06-27 光学式エンコーダ Expired - Fee Related JP4020713B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002188554A JP4020713B2 (ja) 2002-06-27 2002-06-27 光学式エンコーダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002188554A JP4020713B2 (ja) 2002-06-27 2002-06-27 光学式エンコーダ

Publications (3)

Publication Number Publication Date
JP2004028905A JP2004028905A (ja) 2004-01-29
JP2004028905A5 true JP2004028905A5 (enExample) 2005-10-06
JP4020713B2 JP4020713B2 (ja) 2007-12-12

Family

ID=31183274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002188554A Expired - Fee Related JP4020713B2 (ja) 2002-06-27 2002-06-27 光学式エンコーダ

Country Status (1)

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JP (1) JP4020713B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5393952B2 (ja) * 2007-03-01 2014-01-22 株式会社アイエイアイ リニアエンコーダとアクチュエータ
JP2009036637A (ja) * 2007-08-01 2009-02-19 Sony Corp 変位測定装置
JP2011095180A (ja) * 2009-10-30 2011-05-12 Iai:Kk エンコーダ及びサーボモータ
JP2011099869A (ja) * 2011-01-17 2011-05-19 Canon Inc 光学式エンコーダ
DE102013222197A1 (de) * 2013-10-31 2015-04-30 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
CN106123934B (zh) * 2016-08-26 2019-01-25 长春禹衡光学有限公司 一种分体式光栅编码器
CN108731710A (zh) * 2018-07-11 2018-11-02 上海市雷智电机有限公司 一种编码器

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