JP3895507B2 - 基板装置及びこれを備えた電気光学装置 - Google Patents

基板装置及びこれを備えた電気光学装置 Download PDF

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Publication number
JP3895507B2
JP3895507B2 JP28082499A JP28082499A JP3895507B2 JP 3895507 B2 JP3895507 B2 JP 3895507B2 JP 28082499 A JP28082499 A JP 28082499A JP 28082499 A JP28082499 A JP 28082499A JP 3895507 B2 JP3895507 B2 JP 3895507B2
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substrate
wiring
groove
conductive layer
electro
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Expired - Fee Related
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JP28082499A
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Japanese (ja)
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JP2001100647A (ja
JP2001100647A5 (enExample
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正夫 村出
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Seiko Epson Corp
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Seiko Epson Corp
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JP28082499A 1999-09-30 1999-09-30 基板装置及びこれを備えた電気光学装置 Expired - Fee Related JP3895507B2 (ja)

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JP28082499A JP3895507B2 (ja) 1999-09-30 1999-09-30 基板装置及びこれを備えた電気光学装置

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JP28082499A JP3895507B2 (ja) 1999-09-30 1999-09-30 基板装置及びこれを備えた電気光学装置

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JP2005357303A Division JP3922293B2 (ja) 2005-12-12 2005-12-12 基板装置及びこれを備えた電気光学装置

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JP2001100647A JP2001100647A (ja) 2001-04-13
JP2001100647A5 JP2001100647A5 (enExample) 2004-08-05
JP3895507B2 true JP3895507B2 (ja) 2007-03-22

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JP28082499A Expired - Fee Related JP3895507B2 (ja) 1999-09-30 1999-09-30 基板装置及びこれを備えた電気光学装置

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021194740A (ja) * 2020-06-15 2021-12-27 スタンレー電気株式会社 Ｍｅｍｓデバイスの製造方法及びｍｅｍｓデバイス
US12443030B2 (en) 2021-06-11 2025-10-14 Stanley Electric Co., Ltd. MEMS device

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4047586B2 (ja) * 2002-01-10 2008-02-13 Ｎｅｃ液晶テクノロジー株式会社 横電界方式のアクティブマトリクス型液晶表示装置
JP3778195B2 (ja) 2003-03-13 2006-05-24 セイコーエプソン株式会社 平坦化層を有する基板及びその製造方法並びに電気光学装置用基板及び電気光学装置及び電子機器
JP3783707B2 (ja) 2003-03-19 2006-06-07 セイコーエプソン株式会社 検査素子付基板並びに電気光学装置用基板及び電気光学装置及び電子機器
JP5062667B2 (ja) * 2007-05-21 2012-10-31 株式会社ジャパンディスプレイウェスト 半透過型液晶表示パネル
JP2014232338A (ja) 2011-09-26 2014-12-11 シャープ株式会社 タッチパネルおよびタッチパネル付き表示装置
CN113066393B (zh) * 2021-03-03 2022-07-29 武汉华星光电半导体显示技术有限公司 显示装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021194740A (ja) * 2020-06-15 2021-12-27 スタンレー電気株式会社 Ｍｅｍｓデバイスの製造方法及びｍｅｍｓデバイス
JP7449784B2 (ja) 2020-06-15 2024-03-14 スタンレー電気株式会社 Ｍｅｍｓデバイスの製造方法及びｍｅｍｓデバイス
US12443030B2 (en) 2021-06-11 2025-10-14 Stanley Electric Co., Ltd. MEMS device

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