JP3944169B2 - 処理溶液の監視及び調整をするための装置 - Google Patents
処理溶液の監視及び調整をするための装置 Download PDFInfo
- Publication number
- JP3944169B2 JP3944169B2 JP2003573503A JP2003573503A JP3944169B2 JP 3944169 B2 JP3944169 B2 JP 3944169B2 JP 2003573503 A JP2003573503 A JP 2003573503A JP 2003573503 A JP2003573503 A JP 2003573503A JP 3944169 B2 JP3944169 B2 JP 3944169B2
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- measuring
- capillary
- surface tension
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000012545 processing Methods 0.000 title claims abstract description 37
- 238000012544 monitoring process Methods 0.000 title claims abstract description 12
- 238000000034 method Methods 0.000 claims abstract description 39
- 239000004094 surface-active agent Substances 0.000 claims abstract description 23
- 238000004140 cleaning Methods 0.000 claims abstract description 21
- 230000008569 process Effects 0.000 claims abstract description 18
- 238000000576 coating method Methods 0.000 claims abstract description 6
- 239000011248 coating agent Substances 0.000 claims abstract description 5
- 238000005259 measurement Methods 0.000 claims description 47
- 239000000243 solution Substances 0.000 claims description 45
- 239000007788 liquid Substances 0.000 claims description 22
- 238000011010 flushing procedure Methods 0.000 claims description 10
- 238000005406 washing Methods 0.000 claims description 9
- 238000004891 communication Methods 0.000 claims description 5
- 230000002209 hydrophobic effect Effects 0.000 claims description 5
- 230000002452 interceptive effect Effects 0.000 claims description 2
- 230000011664 signaling Effects 0.000 claims description 2
- 239000012482 calibration solution Substances 0.000 claims 3
- 206010039897 Sedation Diseases 0.000 claims 1
- 239000000523 sample Substances 0.000 claims 1
- 230000036280 sedation Effects 0.000 claims 1
- 230000001276 controlling effect Effects 0.000 abstract description 4
- 239000000654 additive Substances 0.000 abstract description 3
- 230000001105 regulatory effect Effects 0.000 abstract description 2
- 230000000996 additive effect Effects 0.000 abstract 1
- 239000000284 extract Substances 0.000 abstract 1
- 238000009434 installation Methods 0.000 abstract 1
- 238000004886 process control Methods 0.000 abstract 1
- 238000007726 management method Methods 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 238000012423 maintenance Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000008859 change Effects 0.000 description 4
- 238000011109 contamination Methods 0.000 description 4
- 239000012459 cleaning agent Substances 0.000 description 3
- 239000003599 detergent Substances 0.000 description 3
- 239000000839 emulsion Substances 0.000 description 3
- 239000013505 freshwater Substances 0.000 description 3
- 238000012994 industrial processing Methods 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 230000002238 attenuated effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 239000002689 soil Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000002280 amphoteric surfactant Substances 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 239000003093 cationic surfactant Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000011430 maximum method Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005555 metalworking Methods 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 229920006260 polyaryletherketone Polymers 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000002000 scavenging effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- 239000003039 volatile agent Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B23/00—Testing or monitoring of control systems or parts thereof
- G05B23/02—Electric testing or monitoring
- G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
- G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
- G05B23/0286—Modifications to the monitored process, e.g. stopping operation or adapting control
- G05B23/0294—Optimizing process, e.g. process efficiency, product quality
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T436/00—Chemistry: analytical and immunological testing
- Y10T436/12—Condition responsive control
Landscapes
- Engineering & Computer Science (AREA)
- Quality & Reliability (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Paper (AREA)
Description
1a ハウジング
1b ハウジングドア、(開)閉可能
1c ハウジング内の取付けプレート
2 洗浄槽
3 測定容器
4 取付けプレートの緩衝材
4a ハウジングの緩衝材
5 供給路
6 排出路
7 分配器
8 ライン網からの新鮮水のための供給接続部
9 試料(n)のための供給接続部
10 弁
11 圧力調整器
12 測定容器からの排出ホース
13 測定毛管
13a 気泡流出箇所での測定毛管の壁部
13b サポートリング
13c 絞り
13d クイックロック
14 バッフルプレート
15 オーバーフロー
16 気泡流出口
17 水密なエレクトロニクスハウジング
18 ディスプレイ
19 キーボード
20 水密なケーブル導入部
21 操作電流、インターフェース並びに機器に固有の弁及び/又はポンプのための接続ライン
22 洗浄設備の処理溶液管理システム(SPS)
23 洗浄設備の洗浄槽へのクリーナの配量をするための装置
24 クリーナ(濃縮液)リザーブ
25 気体容積流のための調整式の供給源を含めた表面張力の測定モジュール
26 温度測定のための測定モジュール
27 別の測定モジュールのための準備部
28 別のセンサのための自由な穿孔部
29 温度センサ
Claims (9)
- 泡圧法による処理溶液の試料の表面張力測定を基盤として、連続的に作業する産業上の洗浄設備、コーティング設備及びフラッシング設備において界面活性剤を含有する処理溶液の品質の継続的な監視及び調整をするための装置において、
表面張力の自動的な検出をするため又は処理溶液内の界面活性剤の濃度の自動的な検出をするため、測定値の自動的な加工及び装置により処理溶液への干渉をするためのプログラムの予設定可能な内部経過の制御をするため、並びに外部の配量装置(23)の自動的な制御及び外部の処理溶液管理システム(22)との自動的なコミュニケーションをするために、装置が、機能的にも構造的にも1つの自立したユニット(1)となるようにハウジング(1a)内に集約されており、少なくとも、
−測定容器(3)内のフラッシング液、校正液及び試料(n)のプログラム計算された交換をするためのプログラム制御された供給及び排出用の供給装置(7,10,11)を有する測定容器(3)と、
−測定容器(3)内の測定毛管(13)と、
−測定ガスを測定毛管(13)に供給するためのプログラム制御された供給装置と、
−測定毛管(13)にて流出する校正液及び試料(n)内の気泡の泡圧のパラメータを検出するための圧力センサと、
−作動電流のため、装置の状態、プロセス経過及び/又は処理溶液の状態の信号化のため、外部の処理溶液管理システム(22)のため、並びに液体のためのホース/チューブ(8,9,12)のための接続部/インターフェース(21)と、
を有することを特徴とする装置。 - 測定容器(3)が、洗浄モード、校正モード及び測定モードで、プログラム計算されて相前後して洗浄液、校正液及び試料(n)によってそれぞれ貫流されることを特徴とする請求項1に記載の装置。
- 測定容器(3)が、測定毛管(13)の領域内で、流動の鎮静化をされた領域を包含することを特徴とする請求項1に記載の装置。
- 表面張力を検出するための装置が、振動から隔離されるように支承されていることを特徴とする請求項1に記載の装置。
- 測定毛管(13)が、疎水性であり、気泡出口において試料表面に対して傾斜しており、そして降下する気泡のためのサポートリング(13b)を備えることを特徴とする請求項1に記載の装置。
- 洗浄モードで超音波を測定毛管(13)に作用させるための超音波発信器が、測定容器(3)内に配設されていることを特徴とする請求項1に記載の装置。
- 導電率、濁り及びpH値のような別の測定値を検出するための付加的なセンサが、装置内に統合されており、この装置によって加工されることを特徴とする請求項1に記載の装置。
- ハウジング(1a)内に、測定値及びシステム状態の表示及び応答をするための表示及び操作フィールド(18,19)が配設されていることを特徴とする請求項1に記載の装置。
- 1つ又は複数の外部の配量装置(23)を直接接続するための1つ又は複数のインターフェース(21)が存在することを特徴とする請求項1に記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10209466A DE10209466B4 (de) | 2002-03-05 | 2002-03-05 | Vorrichtung zum fortlaufenden Überwachen und Regeln von Prozesslösung |
PCT/DE2003/000679 WO2003075108A1 (de) | 2002-03-05 | 2003-03-04 | Vorrichtung und verfahren zum überwachen und regeln von prozesslösung |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005528674A JP2005528674A (ja) | 2005-09-22 |
JP3944169B2 true JP3944169B2 (ja) | 2007-07-11 |
Family
ID=27770963
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003573503A Expired - Lifetime JP3944169B2 (ja) | 2002-03-05 | 2003-03-04 | 処理溶液の監視及び調整をするための装置 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20040253737A1 (ja) |
EP (1) | EP1481300B1 (ja) |
JP (1) | JP3944169B2 (ja) |
AT (1) | ATE310267T1 (ja) |
AU (1) | AU2003218942A1 (ja) |
BR (1) | BR0308303A (ja) |
DE (1) | DE10209466B4 (ja) |
WO (1) | WO2003075108A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10260046B4 (de) * | 2002-12-19 | 2004-11-25 | Gerald Scharrer | Verfahren zur Überprüfung der Reagierfähigkeit eines elektronischen Sensors sowie Vorrichtung zur Durchführung des Verfahrens |
DE102004009735A1 (de) * | 2004-02-25 | 2005-09-15 | Endress + Hauser Gmbh + Co. Kg | Meßgerät mit Anzeigevorrichtung |
JP4382569B2 (ja) * | 2004-05-07 | 2009-12-16 | 株式会社東芝 | 塗膜形成装置、塗膜形成方法および製造管理装置 |
JP4792937B2 (ja) * | 2005-11-21 | 2011-10-12 | 三菱化学エンジニアリング株式会社 | 界面活性剤含有アルカリ現像液の製造方法 |
US8753896B2 (en) * | 2007-04-05 | 2014-06-17 | Nalco Company | Method of monitoring a surfactant in a microelectronic process by fluorescence |
DE102007036800A1 (de) * | 2007-05-29 | 2008-12-04 | Herbert Kannegiesser Gmbh | Verfahren zur Nassbehandlung von Wäschestücken |
DE102007048142A1 (de) * | 2007-10-05 | 2009-04-09 | Enthone Inc., West Haven | Verfahren zur galvanotechnischen Beschichtung von Substratoberflächen |
JP5449175B2 (ja) * | 2007-10-26 | 2014-03-19 | コーニンクレッカ フィリップス エヌ ヴェ | マルチモダリティ軟組織画像化のための閉ループレジストレーション制御 |
DE202009012456U1 (de) * | 2009-09-12 | 2009-12-31 | Sita Messtechnik Gmbh | Einrichtung zum Messen von Stoffkonzentrationen in Lösungen auf Basis einer Fluoreszenzmessung |
US9810676B2 (en) * | 2015-01-12 | 2017-11-07 | Ecolab Usa Inc. | Apparatus for, system for and methods of maintaining sensor accuracy |
CN107192640B (zh) * | 2017-07-12 | 2023-10-03 | 广西路桥工程集团有限公司 | 混凝土浸泡试验装置 |
DE102019108094A1 (de) | 2018-03-28 | 2019-10-02 | Lpw Reinigungssysteme Gmbh | Verfahren und Vorrichtung zur Bereitstellung eines Mediums mittels zyklischer Nukleation |
JP7346204B2 (ja) * | 2019-09-26 | 2023-09-19 | 大和ハウス工業株式会社 | 測定装置および測定方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2448768A (en) * | 1945-03-29 | 1948-09-07 | Hans M Cassel | Method and apparatus for measuring surface tension |
US4193818A (en) * | 1978-05-05 | 1980-03-18 | American Sterilizer Company | Combined ultrasonic cleaning and biocidal treatment in a single pressure vessel |
DE3424711A1 (de) * | 1984-07-05 | 1986-02-06 | Lang Apparatebau GmbH, 8227 Siegsdorf | Verfahren zum regeln einer reinigungsanlage und vorrichtung zum durchfuehren des verfahrens |
DE4112417A1 (de) * | 1991-04-16 | 1992-10-22 | Henkel Kgaa | Verfahren zum waschen und vorrichtung zum durchfuehren des verfahrens |
DE4136442A1 (de) * | 1991-11-06 | 1993-05-13 | Henkel Kgaa | Verfahren zum entfetten und reinigen metallischer oberflaechen und vorrichtung zu dessen durchfuehrung |
US5404893A (en) * | 1992-03-12 | 1995-04-11 | Ecolab Inc. | Self-optimizing detergent controller |
DE4300514A1 (de) * | 1993-01-12 | 1994-07-14 | Miele & Cie | Verfahren zur Bestimmung der freien Tenside in wäßrigen Öl-Wasser-Emulsionen |
DE29609646U1 (de) * | 1996-05-31 | 1996-08-14 | Technische Universität Dresden, 01069 Dresden | Vorrichtung zur dynamischen Messung der Oberflächenspannung einer Flüssigkeit |
US6085577A (en) * | 1996-10-03 | 2000-07-11 | Chem-Dyne Research Company | Surface tension measurement in a pressurized environment |
DE19653752C2 (de) * | 1996-12-20 | 2003-08-07 | Sita Messtechnik Gmbh | Verfahren und Einrichtung zur Reinigung von Prozess-Meßzellen mit Kapillaren |
DE19814500A1 (de) * | 1998-04-01 | 1999-10-14 | Henkel Kgaa | Automatische Kontrolle und Steuerung des Tensidgehalts in wäßrigen Prozeßlösungen |
DE19836720A1 (de) * | 1998-08-13 | 2000-02-17 | Henkel Kgaa | Automatische Kontrolle und Steuerung von Reinigerbäder |
ATE267286T1 (de) * | 1999-06-22 | 2004-06-15 | Miele & Cie | Verfahren zur bestimmung der konzentration eines waschmittels, verfahren zum dosieren von waschmittel und waschmaschine zur durchführung solcher verfahren |
DE19933631C2 (de) * | 1999-07-17 | 2003-03-13 | Sita Messtechnik Gmbh | Verfahren zur statischen Messung der Oberflächenspannung von Flüssigkeiten |
DE29919461U1 (de) * | 1999-11-05 | 2000-02-10 | SITA Messtechnik GmbH, 01217 Dresden | Kapillare |
-
2002
- 2002-03-05 DE DE10209466A patent/DE10209466B4/de not_active Expired - Lifetime
-
2003
- 2003-03-04 EP EP03714668A patent/EP1481300B1/de not_active Expired - Lifetime
- 2003-03-04 US US10/492,815 patent/US20040253737A1/en not_active Abandoned
- 2003-03-04 WO PCT/DE2003/000679 patent/WO2003075108A1/de active IP Right Grant
- 2003-03-04 AT AT03714668T patent/ATE310267T1/de not_active IP Right Cessation
- 2003-03-04 JP JP2003573503A patent/JP3944169B2/ja not_active Expired - Lifetime
- 2003-03-04 AU AU2003218942A patent/AU2003218942A1/en not_active Abandoned
- 2003-03-04 BR BR0308303-9A patent/BR0308303A/pt not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP1481300B1 (de) | 2005-11-16 |
WO2003075108A1 (de) | 2003-09-12 |
US20040253737A1 (en) | 2004-12-16 |
EP1481300A1 (de) | 2004-12-01 |
BR0308303A (pt) | 2004-12-28 |
DE10209466B4 (de) | 2004-03-11 |
AU2003218942A1 (en) | 2003-09-16 |
JP2005528674A (ja) | 2005-09-22 |
ATE310267T1 (de) | 2005-12-15 |
DE10209466A1 (de) | 2003-10-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3944169B2 (ja) | 処理溶液の監視及び調整をするための装置 | |
KR101387036B1 (ko) | 공정 스트림에서의 미생물학적 활동 모니터링 방법 | |
KR950034549A (ko) | 반도체 디바이스 제조 방법 및 그 제조 장치 | |
KR200261175Y1 (ko) | 반도체웨이퍼세정용약액공급장치 | |
KR20010072569A (ko) | 자동화 화학공정 제어 시스템 | |
JP2002501119A (ja) | アルカリ度自動測定による洗浄浴のコントロール方法 | |
JP6684132B2 (ja) | 自動水道水検査装置 | |
JP6763608B2 (ja) | 現像液の二酸化炭素濃度表示装置、及び現像液管理装置 | |
KR100614114B1 (ko) | 기판 세정용 용액 희석시스템 및 방법 | |
KR100394194B1 (ko) | 화학용액 자동 공급장치 및 그 제어방법 | |
JPH04300123A (ja) | ワイヤカット放電加工装置 | |
US7273561B1 (en) | Method for determining the chemical dosage required to reduce sulfides in wastewater to acceptable levels | |
KR20180087119A (ko) | 현상액의 농도 감시 장치, 및 현상액 관리 장치 | |
JP4565867B2 (ja) | 電解アルカリ性水を用いた超音波洗浄装置 | |
KR100800170B1 (ko) | 시료수 저장용 수조 | |
JP2003527477A (ja) | 一定間隔の化学薬品の補給システム | |
KR100737752B1 (ko) | 처리액 공급장치 및 이를 이용한 처리액 공급방법 | |
KR20180087118A (ko) | 현상액의 성분 농도 측정 장치, 및 현상액 관리 장치 | |
JPH03105217A (ja) | 差圧式水位測定装置 | |
KR20000050397A (ko) | 반도체 세정액 농도 제어장치 및 방법 | |
MXPA00007224A (en) | Automatic command and control of cleansing baths by means of alkalinity regulation | |
KR100196214B1 (ko) | 반도체 제조장치의 세척장치 | |
KR20070073481A (ko) | 처리액 공급 장치 | |
KR20180087122A (ko) | 현상액의 농도 감시 장치, 및 현상액 관리 장치 | |
JPH05212628A (ja) | 放電加工装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20061121 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070209 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20070403 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20070406 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 3944169 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110413 Year of fee payment: 4 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110413 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120413 Year of fee payment: 5 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120413 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130413 Year of fee payment: 6 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130413 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140413 Year of fee payment: 7 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |