JP2009524017A - サブ波長共鳴格子フィルタを用いるラマン分光システム及びラマン分光法 - Google Patents
サブ波長共鳴格子フィルタを用いるラマン分光システム及びラマン分光法 Download PDFInfo
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0227—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using notch filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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- G02B5/18—Diffraction gratings
- G02B5/1809—Diffraction gratings with pitch less than or comparable to the wavelength
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
- G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
Abstract
Description
Claims (10)
- 放射源(602)と、
前記放射源(602)からの放射を受信するように配置される検出器(612)と、
前記放射源と前記検出器との間に配置されるサブ波長共鳴格子フィルタ(608)とを備え、
前記サブ波長共鳴格子フィルタ(608)は、導波路層(110)と、回折素子(104)のアレイを含む被パターニング層(102)とを有することを特徴とするラマンシステム(600)。 - 基板であって、少なくとも1つのフォトダイオードが前記基板内及び前記基板上に形成される能動面を含む、基板と、
集積サブ波長共鳴格子フィルタとを備え、
前記サブ波長共鳴格子フィルタ(100)は、前記能動面上に形成される導波路層(110)と、前記導波路層(110)上に形成される回折素子(104)のアレイを含む被パターニング層(102)とを有することを特徴とする集積フォトダイオードフィルタ。 - 前記サブ波長共鳴格子フィルタ(100)は、単一の被パターニング層を含むことを特徴とする請求項2に記載の集積フォトダイオードフィルタ。
- 前記回折素子(104)は前記導波路層上に突出する円形の柱状物であり、約500nmより短い横方向寸法を有するか、又は、約500nmよりも短い、前記導波路層上の高さを有することを特徴とする請求項2に記載の集積フォトダイオードフィルタ。
- 前記被パターニング層(102)は、第1の直交する方向及び第2の直交する方向における周期性を有する2次元アレイを含むことを特徴とする請求項2に記載の集積フォトダイオードフィルタ。
- 前記第1の直交する方向における前記周期性及び前記第2の直交する方向における前記周期性は等しいことを特徴とする請求項5に記載の集積フォトダイオードフィルタ。
- 連続する回折素子(104)間の間隔は約500nm未満であることを特徴とする請求項2に記載の集積フォトダイオードフィルタ。
- 前記導波路層(110)は実質的に平坦な導波路層であることを特徴とする請求項2に記載の集積フォトダイオードフィルタ。
- 前記導波路層(110)の屈折率は、前記被パターニング層の実効屈折率よりも大きいことを特徴とする請求項2に記載の集積フォトダイオードフィルタ。
- 前記被パターニング層(102)及び前記導波路層(110)は、酸化ケイ素、窒化ケイ素、酸窒化ケイ素、酸化ハフニウム及び酸化タンタル、並びにそれらの混合物から成る群から選択される光学的に透過性の誘電体材料から形成されることを特徴とする請求項2に記載の集積フォトダイオードフィルタ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/257,073 US7474396B2 (en) | 2006-01-17 | 2006-01-17 | Raman spectroscopy system and method using a subwavelength resonant grating filter |
PCT/US2006/028301 WO2007084184A1 (en) | 2006-01-17 | 2006-07-21 | Raman spectroscopy system and method using a subwavelength resonant grating filter |
Publications (1)
Publication Number | Publication Date |
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JP2009524017A true JP2009524017A (ja) | 2009-06-25 |
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JP2008550305A Pending JP2009524017A (ja) | 2006-01-17 | 2006-07-21 | サブ波長共鳴格子フィルタを用いるラマン分光システム及びラマン分光法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7474396B2 (ja) |
EP (1) | EP1974193A1 (ja) |
JP (1) | JP2009524017A (ja) |
CN (1) | CN101360981A (ja) |
WO (1) | WO2007084184A1 (ja) |
Cited By (2)
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JP2015092234A (ja) * | 2013-09-30 | 2015-05-14 | 株式会社豊田中央研究所 | レンズおよびその製造方法 |
JP2022534329A (ja) * | 2019-05-28 | 2022-07-29 | イルミナ インコーポレイテッド | 平面導波路を有するフローセルの製造 |
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EP2454619A4 (en) | 2009-07-17 | 2016-01-06 | Hewlett Packard Development Co | NON PERIODIC FILTER REFLECTORS WITH FOCUSING STRENGTH AND METHOD FOR THE PRODUCTION THEREOF |
EP2480917A4 (en) | 2009-09-23 | 2013-05-29 | Hewlett Packard Development Co | OPTICAL DEVICES BASED ON PIGGING GRIDS |
US9093819B2 (en) | 2010-01-29 | 2015-07-28 | Hewlett-Packard Development Company, L.P. | Vertical-cavity surface-emitting lasers with non-periodic gratings |
US8952403B2 (en) | 2010-01-29 | 2015-02-10 | Hewlett-Packard Development, L.P. | Optical devices based on non-periodic sub-wavelength gratings |
US8842363B2 (en) * | 2010-01-29 | 2014-09-23 | Hewlett-Packard Development Company, L.P. | Dynamically varying an optical characteristic of light by a sub-wavelength grating |
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US20130271759A1 (en) * | 2011-01-31 | 2013-10-17 | David A. Fattal | Apparatus and method for performing spectroscopy |
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US9488583B2 (en) * | 2012-12-31 | 2016-11-08 | Universiteit Gent | Molecular analysis device |
US9354401B2 (en) | 2013-01-30 | 2016-05-31 | Hewlett Packard Enterprise Development Lp | Optical connector having a cleaning element |
WO2015168182A1 (en) | 2014-04-28 | 2015-11-05 | Finisar Corporation | Reflective diffraction gratings employing efficiency enhancement or etch barrier layers |
CN104777528B (zh) * | 2015-03-12 | 2017-03-01 | 浙江大学 | 一种基于二维光栅结构的全金属增透系统 |
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JP7268880B2 (ja) * | 2017-08-24 | 2023-05-08 | 国立大学法人東北大学 | 透過型導波モード共鳴格子一体型分光デバイス及びその製造方法 |
CN110312089B (zh) * | 2019-06-28 | 2022-02-01 | Oppo广东移动通信有限公司 | 一种图像处理方法、装置和存储介质 |
US11953742B2 (en) * | 2021-03-30 | 2024-04-09 | Tdk Corporation | Optical device and optical system |
CN113791470B (zh) * | 2021-09-24 | 2022-05-03 | 北京枭龙科技有限公司 | 共振光栅波导结构及近眼显示装置 |
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2006
- 2006-01-17 US US11/257,073 patent/US7474396B2/en active Active
- 2006-07-21 EP EP06788053A patent/EP1974193A1/en not_active Withdrawn
- 2006-07-21 CN CNA2006800512516A patent/CN101360981A/zh active Pending
- 2006-07-21 JP JP2008550305A patent/JP2009524017A/ja active Pending
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US20070165214A1 (en) | 2007-07-19 |
EP1974193A1 (en) | 2008-10-01 |
WO2007084184A1 (en) | 2007-07-26 |
US7474396B2 (en) | 2009-01-06 |
CN101360981A (zh) | 2009-02-04 |
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