JP3851716B2 - 走査型プローブ顕微鏡の測定方法 - Google Patents

走査型プローブ顕微鏡の測定方法 Download PDF

Info

Publication number
JP3851716B2
JP3851716B2 JP27047797A JP27047797A JP3851716B2 JP 3851716 B2 JP3851716 B2 JP 3851716B2 JP 27047797 A JP27047797 A JP 27047797A JP 27047797 A JP27047797 A JP 27047797A JP 3851716 B2 JP3851716 B2 JP 3851716B2
Authority
JP
Japan
Prior art keywords
measurement
scanning
display
line
probe microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP27047797A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1194852A (ja
JPH1194852A5 (enExample
Inventor
高史 森本
健 村山
隆 白井
陽正 小野里
浩史 黒田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Construction Machinery Co Ltd
Original Assignee
Hitachi Construction Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Construction Machinery Co Ltd filed Critical Hitachi Construction Machinery Co Ltd
Priority to JP27047797A priority Critical patent/JP3851716B2/ja
Publication of JPH1194852A publication Critical patent/JPH1194852A/ja
Publication of JPH1194852A5 publication Critical patent/JPH1194852A5/ja
Application granted granted Critical
Publication of JP3851716B2 publication Critical patent/JP3851716B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP27047797A 1997-09-17 1997-09-17 走査型プローブ顕微鏡の測定方法 Expired - Fee Related JP3851716B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27047797A JP3851716B2 (ja) 1997-09-17 1997-09-17 走査型プローブ顕微鏡の測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27047797A JP3851716B2 (ja) 1997-09-17 1997-09-17 走査型プローブ顕微鏡の測定方法

Publications (3)

Publication Number Publication Date
JPH1194852A JPH1194852A (ja) 1999-04-09
JPH1194852A5 JPH1194852A5 (enExample) 2005-05-19
JP3851716B2 true JP3851716B2 (ja) 2006-11-29

Family

ID=17486856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27047797A Expired - Fee Related JP3851716B2 (ja) 1997-09-17 1997-09-17 走査型プローブ顕微鏡の測定方法

Country Status (1)

Country Link
JP (1) JP3851716B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4557848B2 (ja) * 2005-09-13 2010-10-06 キヤノン株式会社 形状測定方法および形状測定装置

Also Published As

Publication number Publication date
JPH1194852A (ja) 1999-04-09

Similar Documents

Publication Publication Date Title
US5825670A (en) High precison calibration and feature measurement system for a scanning probe microscope
US8732861B2 (en) Control system for a scanning probe microscope
JP7654825B2 (ja) 計測保存リアルタイムノイズ除去機能を備えるａｆｍイメージング
JP2002350320A (ja) 走査型プローブ顕微鏡
JP3230911B2 (ja) 走査電子顕微鏡及びその画像形成方法
Marinello et al. Fast technique for AFM vertical drift compensation
CN101395676A (zh) 带扫描探针显微镜的测量系统的操作方法及测量系统
JP6135820B2 (ja) 走査型プローブ顕微鏡
JP3851716B2 (ja) 走査型プローブ顕微鏡の測定方法
JP4243403B2 (ja) 走査型プローブ顕微鏡の走査方法
JP3406746B2 (ja) 三次元計測方法および表示方法、ならびに三次元計測装置
JP4050873B2 (ja) 探針走査制御方法および走査形プローブ顕微鏡
JP2022134649A (ja) 走査型プローブ顕微鏡、情報処理装置、およびプログラム
JP2005083886A (ja) 微少領域の摩擦力および摩擦係数測定方法
JPH10162768A (ja) 収束電子線回折図形を用いた格子歪み評価方法および評価装置
WO2017221423A1 (ja) 走査型プローブ顕微鏡用データ処理装置
JPH0972925A (ja) 走査型顕微鏡
JP2004132979A (ja) 走査型プローブ顕微鏡
JP2000338068A (ja) 電子線分析装置
JP2953075B2 (ja) 探針で試料近傍を走査して得たデータを画像表示する顕微鏡及びその像測定法
JP7281841B2 (ja) 走査プローブ顕微鏡
JPH07198372A (ja) 走査型プローブ顕微鏡の探針評価方法及びその装置
JP4829055B2 (ja) 微小高さ測定方法及び微小高さ測定装置
JPH10246728A (ja) 走査型プローブ顕微鏡における部分測定方法
JPH0413901A (ja) 探針先端形状識別機能付き走査型トンネル顕微鏡及び探針先端形状識別方法

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040714

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20040714

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20060829

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20060904

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees