JP3944377B2 - 焦点検出装置 - Google Patents
焦点検出装置 Download PDFInfo
- Publication number
- JP3944377B2 JP3944377B2 JP2001324035A JP2001324035A JP3944377B2 JP 3944377 B2 JP3944377 B2 JP 3944377B2 JP 2001324035 A JP2001324035 A JP 2001324035A JP 2001324035 A JP2001324035 A JP 2001324035A JP 3944377 B2 JP3944377 B2 JP 3944377B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- subject
- focus detection
- image
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001514 detection method Methods 0.000 title claims description 53
- 230000003287 optical effect Effects 0.000 claims description 40
- 238000005259 measurement Methods 0.000 claims description 30
- 239000004065 semiconductor Substances 0.000 claims description 26
- 239000013307 optical fiber Substances 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 6
- 238000003384 imaging method Methods 0.000 description 21
- 230000010287 polarization Effects 0.000 description 15
- 238000006073 displacement reaction Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- YIFLQBNCXIFWEL-KBXCAEBGSA-N 1-(7-methoxy-benzo[1,3]dioxol-5-yl)-1,2-bis-(2-methyl-but-2-enoyloxy)-propane Natural products COc1cc(cc2OCOc12)[C@H](OC(=O)C(=CC)C)[C@H](C)OC(=O)C(=CC)C YIFLQBNCXIFWEL-KBXCAEBGSA-N 0.000 description 1
- YIFLQBNCXIFWEL-UHFFFAOYSA-N 2-epilaserine Natural products COc1cc(cc2OCOc12)C(OC(=O)C(=C/C)C)C(C)OC(=O)C(=C/C)C YIFLQBNCXIFWEL-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
Images
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
- Automatic Focus Adjustment (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001324035A JP3944377B2 (ja) | 2001-10-22 | 2001-10-22 | 焦点検出装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001324035A JP3944377B2 (ja) | 2001-10-22 | 2001-10-22 | 焦点検出装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2003131116A JP2003131116A (ja) | 2003-05-08 |
JP2003131116A5 JP2003131116A5 (enrdf_load_stackoverflow) | 2005-06-30 |
JP3944377B2 true JP3944377B2 (ja) | 2007-07-11 |
Family
ID=19140839
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001324035A Expired - Fee Related JP3944377B2 (ja) | 2001-10-22 | 2001-10-22 | 焦点検出装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3944377B2 (enrdf_load_stackoverflow) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4869727B2 (ja) * | 2006-02-15 | 2012-02-08 | オリンパス株式会社 | 測定顕微鏡装置 |
WO2010005013A1 (ja) * | 2008-07-09 | 2010-01-14 | 株式会社ニコン | 測定装置 |
EP2370848B1 (en) * | 2008-11-07 | 2013-01-02 | Hamilton Thorne, Inc. | Modular objective assembly |
US10247910B1 (en) * | 2018-03-14 | 2019-04-02 | Nanotronics Imaging, Inc. | Systems, devices and methods for automatic microscopic focus |
US10146041B1 (en) * | 2018-05-01 | 2018-12-04 | Nanotronics Imaging, Inc. | Systems, devices and methods for automatic microscope focus |
JP7219463B2 (ja) * | 2019-04-15 | 2023-02-08 | 大塚電子株式会社 | 光学ユニット、光学測定装置および光学測定方法 |
KR102368468B1 (ko) | 2020-07-13 | 2022-03-02 | 주식회사 에타맥스 | 자동 광 초점 조절장치 및 이를 포함하는 광학장치 |
-
2001
- 2001-10-22 JP JP2001324035A patent/JP3944377B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2003131116A (ja) | 2003-05-08 |
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