JP3873398B2 - 酸素センサ素子及びその製造方法 - Google Patents
酸素センサ素子及びその製造方法 Download PDFInfo
- Publication number
- JP3873398B2 JP3873398B2 JP26284197A JP26284197A JP3873398B2 JP 3873398 B2 JP3873398 B2 JP 3873398B2 JP 26284197 A JP26284197 A JP 26284197A JP 26284197 A JP26284197 A JP 26284197A JP 3873398 B2 JP3873398 B2 JP 3873398B2
- Authority
- JP
- Japan
- Prior art keywords
- oxygen sensor
- sensor element
- protective layer
- dense layer
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims description 170
- 229910052760 oxygen Inorganic materials 0.000 title claims description 170
- 239000001301 oxygen Substances 0.000 title claims description 170
- 238000004519 manufacturing process Methods 0.000 title claims description 25
- 239000011241 protective layer Substances 0.000 claims description 161
- 239000010410 layer Substances 0.000 claims description 128
- 239000007789 gas Substances 0.000 claims description 54
- 239000007784 solid electrolyte Substances 0.000 claims description 49
- 238000005259 measurement Methods 0.000 claims description 47
- 239000010419 fine particle Substances 0.000 claims description 30
- 239000002245 particle Substances 0.000 claims description 22
- 239000011148 porous material Substances 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 15
- 239000000126 substance Substances 0.000 claims description 15
- 239000000919 ceramic Substances 0.000 claims description 8
- 229910019142 PO4 Inorganic materials 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052749 magnesium Inorganic materials 0.000 claims description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 claims description 2
- 239000010452 phosphate Substances 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 29
- 229910052799 carbon Inorganic materials 0.000 description 29
- 239000011248 coating agent Substances 0.000 description 12
- 238000000576 coating method Methods 0.000 description 12
- 230000008021 deposition Effects 0.000 description 12
- 230000000694 effects Effects 0.000 description 11
- 238000010438 heat treatment Methods 0.000 description 11
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 150000001722 carbon compounds Chemical class 0.000 description 9
- 238000002485 combustion reaction Methods 0.000 description 9
- 229910052596 spinel Inorganic materials 0.000 description 9
- 239000011029 spinel Substances 0.000 description 9
- 230000007774 longterm Effects 0.000 description 7
- 238000005245 sintering Methods 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 239000004215 Carbon black (E152) Substances 0.000 description 4
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 4
- 238000004220 aggregation Methods 0.000 description 4
- 230000002776 aggregation Effects 0.000 description 4
- ILRRQNADMUWWFW-UHFFFAOYSA-K aluminium phosphate Chemical compound O1[Al]2OP1(=O)O2 ILRRQNADMUWWFW-UHFFFAOYSA-K 0.000 description 4
- 229910002091 carbon monoxide Inorganic materials 0.000 description 4
- 238000005336 cracking Methods 0.000 description 4
- 229930195733 hydrocarbon Natural products 0.000 description 4
- 150000002430 hydrocarbons Chemical class 0.000 description 4
- 238000007750 plasma spraying Methods 0.000 description 4
- 231100000614 poison Toxicity 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000005524 ceramic coating Methods 0.000 description 3
- 239000011247 coating layer Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000007598 dipping method Methods 0.000 description 3
- 239000000446 fuel Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000010422 painting Methods 0.000 description 3
- 230000007096 poisonous effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000001680 brushing effect Effects 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000032798 delamination Effects 0.000 description 2
- 238000000280 densification Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 229910052745 lead Inorganic materials 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 235000021317 phosphate Nutrition 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000002574 poison Substances 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Measuring Oxygen Concentration In Cells (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26284197A JP3873398B2 (ja) | 1997-09-09 | 1997-09-09 | 酸素センサ素子及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26284197A JP3873398B2 (ja) | 1997-09-09 | 1997-09-09 | 酸素センサ素子及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH1183789A JPH1183789A (ja) | 1999-03-26 |
| JPH1183789A5 JPH1183789A5 (OSRAM) | 2004-12-16 |
| JP3873398B2 true JP3873398B2 (ja) | 2007-01-24 |
Family
ID=17381370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26284197A Expired - Fee Related JP3873398B2 (ja) | 1997-09-09 | 1997-09-09 | 酸素センサ素子及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3873398B2 (OSRAM) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1154263A4 (en) | 1999-10-27 | 2006-08-30 | Ngk Spark Plug Co | OXYGEN DETECTOR AND METHOD FOR MANUFACTURING DETECTION ELEMENT |
| JP2002031618A (ja) * | 2000-05-12 | 2002-01-31 | Denso Corp | ガスセンサ |
| JP4520648B2 (ja) * | 2001-01-31 | 2010-08-11 | 日本特殊陶業株式会社 | ガスセンサ及びその製造方法 |
| JP4622146B2 (ja) | 2001-04-25 | 2011-02-02 | 株式会社デンソー | ガスセンサ素子の製造方法 |
| JP4631926B2 (ja) * | 2001-07-31 | 2011-02-16 | 株式会社デンソー | ガスセンサ |
| JP2007078473A (ja) * | 2005-09-13 | 2007-03-29 | Toyota Motor Corp | ガスセンサ |
| JP5298633B2 (ja) * | 2008-05-19 | 2013-09-25 | 株式会社デンソー | 酸素センサ |
| WO2016080176A1 (ja) * | 2014-11-19 | 2016-05-26 | 株式会社デンソー | ガスセンサ素子 |
| JP6451534B2 (ja) * | 2014-11-19 | 2019-01-16 | 株式会社デンソー | ガスセンサ素子 |
-
1997
- 1997-09-09 JP JP26284197A patent/JP3873398B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH1183789A (ja) | 1999-03-26 |
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