JP3994372B2 - 空気保持装置 - Google Patents

空気保持装置 Download PDF

Info

Publication number
JP3994372B2
JP3994372B2 JP2001103055A JP2001103055A JP3994372B2 JP 3994372 B2 JP3994372 B2 JP 3994372B2 JP 2001103055 A JP2001103055 A JP 2001103055A JP 2001103055 A JP2001103055 A JP 2001103055A JP 3994372 B2 JP3994372 B2 JP 3994372B2
Authority
JP
Japan
Prior art keywords
workpiece
cushion chamber
air
holding device
negative pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001103055A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001353683A5 (enExample
JP2001353683A (ja
Inventor
博 明石
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP2001103055A priority Critical patent/JP3994372B2/ja
Publication of JP2001353683A publication Critical patent/JP2001353683A/ja
Publication of JP2001353683A5 publication Critical patent/JP2001353683A5/ja
Application granted granted Critical
Publication of JP3994372B2 publication Critical patent/JP3994372B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2001103055A 2000-04-13 2001-04-02 空気保持装置 Expired - Fee Related JP3994372B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001103055A JP3994372B2 (ja) 2000-04-13 2001-04-02 空気保持装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000-112605 2000-04-13
JP2000112605 2000-04-13
JP2001103055A JP3994372B2 (ja) 2000-04-13 2001-04-02 空気保持装置

Publications (3)

Publication Number Publication Date
JP2001353683A JP2001353683A (ja) 2001-12-25
JP2001353683A5 JP2001353683A5 (enExample) 2005-08-11
JP3994372B2 true JP3994372B2 (ja) 2007-10-17

Family

ID=26590086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001103055A Expired - Fee Related JP3994372B2 (ja) 2000-04-13 2001-04-02 空気保持装置

Country Status (1)

Country Link
JP (1) JP3994372B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103277644A (zh) * 2013-05-20 2013-09-04 哈尔滨工业大学 多轴支撑气浮平台

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7260959B2 (en) 2004-08-27 2007-08-28 Corning Incorporated Glass handling system and method for using same
JP4538849B2 (ja) * 2005-05-31 2010-09-08 村田機械株式会社 非接触保持装置
JP4847719B2 (ja) * 2005-06-14 2011-12-28 株式会社妙徳 非接触ハンド
JP4607910B2 (ja) * 2007-01-16 2011-01-05 東京エレクトロン株式会社 基板搬送装置及び縦型熱処理装置
JP4740414B2 (ja) 2007-04-24 2011-08-03 東京エレクトロン株式会社 基板搬送装置
JP5046009B2 (ja) * 2007-05-15 2012-10-10 圭三 大谷 ノンコンタクト搬送パッド
DE102009051567A1 (de) * 2009-10-22 2011-04-28 Alexander Borowski Bernoulli-Düse, Greifervorrichtung mit Bernoulli-Düse und Verfahren zur Herstellung
JP2020044603A (ja) * 2018-09-18 2020-03-26 東洋自動機株式会社 物品移送方法及び物品移送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103277644A (zh) * 2013-05-20 2013-09-04 哈尔滨工业大学 多轴支撑气浮平台
CN103277644B (zh) * 2013-05-20 2015-11-18 哈尔滨工业大学 多轴支撑气浮平台

Also Published As

Publication number Publication date
JP2001353683A (ja) 2001-12-25

Similar Documents

Publication Publication Date Title
TWI851779B (zh) 盒蓋打開裝置、用於無塵室設備的組件、以及用於打開和淨化晶圓盒的方法
KR100675408B1 (ko) 들기 장치
JP4669252B2 (ja) 旋回流形成体および非接触搬送装置
JP3994372B2 (ja) 空気保持装置
JP2002064130A (ja) 非接触搬送装置
JP2002254378A (ja) 液中ワーク取り出し装置
JP2012040621A (ja) 非接触吸着装置
JPH0750336A (ja) 差動排気型真空吸着治具
JPH10181879A (ja) 搬送装置
JP4030038B2 (ja) 通気性ワーク取り出し・保持装置及び通気性ワークの取り扱い方法
JP2002127070A (ja) 板状体保持装置
JP2002368065A (ja) 位置合わせ装置
JP3383739B2 (ja) ワーク保持装置
CN109119370B (zh) 切削装置
JP6086476B2 (ja) 基板浮上装置
JPH05299492A (ja) ウエハの位置決め装置
JP4459023B2 (ja) 基板保持装置
JPH0512113B2 (enExample)
JP2011108879A (ja) ワーク搬送装置
JPH06321351A (ja) 無接触ピックアップ装置
JP2002280439A (ja) 搬送装置
JPH0151413B2 (enExample)
JPH05335404A (ja) 無接触保持装置
JP5040795B2 (ja) 非接触搬送装置
JP3136316U (ja) ディスク非接触脱着器

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20041203

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050126

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050207

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20060410

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060523

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060629

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20061212

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070201

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20070306

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070424

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070607

A911 Transfer of reconsideration by examiner before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20070614

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070717

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070719

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100810

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 3994372

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100810

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100810

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130810

Year of fee payment: 6

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130810

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20160810

Year of fee payment: 9

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees