JP3852224B2 - 静電マイクロリレー - Google Patents

静電マイクロリレー Download PDF

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Publication number
JP3852224B2
JP3852224B2 JP28660298A JP28660298A JP3852224B2 JP 3852224 B2 JP3852224 B2 JP 3852224B2 JP 28660298 A JP28660298 A JP 28660298A JP 28660298 A JP28660298 A JP 28660298A JP 3852224 B2 JP3852224 B2 JP 3852224B2
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JP
Japan
Prior art keywords
fixed
substrate
movable
electrode
signal line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP28660298A
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English (en)
Japanese (ja)
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JP2000113792A (ja
JP2000113792A5 (enExample
Inventor
稔 坂田
由幸 古村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
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Publication date
Application filed by Omron Corp filed Critical Omron Corp
Priority to JP28660298A priority Critical patent/JP3852224B2/ja
Priority to CN99118336.3A priority patent/CN1131530C/zh
Publication of JP2000113792A publication Critical patent/JP2000113792A/ja
Publication of JP2000113792A5 publication Critical patent/JP2000113792A5/ja
Application granted granted Critical
Publication of JP3852224B2 publication Critical patent/JP3852224B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

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  • Micromachines (AREA)
JP28660298A 1998-08-31 1998-10-08 静電マイクロリレー Expired - Lifetime JP3852224B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP28660298A JP3852224B2 (ja) 1998-10-08 1998-10-08 静電マイクロリレー
CN99118336.3A CN1131530C (zh) 1998-08-31 1999-08-31 具有耐腐蚀膜的Fe－B－R基永磁体的制造工艺

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28660298A JP3852224B2 (ja) 1998-10-08 1998-10-08 静電マイクロリレー

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2004135813A Division JP2004281412A (ja) 2004-04-30 2004-04-30 静電マイクロリレー
JP2005357907A Division JP3852479B2 (ja) 2005-12-12 2005-12-12 静電マイクロリレー

Publications (3)

Publication Number Publication Date
JP2000113792A JP2000113792A (ja) 2000-04-21
JP2000113792A5 JP2000113792A5 (enExample) 2005-04-28
JP3852224B2 true JP3852224B2 (ja) 2006-11-29

Family

ID=17706549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28660298A Expired - Lifetime JP3852224B2 (ja) 1998-08-31 1998-10-08 静電マイクロリレー

Country Status (1)

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JP (1) JP3852224B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009123111A1 (ja) 2008-03-31 2009-10-08 パナソニック電工株式会社 Ｍｅｍｓスイッチおよびその製造方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3796988B2 (ja) * 1998-11-26 2006-07-12 オムロン株式会社 静電マイクロリレー
JP3137108B2 (ja) * 1999-04-02 2001-02-19 日本電気株式会社 マイクロマシンスイッチ
JP3651404B2 (ja) * 2001-03-27 2005-05-25 オムロン株式会社 静電マイクロリレー、並びに、該静電マイクロリレーを利用した無線装置及び計測装置
US6850133B2 (en) 2002-08-14 2005-02-01 Intel Corporation Electrode configuration in a MEMS switch
JP4586642B2 (ja) * 2005-06-14 2010-11-24 ソニー株式会社 可動素子、ならびにその可動素子を内蔵する半導体デバイス、モジュールおよび電子機器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009123111A1 (ja) 2008-03-31 2009-10-08 パナソニック電工株式会社 Ｍｅｍｓスイッチおよびその製造方法
US8390173B2 (en) 2008-03-31 2013-03-05 Panasonic Corporation MEMS switch and method of manufacturing the MEMS switch

Also Published As

Publication number Publication date
JP2000113792A (ja) 2000-04-21

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