JP3847689B2 - バリウム含有ルテニウム酸ストロンチウム電極を用いた圧電体素子、薄膜キャパシタおよびこれらの製造方法並びに該圧電体素子を用いたインクジェット式記録ヘッド - Google Patents
バリウム含有ルテニウム酸ストロンチウム電極を用いた圧電体素子、薄膜キャパシタおよびこれらの製造方法並びに該圧電体素子を用いたインクジェット式記録ヘッド Download PDFInfo
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- JP3847689B2 JP3847689B2 JP2002275749A JP2002275749A JP3847689B2 JP 3847689 B2 JP3847689 B2 JP 3847689B2 JP 2002275749 A JP2002275749 A JP 2002275749A JP 2002275749 A JP2002275749 A JP 2002275749A JP 3847689 B2 JP3847689 B2 JP 3847689B2
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- thin film
- piezoelectric element
- lower electrode
- electrode
- coating
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- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002275749A JP3847689B2 (ja) | 2002-09-20 | 2002-09-20 | バリウム含有ルテニウム酸ストロンチウム電極を用いた圧電体素子、薄膜キャパシタおよびこれらの製造方法並びに該圧電体素子を用いたインクジェット式記録ヘッド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002275749A JP3847689B2 (ja) | 2002-09-20 | 2002-09-20 | バリウム含有ルテニウム酸ストロンチウム電極を用いた圧電体素子、薄膜キャパシタおよびこれらの製造方法並びに該圧電体素子を用いたインクジェット式記録ヘッド |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004111850A JP2004111850A (ja) | 2004-04-08 |
| JP2004111850A5 JP2004111850A5 (enExample) | 2005-04-21 |
| JP3847689B2 true JP3847689B2 (ja) | 2006-11-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002275749A Expired - Fee Related JP3847689B2 (ja) | 2002-09-20 | 2002-09-20 | バリウム含有ルテニウム酸ストロンチウム電極を用いた圧電体素子、薄膜キャパシタおよびこれらの製造方法並びに該圧電体素子を用いたインクジェット式記録ヘッド |
Country Status (1)
| Country | Link |
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| JP (1) | JP3847689B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8727505B2 (en) | 2011-06-30 | 2014-05-20 | Ricoh Company, Ltd. | Electromechanical transducer element, droplet discharge head, and droplet discharge device |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3407417B2 (ja) * | 1994-08-02 | 2003-05-19 | 戸田工業株式会社 | 球状複合体粒子粉末及びその製造方法 |
| WO2006006406A1 (ja) * | 2004-07-13 | 2006-01-19 | Seiko Epson Corporation | 強誘電体薄膜形成用組成物、強誘電体薄膜及び強誘電体薄膜の製造方法並びに液体噴射ヘッド |
| JP4802469B2 (ja) * | 2004-09-14 | 2011-10-26 | 富士ゼロックス株式会社 | 液滴吐出装置 |
| WO2007023985A1 (ja) | 2005-08-23 | 2007-03-01 | Canon Kabushiki Kaisha | 圧電体素子、それを用いた液体吐出ヘッド、および液体吐出装置 |
| JP5328007B2 (ja) * | 2007-03-30 | 2013-10-30 | パナソニック株式会社 | 圧電体素子及びその製造方法 |
| EP1997638B1 (en) | 2007-05-30 | 2012-11-21 | Océ-Technologies B.V. | Method of forming an array of piezoelectric actuators on a membrane |
| JP5242238B2 (ja) * | 2007-05-30 | 2013-07-24 | オセ−テクノロジーズ・ベー・ヴエー | 圧電インクジェットデバイスの製作方法 |
| JP5338239B2 (ja) * | 2008-10-06 | 2013-11-13 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置並びに圧電アクチュエータ |
| JP5327977B2 (ja) * | 2010-04-21 | 2013-10-30 | 独立行政法人科学技術振興機構 | 導電性膜形成用組成物および導電性膜の形成方法 |
| JP6160295B2 (ja) * | 2013-06-25 | 2017-07-12 | 株式会社リコー | 強誘電体膜の成膜方法並びに成膜装置 |
-
2002
- 2002-09-20 JP JP2002275749A patent/JP3847689B2/ja not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8727505B2 (en) | 2011-06-30 | 2014-05-20 | Ricoh Company, Ltd. | Electromechanical transducer element, droplet discharge head, and droplet discharge device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004111850A (ja) | 2004-04-08 |
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