JP3906856B2 - 光学素子、空間光学フィルタ、走査型近接場光学顕微鏡用プローブおよび写真平版印刷用マスク - Google Patents
光学素子、空間光学フィルタ、走査型近接場光学顕微鏡用プローブおよび写真平版印刷用マスク Download PDFInfo
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- JP3906856B2 JP3906856B2 JP2004239641A JP2004239641A JP3906856B2 JP 3906856 B2 JP3906856 B2 JP 3906856B2 JP 2004239641 A JP2004239641 A JP 2004239641A JP 2004239641 A JP2004239641 A JP 2004239641A JP 3906856 B2 JP3906856 B2 JP 3906856B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/204—Filters in which spectral selection is performed by means of a conductive grid or array, e.g. frequency selective surfaces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
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Description
第1および第2の表面を有する金属材料またはドープ処理をした半導体材料から構成される不透明な導電性フィルムと、
前記不透明な導電性フィルムに設けられ、前記第1の表面から前記第2の表面に連通する入射光の波長未満の径を有する少なくとも1つの開口と、
前記不透明な導電性フィルムの前記第1の表面に実質的に隣接する第1の屈折率の固体または液体の第1の誘電体層と、
前記不透明な導電性フィルムの前記第2の表面に実質的に隣接する第2の屈折率の固体または液体の第2の誘電体層とを有し、
前記第2の屈折率は実質的に前記第1の屈折率に等しく、前記不透明な導電性フィルムの1つの表面に入射する光が前記不透明な導電性フィルムの少なくとも1つの表面の上の表面プラズモンモードと相互作用し、前記不透明な導電性フィルムの前記開口の少なくとも1つを通ずる光伝送を強化する。
上記のいずれかに記載の光学素子を有してなり、
前記不透明な導電性フィルムの前記開口の少なくとも1つを通ずる光伝送が強化され、
さらに特定範囲の波長の光のみが前記不透明な導電性フィルムの前記開口を通じて伝送されるように入射光線に関する前記不透明な導電性フィルムの方位を調整する手段を有する。
上記のいずれかに記載の光学素子を有してなり、前記不透明な導電性フィルムの前記開口の少なくとも1つを通ずる光伝送が強化され、
さらに各開口を通じて移動する光が対応する光ファイバに入るように各開口と連通して配置された光ファイバを有する。
光源から受光するために前面が光源の近くに配置された上記のいずれかに記載の光学素子を有してなり、
前記不透明な導電性フィルムの前記開口の少なくとも1つを通ずる光伝送が強化され、強化された伝送光が前記光学素子を通じて前記光検出器に伝送される。
光を前記光検出器に伝送するために前面が前記光検出器の近くに配置された上記のいずれかに記載の光学素子を有してなり、
前記不透明な導電性フィルムの前記開口の少なくとも1つを通ずる光伝送が強化され、強化された伝送光が前記光検出器に伝送される。
上記のいずれかに記載の光学素子を有してなり、
転写する前記画像に対応するパターンに準拠して前記感光性耐蝕膜を被覆した基板を露光するように前記不透明な導電性フィルムの前記開口の少なくとも1つを通ずる光伝送が強化され、前記画像を転写する。
10a、120a 第1の表面
10b、120b 第2の表面
12、106、124a、124b 開口
14a、130 第1の誘電体層
14b、110、140 第2の誘電体層
20 光学素子
70 光学フィルタ
72 支持部材
74 軸
80 光ファイバ
90 光源
92 試料
94 光検出器
100 プローブ
102 前面
108、126 表面特殊形状
142 画像
160 基板
150 入射光
200 マスク
Claims (11)
- 光学素子であって、
第1および第2の表面を有する金属材料またはドープ処理をした半導体材料から構成される不透明な導電性フィルムと、
前記不透明な導電性フィルムに設けられ、前記第1の表面から前記第2の表面に連通する入射光の波長未満の径を有する少なくとも1つの開口と、
前記不透明な導電性フィルムの前記第1の表面に実質的に隣接する第1の屈折率の固体または液体の第1の誘電体層と、
前記不透明な導電性フィルムの前記第2の表面に実質的に隣接する第2の屈折率の固体または液体の第2の誘電体層とを有し、
前記第2の屈折率は実質的に前記第1の屈折率に等しく、前記不透明な導電性フィルムの1つの表面に入射する光が前記不透明な導電性フィルムの少なくとも1つの表面の上の表面プラズモンモードと相互作用し、前記不透明な導電性フィルムの前記開口の少なくとも1つを通ずる光伝送を強化する光学素子。 - 前記不透明な導電性フィルムの前記第1および第2の表面のうちの少なくとも1つが、周期的な表面形状である請求項1に記載の光学素子。
- 前記周期的な表面形状が複数の表面形状からなる、請求項2に記載の光学素子。
- 前記開口が周期的に配列されている、請求項1に記載の光学素子。
- 前記開口の少なくとも1つが円筒形またはスリット状、矩形、任意の形状のいずれかである、請求項1から4のいずれか1項に記載の光学素子。
- 前記第1および第2の誘電体層の少なくとも1つが選択的に可変な屈折率を有する、請求項1に記載の光学素子。
- 空間光学フィルタであって、
請求項1から6のいずれか1項に記載の光学素子を有してなり、
前記不透明な導電性フィルムの前記開口の少なくとも1つを通ずる光伝送が強化され、
さらに特定範囲の波長の光のみが前記不透明な導電性フィルムの前記開口を通じて伝送されるように入射光線に関する前記不透明な導電性フィルムの方位を調整する手段を有する空間光学フィルタ。 - 空間光学フィルタであって、
請求項1から6のいずれか1項に記載の光学素子を有してなり、前記不透明な導電性フィルムの前記開口の少なくとも1つを通ずる光伝送が強化され、
さらに各開口を通じて移動する光が対応する光ファイバに入るように各開口と連通して配置された光ファイバを有する空間光学フィルタ。 - 光源と光検出器を有する走査型近接場光学顕微鏡の集光モードで使用する走査型近接場光学顕微鏡用プローブであって、
光源から受光するために前面が光源の近くに配置された請求項1から6のいずれか1項に記載の光学素子を有してなり、
前記不透明な導電性フィルムの前記開口の少なくとも1つを通ずる光伝送が強化され、強化された伝送光が前記光学素子を通じて前記光検出器に伝送される走査型近接場光学顕微鏡用プローブ。 - 光源と光検出器を有する走査型近接場光学顕微鏡の放射モードで使用する走査型近接場光学顕微鏡用プローブであって、
光を前記光検出器に伝送するために前面が前記光検出器の近くに配置された請求項1から6のいずれか1項に記載の光学素子を有してなり、
前記不透明な導電性フィルムの前記開口の少なくとも1つを通ずる光伝送が強化され、強化された伝送光が前記光検出器に伝送される走査型近接場光学顕微鏡用プローブ。 - 感光性耐蝕膜を被覆した基板に画像を転写する写真平版印刷用マスクであって、
請求項1から6のいずれか1項に記載の光学素子を有してなり、
転写する前記画像に対応するパターンに準拠して前記感光性耐蝕膜を被覆した基板を露光するように前記不透明な導電性フィルムの前記開口の少なくとも1つを通ずる光伝送が強化され、前記画像を転写する写真平版印刷用マスク。
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US09/435,132 US6285020B1 (en) | 1999-11-05 | 1999-11-05 | Enhanced optical transmission apparatus with improved inter-surface coupling |
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JP (2) | JP3921329B2 (ja) |
CA (1) | CA2307363C (ja) |
DE (1) | DE60035657T2 (ja) |
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CA2307363A1 (en) | 2001-05-05 |
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