JP3827910B2 - パターン形成体 - Google Patents
パターン形成体 Download PDFInfo
- Publication number
- JP3827910B2 JP3827910B2 JP2000084714A JP2000084714A JP3827910B2 JP 3827910 B2 JP3827910 B2 JP 3827910B2 JP 2000084714 A JP2000084714 A JP 2000084714A JP 2000084714 A JP2000084714 A JP 2000084714A JP 3827910 B2 JP3827910 B2 JP 3827910B2
- Authority
- JP
- Japan
- Prior art keywords
- photocatalyst
- containing layer
- wettability
- pattern
- energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- Catalysts (AREA)
- Optical Filters (AREA)
- Materials For Photolithography (AREA)
- Laminated Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000084714A JP3827910B2 (ja) | 2000-03-22 | 2000-03-22 | パターン形成体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000084714A JP3827910B2 (ja) | 2000-03-22 | 2000-03-22 | パターン形成体 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006160888A Division JP4348351B2 (ja) | 2006-06-09 | 2006-06-09 | パターン形成体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001270024A JP2001270024A (ja) | 2001-10-02 |
| JP2001270024A5 JP2001270024A5 (https=) | 2005-03-17 |
| JP3827910B2 true JP3827910B2 (ja) | 2006-09-27 |
Family
ID=18601158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000084714A Expired - Fee Related JP3827910B2 (ja) | 2000-03-22 | 2000-03-22 | パターン形成体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3827910B2 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004202329A (ja) * | 2002-12-24 | 2004-07-22 | Matsushita Electric Works Ltd | 機能性材料及びその製造方法 |
| JP4565829B2 (ja) * | 2003-11-21 | 2010-10-20 | 大日本印刷株式会社 | パターン形成体用塗工液 |
| JP4576556B2 (ja) * | 2004-01-13 | 2010-11-10 | 独立行政法人物質・材料研究機構 | 可視光応答型複合酸化物系光触媒 |
| JP4613021B2 (ja) * | 2004-03-10 | 2011-01-12 | 大日本印刷株式会社 | 光触媒含有組成物および光触媒含有層 |
| JPWO2005091070A1 (ja) * | 2004-03-19 | 2008-02-07 | ダイキン工業株式会社 | リソグラフィー用基板表面処理剤 |
| JP4753157B2 (ja) * | 2004-10-29 | 2011-08-24 | 大日本印刷株式会社 | パターン形成体用塗工液およびパターン形成体の製造方法 |
| JP2008184357A (ja) * | 2007-01-30 | 2008-08-14 | National Institute Of Advanced Industrial & Technology | 酸化物表面の両親媒性化方法 |
-
2000
- 2000-03-22 JP JP2000084714A patent/JP3827910B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001270024A (ja) | 2001-10-02 |
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