JP3992817B2 - 半導体光電変換装置の製造方法 - Google Patents
半導体光電変換装置の製造方法 Download PDFInfo
- Publication number
- JP3992817B2 JP3992817B2 JP04081898A JP4081898A JP3992817B2 JP 3992817 B2 JP3992817 B2 JP 3992817B2 JP 04081898 A JP04081898 A JP 04081898A JP 4081898 A JP4081898 A JP 4081898A JP 3992817 B2 JP3992817 B2 JP 3992817B2
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- Prior art keywords
- gate electrode
- film
- oxide film
- impurity region
- region
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04081898A JP3992817B2 (ja) | 1998-02-23 | 1998-02-23 | 半導体光電変換装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04081898A JP3992817B2 (ja) | 1998-02-23 | 1998-02-23 | 半導体光電変換装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH11238901A JPH11238901A (ja) | 1999-08-31 |
| JPH11238901A5 JPH11238901A5 (https=) | 2005-07-14 |
| JP3992817B2 true JP3992817B2 (ja) | 2007-10-17 |
Family
ID=12591248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP04081898A Expired - Fee Related JP3992817B2 (ja) | 1998-02-23 | 1998-02-23 | 半導体光電変換装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3992817B2 (https=) |
-
1998
- 1998-02-23 JP JP04081898A patent/JP3992817B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11238901A (ja) | 1999-08-31 |
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