JP3898689B2 - 部品ボンディング装置 - Google Patents
部品ボンディング装置 Download PDFInfo
- Publication number
- JP3898689B2 JP3898689B2 JP2003380567A JP2003380567A JP3898689B2 JP 3898689 B2 JP3898689 B2 JP 3898689B2 JP 2003380567 A JP2003380567 A JP 2003380567A JP 2003380567 A JP2003380567 A JP 2003380567A JP 3898689 B2 JP3898689 B2 JP 3898689B2
- Authority
- JP
- Japan
- Prior art keywords
- component
- bonding apparatus
- component bonding
- glass substrate
- tcp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/83009—Pre-treatment of the layer connector or the bonding area
- H01L2224/83048—Thermal treatments, e.g. annealing, controlled pre-heating or pre-cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Wire Bonding (AREA)
- Die Bonding (AREA)
Description
2 接合部材
3 ガラス基板
4 加圧具
5 ヒータ
6 スポットヒータ
7 ボンディングツール
8 バックアップツール
9 搬送ステージ
10 反射形光学検出器
11 加熱ヒータ
12A 投光部
12B 受光部
13 ツールホルダ
14 取付枠
Claims (3)
- 基板に供給された部品を前記基板に施された接合部材を介して第1の加圧具で仮圧接する仮圧接装置と、前記基板に仮圧接された前記部品を第2の加圧具で加圧して本圧接する本圧接装置とを備える部品ボンディング装置において、
前記仮圧接装置には、前記第1の加圧具の上流側に予熱部を備え、この予熱部により、前記第1の加圧具により仮圧接されている前記部品の上流側に位置する前記接合部材を予熱することを特徴とする部品ボンディング装置。 - 前記予熱部の熱源として、電熱線又は赤外線ランプを用いたことを特徴とする請求項1に記載の部品ボンディング装置。
- 前記部品をテープキャリア部品としたことを特徴とする請求項1または請求項2に記載の部品ボンディング装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003380567A JP3898689B2 (ja) | 2003-11-10 | 2003-11-10 | 部品ボンディング装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003380567A JP3898689B2 (ja) | 2003-11-10 | 2003-11-10 | 部品ボンディング装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22123895A Division JP3502486B2 (ja) | 1995-08-30 | 1995-08-30 | 部品ボンディング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004080055A JP2004080055A (ja) | 2004-03-11 |
JP3898689B2 true JP3898689B2 (ja) | 2007-03-28 |
Family
ID=32025946
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003380567A Expired - Fee Related JP3898689B2 (ja) | 2003-11-10 | 2003-11-10 | 部品ボンディング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3898689B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4206320B2 (ja) * | 2003-09-19 | 2009-01-07 | 株式会社ルネサステクノロジ | 半導体集積回路装置の製造方法 |
KR100756411B1 (ko) | 2005-09-08 | 2007-09-10 | 삼성전자주식회사 | 열압착 공구 및 이를 포함한 열압착 장치 |
-
2003
- 2003-11-10 JP JP2003380567A patent/JP3898689B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2004080055A (ja) | 2004-03-11 |
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