JP3816615B2 - 基板検査装置 - Google Patents

基板検査装置 Download PDF

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Publication number
JP3816615B2
JP3816615B2 JP1530897A JP1530897A JP3816615B2 JP 3816615 B2 JP3816615 B2 JP 3816615B2 JP 1530897 A JP1530897 A JP 1530897A JP 1530897 A JP1530897 A JP 1530897A JP 3816615 B2 JP3816615 B2 JP 3816615B2
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JP
Japan
Prior art keywords
substrate
focusing
image
signal
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1530897A
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English (en)
Japanese (ja)
Other versions
JPH10213522A5 (enExample
JPH10213522A (ja
Inventor
卓 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
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Olympus Corp
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Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP1530897A priority Critical patent/JP3816615B2/ja
Publication of JPH10213522A publication Critical patent/JPH10213522A/ja
Publication of JPH10213522A5 publication Critical patent/JPH10213522A5/ja
Application granted granted Critical
Publication of JP3816615B2 publication Critical patent/JP3816615B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Automatic Focus Adjustment (AREA)
  • Liquid Crystal (AREA)
JP1530897A 1997-01-29 1997-01-29 基板検査装置 Expired - Fee Related JP3816615B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1530897A JP3816615B2 (ja) 1997-01-29 1997-01-29 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1530897A JP3816615B2 (ja) 1997-01-29 1997-01-29 基板検査装置

Publications (3)

Publication Number Publication Date
JPH10213522A JPH10213522A (ja) 1998-08-11
JPH10213522A5 JPH10213522A5 (enExample) 2004-12-24
JP3816615B2 true JP3816615B2 (ja) 2006-08-30

Family

ID=11885174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1530897A Expired - Fee Related JP3816615B2 (ja) 1997-01-29 1997-01-29 基板検査装置

Country Status (1)

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JP (1) JP3816615B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4586272B2 (ja) * 2001-01-12 2010-11-24 ソニー株式会社 基板検査装置と基板検査方法、及び液晶表示装置の製造方法
JP2007225431A (ja) * 2006-02-23 2007-09-06 Mitsubishi Electric Corp 外観検査装置
JP2008197612A (ja) * 2007-01-17 2008-08-28 Fuji Electric Holdings Co Ltd 画像表示装置および画像表示プログラム
JP5038191B2 (ja) * 2008-03-04 2012-10-03 有限会社共同設計企画 電子部品検査方法およびそれに用いられる装置
JP2010025699A (ja) * 2008-07-17 2010-02-04 Shibaura Mechatronics Corp 基板の位置認識装置及び撮像認識方法
JP6333403B2 (ja) * 2014-11-04 2018-05-30 三菱電機株式会社 ロープ径計測システム、ロープ径計測装置、ロープ径計測方法およびプログラム

Also Published As

Publication number Publication date
JPH10213522A (ja) 1998-08-11

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